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1. 发明申请

WO2006134513A2 METHOD OF PROTECTING A RADIATION SOURCE PRODUCING EUV-RADIATION AND/OR SOFT X-RAYS AGAINST SHORT CIRCUITS 审中-公开
标题翻译：保护辐射源和短路电路的辐射源和/或软X射线的保护方法
公开(公告)号：WO2006134513A2
公开(公告)日：2006-12-21
申请号：PCT/IB2006051796
申请日：2006-06-06
申请人： PHILIPS INTELLECTUAL PROPERTY , KONINKL PHILIPS ELECTRONICS NV , VAUDREVANGE DOMINIK MARCEL , JONKERS JEROEN
发明人： VAUDREVANGE DOMINIK MARCEL , JONKERS JEROEN
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method of protecting a radiation source producing extreme ultraviolet radiation (EUV) and/or soft X-rays against short circuits. The method applies to radiation sources producing said EUV-radiation and/or soft X- rays by means of an electrically operated discharge, which is ignited in a vapor between at least two electrodes (1, 2) in a discharge space, wherein said vapor is produced from a metal melt (6), which is applied to a surface in said discharge space and at least partially evaporated by an energy beam (9). Such a radiation source has one or several small gaps (17) between said electrodes (1, 2) and/or between components (4, 5) electrically connected to said electrodes (1, 2). These gaps (17) can cause short circuits when evaporated metal condenses there. In the present method during operation of the radiation source at least one surface bordering said gaps (17) and/or one or several protective elements (16, 18) covering said gaps (17) or arranged inside said gaps (17) are heated to a temperature at which the vapor pressure of said metal is high enough to evaporate metal material condensed on said surface or protective elements. With the present method the lifetime of the radiation source is extended.
摘要翻译：本发明涉及一种保护产生极紫外辐射（EUV）和/或软X射线的辐射源免于短路的方法。该方法适用于通过在放电空间中的至少两个电极（1,2）之间的蒸气中点燃的电操作放电产生所述EUV辐射和/或软X射线的辐射源，其中所述蒸气由金属熔体（6）制成，其被施加到所述放电空间中的表面并且被能量束（9）至少部分蒸发。这种辐射源在所述电极（1,2）之间和/或电连接到所述电极（1,2）的部件（4,5）之间具有一个或几个小间隙（17）。当蒸发的金属在那里冷凝时，这些间隙（17）可能导致短路。在本方法中，在辐射源的操作期间，覆盖所述间隙（17）和/或覆盖所述间隙（17）或布置在所述间隙（17）内的一个或多个保护元件（16,18）的至少一个表面被加热到所述金属的蒸汽压高到足以蒸发在所述表面上凝结的金属材料或保护元件的温度。利用本方法，辐射源的寿命延长。

2. 发明申请

WO2013020613A8 METHOD AND DEVICE FOR GENERATING OPTICAL RADIATION BY MEANS OF ELECCTRICALLY OPERATED PULSED DISCHARGES 审中-公开
标题翻译：通过电化学放电脉冲放电产生光学辐射的方法和装置
公开(公告)号：WO2013020613A8
公开(公告)日：2013-11-28
申请号：PCT/EP2012002483
申请日：2012-06-12
申请人： FRAUNHOFER GES FORSCHUNG , XTREME TECH GMBH , PRUEMMER RALF , CONRADS RALF , BERGMANN KLAUS , KUEPPER FELIX , JONKERS JEROEN
发明人： PRUEMMER RALF , CONRADS RALF , BERGMANN KLAUS , KUEPPER FELIX , JONKERS JEROEN
IPC分类号： H05G2/00
CPC分类号： H05G1/46 , H05G2/003 , H05G2/008
摘要： The present invention relates to a method and device for generating optical radiation (18), in particular EUV radiation or soft x-rays, by means of electrically operated discharges. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6), which is applied to one or several surface (s) moving i the discharge space and is at least partially evaporated by one or several pulsed energy beam(s) (9). At least two consecutive pulses (16) are applied withi a time interval of each electrical discharge onto said surface (s). The delay between and/or the pulse energy of said consecutive pulses is controlled to stabilize the position of an emission center of the plasma (15).
摘要翻译：本发明涉及借助电操作放电产生光辐射（18），特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气体介质中被点燃，其中所述气体介质至少部分地由液体材料（6）产生，所述液体材料施加到一个或多个表面在放电空间中移动并且通过一个或多个脉冲能量束（9）至少部分地蒸发。以每个放电的时间间隔将至少两个连续的脉冲（16）施加到所述表面上。控制所述连续脉冲之间的延迟和/或脉冲能量以稳定等离子体（15）的发射中心的位置。

