专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2007033060A1 TARGETS AND PROCESSES FOR FABRICATING SAME 审中-公开
标题翻译：制作相同目标和工艺
公开(公告)号：WO2007033060A1
公开(公告)日：2007-03-22
申请号：PCT/US2006/035267
申请日：2006-09-12
申请人： BOARD OF REGENTS OF THE NEVADA SYSTEM OF HIGHER EDUCATION, on behalf of THE UNIVERSITY OF NEVADA, RENO , COWAN, Thomas, E. , MALEKOS, Steven , KORGAN, Grant , ADAMS, Jesse , SENTOKU, Yasuhiko , LE GALLOUDEC, Nathalie , FUCHS, Julien
发明人： COWAN, Thomas, E. , MALEKOS, Steven , KORGAN, Grant , ADAMS, Jesse , SENTOKU, Yasuhiko , LE GALLOUDEC, Nathalie , FUCHS, Julien
IPC分类号： C23C14/34
CPC分类号： H05H1/24 , G21B1/19 , H01J35/08 , H05G2/00 , H05G2/001 , H05G2/008 , H05H1/02 , Y02E30/16 , Y10T428/12 , Y10T428/12299 , Y10T428/1241 , Y10T428/12493 , Y10T428/12806 , Y10T428/12868 , Y10T428/12889 , Y10T428/13
摘要： In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 μm. In particular examples, the distance is less than about lμm. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.
摘要翻译：在具体实施例中，本公开提供了包括金属层并限定中空内表面的目标。中空的内表面具有内部顶点。内部顶点的至少两个相对点之间的距离小于约15μm。在具体示例中，该距离小于约1μm。目标的具体实现是独立的。目标具有许多公开的形状，包括锥体，金字塔，半球和封盖结构。本公开还提供了这样的目标的阵列。还提供了使用光刻技术（诸如光刻技术）形成靶的方法，例如所公开的靶。在具体实例中，目标模具由硅晶片形成，然后模具的一个或多个侧面涂覆有目标材料，例如一种或多种金属。

2. 发明申请

WO2009105546A3 TARGET AND PROCESS FOR FABRICATING SAME 审中-公开
公开(公告)号：WO2009105546A3
公开(公告)日：2009-08-27
申请号：PCT/US2009/034527
申请日：2009-02-19
申请人： BOARD OF REGENTS OF THE NEVADA SYSTEM OF HIGHER EDUCATION, ON BEHALF OF THE UNIVERSITY OF NEVADA, RENO , MALEKOS, Steven , KORGAN, Grant , ADAMS, Jesse D.
发明人： MALEKOS, Steven , KORGAN, Grant , ADAMS, Jesse D.
IPC分类号： H01S3/067 , H01S3/00
摘要： In one embodiment, the present disclosure provides a target or mold having one or more support arms coupled to a substrate. The support arm can be used in handling or positioning a target. In another embodiment, the present disclosure provides target molds, targets produced using such molds, and a method for producing the targets and molds. In various implementations, the targets are formed in a number of disclosed shapes, including a funnel cone, a funnel cone having an extended neck, those having Gaussian-profile, a cup, a target having embedded metal slugs, metal dotted foils, wedges, metal stacks, a Winston collector having a hemispherical apex, and a Winston collector having an apex aperture. In yet another embodiment, the present disclosure provides a target mounting and alignment system.

3. 发明申请

WO2009105546A2 TARGET AND PROCESS FOR FABRICATING SAME 审中-公开
标题翻译：目标和制作方法
公开(公告)号：WO2009105546A2
公开(公告)日：2009-08-27
申请号：PCT/US2009034527
申请日：2009-02-19
申请人： UNIV NEVADA , MALEKOS STEVEN , KORGAN GRANT , ADAMS JESSE D
发明人： MALEKOS STEVEN , KORGAN GRANT , ADAMS JESSE D
IPC分类号： H01S3/067 , H01S3/00
CPC分类号： B25J11/00 , F16M13/022 , H01J40/16 , H05G2/00 , H05H1/46 , H05H6/00 , Y10T428/26 , Y10T428/265 , Y10T428/31678
摘要： In one embodiment, the present disclosure provides a target or mold having one or more support arms coupled to a substrate. The support arm can be used in handling or positioning a target. In another embodiment, the present disclosure provides target molds, targets produced using such molds, and a method for producing the targets and molds. In various implementations, the targets are formed in a number of disclosed shapes, including a funnel cone, a funnel cone having an extended neck, those having Gaussian-profile, a cup, a target having embedded metal slugs, metal dotted foils, wedges, metal stacks, a Winston collector having a hemispherical apex, and a Winston collector having an apex aperture. In yet another embodiment, the present disclosure provides a target mounting and alignment system.
摘要翻译：在一个实施例中，本公开提供了具有耦合到基板的一个或多个支撑臂的靶或模具。支撑臂可用于处理或定位目标。在另一个实施例中，本公开提供了目标模具，使用这种模具生产的靶材，以及用于制造靶材和模具的方法。在各种实施方案中，目标以许多公开的形状形成，包括漏斗锥体，具有延伸颈部的漏斗锥体，具有高斯分布的漏斗锥体，杯状物，具有嵌入金属块的靶，金属点状箔，楔形物，金属叠层，具有半球形顶点的Winston收集器和具有顶点孔径的Winston收集器。在另一个实施例中，本公开提供了目标安装和对准系统。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式