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    • 3. 发明申请
    • SELF-TESTING MICROMECHANICAL PRESSURE SENSOR
    • 微机械压力传感器的自测试
    • WO2008061832A2
    • 2008-05-29
    • PCT/EP2007060159
    • 2007-09-25
    • BOSCH GMBH ROBERTLEPIDIS POLICHRONISADAM BORIS
    • LEPIDIS POLICHRONISADAM BORIS
    • G01L27/00B81B7/00
    • G01L27/007
    • The invention allows an autonomous test of the membrane of a micromechanical membrane sensor. For such a self-test, the membrane comprises a heating element and means for detecting the deflection. For carrying out the test, the membrane is heated by the heating element to such an extent that it bends due to the thermal expansion of the membrane material. This bend produces a measurable value in the corresponding detection element depending on the deflection of the membrane. If a predetermined deflection of the membrane is obtained during the predetermined heating, it can be concluded that the membrane is operational. If, however, the predetermined deflection is not obtained, it can be concluded that the membrane is defective.
    • 本发明描述了在微机械膜传感器中独立测试膜的可能性。 对于这样的自检,膜必须具有加热装置和用于检测膜偏转的装置。 对于根据本发明的测试,膜通过加热装置加热,使得膜由于膜材料的热膨胀而弯曲。 该偏转作为膜的偏转的函数在相应的检测装置中产生可测量的量。 如果通过给定的加热实现膜的预定偏转,则可以断定膜是功能性的。 但是,另一方面,这种预定的偏转没有达到,可以认为膜缺陷。