3. 发明申请

WO2011051839A1 ELECTRODE SYSTEM, IN PARTICULAR FOR GAS DISCHARGE LIGHT SOURCES 审中-公开
标题翻译：电极系统，特别用于气体放电光源
公开(公告)号：WO2011051839A1
公开(公告)日：2011-05-05
申请号：PCT/IB2010/054379
申请日：2010-09-29
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , XTREME TECHNOLOGIES GMBH , METZMACHER, Christof , JONKERS, Jeroen , APETZ, Rolf, T., A.
发明人： METZMACHER, Christof , JONKERS, Jeroen , APETZ, Rolf, T., A.
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H01J1/02 , H05G2/005
摘要： The present invention relates to an electrode system, in particular of a gas discharge device for generating EUV radiation and/or soft X-rays. The electrode system comprises at least two electrodes (1, 2) formed of an electrode material which contains Mo or W or an alloy of Mo or W as a main component. The electrode material has a fine grained structure with fine grains having a mean size of
摘要翻译：本发明涉及一种电极系统，特别涉及用于产生EUV辐射和/或软X射线的气体放电装置。电极系统包括由含有Mo或W的电极材料形成的至少两个电极（1,2）或以Mo或W为主要成分的合金。电极材料具有细颗粒结构，其具有平均尺寸小于500nm的细晶粒。利用所提出的电极系统，实现了电极的高热机械和耐热化学性。因此，电极系统可以在使用液体Sn的已知的EUV光源中使用并且在高温下操作。

4. 发明申请

WO2004051698A3 GASENTLADUNGSLAMPE FÜR EUV-STRAHLUNG 审中-公开
公开(公告)号：WO2004051698A3
公开(公告)日：2004-06-17
申请号：PCT/IB2003/005496
申请日：2003-11-28
申请人： PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , KONINKLIJKE PHILIPS ELECTRONICS N.V. , DERRA, Guenther, Hans , PANKERT, Joseph, Robert, Rene , NEFF, Willi , BERGMANN, Klaus , JONKERS, Jeroen
发明人： DERRA, Guenther, Hans , PANKERT, Joseph, Robert, Rene , NEFF, Willi , BERGMANN, Klaus , JONKERS, Jeroen
IPC分类号： H01J61/09
摘要： Die Erfindung betrifft eine Gasentladungslampe für EUV-Strahlung, mit einer Anode (1) und einer Hohlkathode (2), bei der die Hohlkathode (2) mindestens zwei Öffnungen (3,3') und die Anode (1) eine durchgehende Öffnung (4) aufweist, und die dadurch gekennzeichnet ist, dass die Längsachsen (5,5') der Hohlkathodenöffnungen (3) einen gemeinsamen Schnittpunkt S haben der auf der Symmetrieachse (6) der Anodenöffnung (4) liegt.

5. 发明申请

WO2013020613A1 METHOD AND DEVICE FOR GENERATING OPTICAL RADIATION BY MEANS OF ELECCTRICALLY OPERATED PULSED DISCHARGES 审中-公开
标题翻译：方法和设备，用于通过经过精确的脉冲排放的方式产生光学辐射
公开(公告)号：WO2013020613A1
公开(公告)日：2013-02-14
申请号：PCT/EP2012/002483
申请日：2012-06-12
申请人： FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E . V. , XTREME TECHNOLOGIES GMBH , PRÜMMER, Ralf , CONRADS, Ralf , BERGMANN, Klaus , KÜPPER, Felix , JONKERS, Jeroen
发明人： XTREME TECHNOLOGIES GMBH , PRÜMMER, Ralf , CONRADS, Ralf , BERGMANN, Klaus , KÜPPER, Felix , JONKERS, Jeroen
IPC分类号： H05G2/00
CPC分类号： H05G1/46 , H05G2/003 , H05G2/008
摘要： The present invention relates to a method and device for generating optical radiation (18), in particular EUV radiation or soft x-rays, by means of electrically operated discharges. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6), which is applied to one or several surface (s) moving i the discharge space and is at least partially evaporated by one or several pulsed energy beam(s) (9). At least two consecutive pulses (16) are applied withi a time interval of each electrical discharge onto said surface (s). The delay between and/or the pulse energy of said consecutive pulses is controlled to stabilize the position of an emission center of the plasma (15).
摘要翻译：本发明涉及通过电动放电产生光辐射（18），特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气体介质中点燃，其中所述气体介质至少部分地由液体材料（6）产生，所述液体材料（6）施加到一个或多个表面，移动放电空间并且被一个或多个脉冲能量束（9）至少部分蒸发。至少两个连续脉冲（16）以每次放电的时间间隔施加到所述表面上。所述连续脉冲之间的延迟和/或脉冲能量被控制以稳定等离子体（15）的发射中心的位置。

