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1. 发明申请

WO2002071631A2 APPARATUS AND METHOD OF IMPROVING IMPEDANCE MATCHING BETWEEN AN RF SIGNAL AND A MULTI-SEGMENTED ELECTRODE 审中-公开
标题翻译：改善RF信号与多分辨电极之间的阻抗匹配的装置和方法
公开(公告)号：WO2002071631A2
公开(公告)日：2002-09-12
申请号：PCT/US2002/005588
申请日：2002-02-27
申请人： TOKYO ELECTRON LIMITED , JETVIC, Jovan , MITROVIC, Andrej
发明人： JETVIC, Jovan , MITROVIC, Andrej
IPC分类号： H04B
CPC分类号： H01J37/32082 , H01J37/32183
摘要： An apparatus and method of improving impedance matching between a RF signal and a multi-segmented electrode in a plasma reactor powered by the RF signal. The apparatus and method phase shifts the RF signal driving one or more electrode segment of the multi-segmented electrode, amplifies the RF signal, and matches an impedance of the RF signal with an impedance of the electrode segment, where the RF signal is modulated prior to matching of the impedance of the RF signal. The apparatus and method directionally couples an output of the matching of the impedance of the RF signal and the electrode segment, and adjusts the output of the matching of the impedance of the RF signal such that a directionally coupled output signal and a reference signal representing the RF signal at the output of the master RF oscillator produces a demodulated signal of minimal amplitude.
摘要翻译：一种改善由RF信号供电的等离子体反应器中的RF信号和多段电极之间的阻抗匹配的装置和方法。该装置和方法相位移动驱动多分段电极的一个或多个电极段的RF信号，放大RF信号，并将RF信号的阻抗与电极段的阻抗匹配，其中RF信号先前被调制以匹配RF信号的阻抗。该装置和方法定向耦合RF信号和电极段的阻抗匹配的输出，并且调整RF信号的阻抗匹配的输出，使得定向耦合的输出信号和表示在主RF振荡器的输出处的RF信号产生最小振幅的解调信号。

2. 发明申请

WO2002071631A3 APPARATUS AND METHOD OF IMPROVING IMPEDANCE MATCHING BETWEEN AN RF SIGNAL AND A MULTI-SEGMENTED ELECTRODE 审中-公开
公开(公告)号：WO2002071631A3
公开(公告)日：2002-09-12
申请号：PCT/US2002/005588
申请日：2002-02-27
申请人： TOKYO ELECTRON LIMITED , JETVIC, Jovan , MITROVIC, Andrej
发明人： JETVIC, Jovan , MITROVIC, Andrej
IPC分类号： H01L21/66
摘要： An apparatus and method of improving impedance matching between a RIF signal and a multi-segmented electrode in a plasma reactor powered by the RF signal. The apparatus and method phase shifts the RIF signal driving one or more electrode segment of the multi-segmented electrode, amplifies the RIF signal, and matches an impedance of the RIF signal with an impedance of the electrode segment, where the RIF signal is modulated prior to matching of the impedance of the RIF signal. The apparatus (fig. 3) and method directionally couples an output of the matching of the impedance of the RIF signal and the electrode segment, and adjusts the output of the matching of the impedance of the RF signal such that a directionally coupled output signal and a reference signal representing the RIF signal at the output of the master RF oscillator produces a demodulated signal of minimal amplitude.

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