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3. 发明申请

WO2012076335A1 METHOD FOR MEASURING AN OPTICAL SYSTEM 审中-公开
标题翻译：测量光学系统的方法
公开(公告)号：WO2012076335A1
公开(公告)日：2012-06-14
申请号：PCT/EP2011/070755
申请日：2011-11-23
申请人： CARL ZEISS SMT GMBH , KORB, Thomas , HETTICH, Christian , LAYH, Michael , WEGMANN, Ulrich , SCHUSTER, Karl-Heinz , MANGER, Matthias
发明人： KORB, Thomas , HETTICH, Christian , LAYH, Michael , WEGMANN, Ulrich , SCHUSTER, Karl-Heinz , MANGER, Matthias
IPC分类号： G03F7/20
CPC分类号： G01N21/94 , G01M11/02 , G01N21/9501 , G03F7/70483 , G03F7/708 , G03F7/7085
摘要： The invention relates to a method for measuring an optical system at the location of a measurement plane (409). The method comprises the following steps: - a first plurality of test beams (464a, 464b, 464c, 464d) of a radiation pass through the optical system and impinge on an identical first measurement region (461) in a measurement plane (409), wherein the test beams of the first plurality of test beams (464a, 464b, 464c, 464d) pass through the optical system on optical paths that differ in pairs and impinge on the first measurement region (461) at angles of incidence that differ in pairs with respect to the measurement plane (409), - a second plurality of test beams (465a, 465b, 465c, 465d) of a radiation pass through the optical system and impinge on an identical second measurement region (462) in the measurement plane (409), wherein the test beams of the second plurality of test beams (465a, 465b, 465c, 465d) pass through the optical system on optical paths that differ in pairs and impinge on the second measurement region (462) at angles of incidence that differ in pairs with respect to the measurement plane (409), wherein the second measurement region (462) differs from the first measurement region (461), - by means of a measuring device (469, 470), at least one associated measurement value of a first measurement variable of the test beam at the location of the first measurement region is detected for each test beam of the first plurality of test beams, - by means of a measuring device, at least one associated measurement value of a second measurement variable of the test beam at the location of the second measurement region is detected for each test beam of the second plurality of test beams, - an associated impingement region (467a, 467d, 468a, 468d) on at least one reference surface (466, 471) of the optical system is calculated or is determined with the aid of a database for each test beam of the first plurality of test beams (464a, 464b, 464c, 464d) and of the second plurality of test beams (465a, 465b, 465c, 465d), wherein the impingement region associated with a test beam is defined as the surface region of the at least one reference surface (466, 471) on which radiation of the respective test beam impinges, - a spatial diagnosis distribution of at least one property of the at least one reference surface is calculated from the measurement values and the impingement regions for each test beam.
摘要翻译：本发明涉及一种在测量平面位置测量光学系统的方法（409）。该方法包括以下步骤： - 辐射的第一多个测试光束（464a，464b，464c，464d）通过光学系统并撞击在测量平面（409）中的相同的第一测量区域（461）上，其中所述第一多个测试光束（464a，464b，464c，464d）的所述测试光束在成对不同的光路上穿过所述光学系统，并且以成对的不同的入射角入射在所述第一测量区域（461）上相对于测量平面（409）， - 辐射的第二多个测试光束（465a，465b，465c，465d）穿过光学系统并撞击测量平面中相同的第二测量区域（462） 409），其中所述第二多个测试光束（465a，465b，465c，465d）的测试光束在成对的光路上穿过所述光学系统，并以入射角撞击在所述第二测量区域（462）上，不同的成对相对于测量平面（409），其中所述第二测量区域（462）与所述第一测量区域（461）不同， - 借助于测量装置（469,470），至少一个相关测量值对于第一多个测试光束的每个测试光束检测在第一测量区域的位置处的测试光束，借助于测量装置，在该位置处测试光束的第二测量变量的至少一个相关测量值对于第二多个测试光束的每个测试光束检测第二测量区域， - 计算光学系统的至少一个参考表面（466,471）上的相关联的冲击区域（467a，467d，468a，468d）或者借助于第一多个测试光束（464a，464b，464c，464d）和第二多个测试光束（465a，465b，465c，465d）中的每个测试光束的数据库来确定，其中冲击与a相关联的区域测试光束被定义为至少一个参考表面（466,471）的表面区域，各个测试光束的辐射在其上撞击， - 至少一个参考表面的至少一个性质的空间诊断分布由每个测试光束的测量值和冲击区域。

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