6. 发明申请

WO2005025280A3 METHOD AND APPARATUS FOR PRODUCING EXTREME ULTRAVIOLETT RADIATION OR SOFT X-RAY RADIATION 审中-公开
标题翻译：用于生产超极紫外线辐射或软X射线辐射的方法和装置
公开(公告)号：WO2005025280A3
公开(公告)日：2005-06-16
申请号：PCT/IB2004051651
申请日：2004-09-01
申请人： KONINKL PHILIPS ELECTRONICS NV , FRAUNHOFER GES FORSCHUNG , JONKERS JEROEN , VAUDREVANGE DOMINIK MARCEL , NEFF WILLI
发明人： JONKERS JEROEN , VAUDREVANGE DOMINIK MARCEL , NEFF WILLI
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced.The gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).
摘要翻译：一种通过电操作的放电产生极紫外辐射（EUV）或软X射线辐射的方法，特别是用于EUV光刻或计量的方法，其中等离子体（22）在气体介质中点燃至少两个放电空间（12）中的电极（14,16），所述等离子体发射要产生的辐射。气体介质由金属熔体（24）产生，金属熔体（24）被施加到所述放电空间），并且至少部分地被能量束蒸发，特别是通过激光束（20）。

7. 发明申请

WO2005025280A2 METHOD AND APPARATUS FOR PRODUCING EXTREME ULTRAVIOLETT RADIATION OR SOFT X-RAY RADIATION 审中-公开
标题翻译：用于生产超极紫外线辐射或软X射线辐射的方法和装置
公开(公告)号：WO2005025280A2
公开(公告)日：2005-03-17
申请号：PCT/IB2004/051651
申请日：2004-09-01
申请人： KONINKLIJKE PHILIPS ELECTRONICS N. V. , FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , JONKERS, Jeroen , VAUDREVANGE, Dominik Marcel , NEFF, Willi
发明人： JONKERS, Jeroen , VAUDREVANGE, Dominik Marcel , NEFF, Willi
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced. In order to provide a method of the abovementioned type which is free of the disadvantages of the prior art and at the same time allows greater radiation power without high electrode wear, it is proposed that said gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).
摘要翻译：一种通过电操作的放电产生极紫外辐射（EUV）或软X射线辐射的方法，特别是用于EUV光刻或计量的方法，其中等离子体（22）在气体介质中点燃至少两个放电空间（12）中的电极（14,16），所述等离子体发射要产生的辐射。为了提供一种没有现有技术的缺点的上述类型的方法，并且同时允许更大的辐射功率而没有高的电极磨损，所以建议所述气态介质由金属熔体（24）制成，，其施加到所述放电空间（12）中的表面，并且至少部分地被能量束（特别是激光束）蒸发。

8. 发明申请

WO2004082340A1 METHOD AND DEVICE FOR THE GENERATION OF A PLASMA THROUGH ELECTRIC DISCHARGE IN A DISCHARGE SPACE 审中-公开
标题翻译：通过放电空间中的放电等离子体生成的方法和装置
公开(公告)号：WO2004082340A1
公开(公告)日：2004-09-23
申请号：PCT/IB2004/000611
申请日：2004-03-05
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , BOSCH, Eric, Gerardus, Theodoor , JONKERS, Jeroen , NEFF, Willi , DERRA, Günther, Hans
发明人： BOSCH, Eric, Gerardus, Theodoor , JONKERS, Jeroen , NEFF, Willi , DERRA, Günther, Hans
IPC分类号： H05H1/24
CPC分类号： H05G2/003 , H05G2/005 , H05H1/48
摘要： The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosion-susceptible region with an evaporation spot is formed at least by the current flow. To present a method or a device for the generation of a plasma by electric discharge, it is suggested that a sacrificial substrate (38) is provided at least at the evaporation spot, the boiling point of said sacrificial substrate (38) during discharge operation lying below the melting point of the carrier material (30), such that charge carriers arising in the current flow are mainly generated from the sacrificial substrate (38).
摘要翻译：本发明涉及一种用于在放电空间中通过放电产生等离子体的方法和装置，其包含至少两个电极，其中至少一个电极由基质材料或载体材料构成，使得易受侵蚀至少由电流形成具有蒸发点的区域。为了呈现通过放电产生等离子体的方法或装置，建议至少在蒸发点处提供牺牲衬底（38），在放电操作期间所述牺牲衬底（38）的沸点位于低于载体材料（30）的熔点，使得在电流中产生的电荷载体主要从牺牲衬底（38）产生。

9. 发明申请

WO2004051698A8 GAS DISCHARGE LAMP FOR EUV RADIATION 审中-公开
标题翻译：气体放电灯的极紫外辐射
公开(公告)号：WO2004051698A8
公开(公告)日：2010-11-11
申请号：PCT/IB0305496
申请日：2003-11-28
申请人： KONINKL PHILIPS ELECTRONICS NV , DERRA GUENTHER HANS , PANKERT JOSEPH ROBERT RENE , NEFF WILLI , BERGMANN KLAUS , JONKERS JEROEN
发明人： DERRA GUENTHER HANS , PANKERT JOSEPH ROBERT RENE , NEFF WILLI , BERGMANN KLAUS , JONKERS JEROEN
IPC分类号： H01J61/09 , H05G2/00
CPC分类号： H05G2/003 , H01J61/09
摘要： The invention relates to a gas discharge lamp for EUV radiation, comprising an anode (1) and a hollow cathode (2). Said hollow cathode (2) is provided with at least two openings (3, 3') while the anode (1) is provided with a passage (4). The inventive gas discharge lamp is characterized by the fact that the longitudinal axes (5, 5') of the hollow cathode openings (3) have a common point of intersection S which is located on the axis of symmetry (6) of the anode passage (4).
摘要翻译：本发明涉及一种用于EUV辐射的气体放电灯，其具有阳极（1）和空心阴极（2），其中，所述空心阴极（2）的至少两个开口（3,3“）和所述阳极（1）具有通孔（4 ），并且其特征在于，所述空心阴极的开口（3）的纵向轴线（5,5“）具有的交叉点S（对对称6的轴线的阳极开口（4）的公共点）。

10. 发明申请

WO2010070540A1 METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS WITH ENHANCED EFFICIENCY 审中-公开
标题翻译：用于产生具有增强效率的EUV辐射或软X射线的方法和装置
公开(公告)号：WO2010070540A1
公开(公告)日：2010-06-24
申请号：PCT/IB2009/055598
申请日：2009-12-09
申请人： PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , KONINKLIJKE PHILIPS ELECTRONICS N. V. , FRAUNHOFER GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. , JONKERS, Jeroen , KUEPPER, Felix, A. , VERBRAAK, Harald, E. , NEFF, Jakob, W.
发明人： JONKERS, Jeroen , KUEPPER, Felix, A. , VERBRAAK, Harald, E. , NEFF, Jakob, W.
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to one or several surface(s) moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device at least two consecutive pulses (9, 18) are applied within a time interval of each electrical discharge onto said surface(s). With this measure, the collectible conversion efficiency is increased compared to the use of only one single energy pulse within each electrical discharge.
摘要翻译：本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气态介质中点燃，其中所述气体介质至少部分地由施加到移动的一个或多个表面的液体材料（6）产生在放电空间中并且被一个或多个脉冲能量束至少部分蒸发。在所提出的方法和装置中，在每个放电到所述表面的时间间隔内施加至少两个连续脉冲（9,18）。通过这种措施，与在每次放电期间仅使用一个单个能量脉冲相比，可收集的转换效率增加。

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