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1. 发明申请

WO2008021540A3 CUSTOMIZED LITHOGRAPHIC PARTICLES 审中-公开
标题翻译：定制的光刻颗粒
公开(公告)号：WO2008021540A3
公开(公告)日：2008-07-10
申请号：PCT/US2007018365
申请日：2007-08-17
申请人： UNIV CALIFORNIA , MASON THOMAS G , HERNANDEZ CARLOS J
发明人： MASON THOMAS G , HERNANDEZ CARLOS J
IPC分类号： B05D3/06 , B82B1/00 , B82B3/00
CPC分类号： G03F7/40 , B81C99/008 , B81C2201/038
摘要： A method of producing particles includes providing a substrate structure that comprises a solid substrate; forming a target structure on said substrate structure, said target structure comprising a radiation-reactive material; forming a spatially patterned beam of radiation using a patterned mask; exposing at least a portion of the target structure to the spatially patterned beam of radiation to which the radiation-reactive material reacts while leaving other portions of the target structure unexposed to the radiation; removing substantially all of one of the exposed or the unexposed patterned portions of the target structure to provide a plurality of non-contiguous structures that include at least a portion of the radiation-reactive material; and separating the plurality of non-contiguous structures comprising the radiation-reactive material from the substrate structure into a fluid material. Each non-contiguous structure of the radiation-reactive material provides at least a portion of a separate particle after the separation.
摘要翻译：制造颗粒的方法包括提供包括固体基质的基底结构; 在所述衬底结构上形成目标结构，所述靶结构包括辐射反应性材料; 使用图案化掩模形成空间上图案化的辐射束; 将目标结构的至少一部分暴露于辐射反应性材料反应的空间图案化的辐射束，同时使目标结构的其它部分未暴露于辐射; 去除目标结构的暴露的或未曝光的图案化部分中的一个基本上全部，以提供包括至少一部分辐射反应性材料的多个非连续结构; 以及将包括所述辐射反应性材料的所述多个非连续结构与所述基底结构分离成流体材料。辐射反应性材料的每个非连续结构在分离之后提供至少一部分单独的颗粒。

2. 发明申请

WO2008021540A2 CUSTOMIZED LITHOGRAPHIC PARTICLES 审中-公开
标题翻译：定制光刻胶颗粒
公开(公告)号：WO2008021540A2
公开(公告)日：2008-02-21
申请号：PCT/US2007/018365
申请日：2007-08-17
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA , MASON, Thomas, G. , HERNANDEZ, Carlos, J.
发明人： MASON, Thomas, G. , HERNANDEZ, Carlos, J.
IPC分类号： G01N23/00
CPC分类号： G03F7/40 , B81C99/008 , B81C2201/038
摘要： A method of producing particles includes providing a substrate structure that comprises a solid substrate; forming a target structure on said substrate structure, said target structure comprising a radiation-reactive material; forming a spatially patterned beam of radiation using a patterned mask; exposing at least a portion of the target structure to the spatially patterned beam of radiation to which the radiation-reactive material reacts while leaving other portions of the target structure unexposed to the radiation; removing substantially all of one of the exposed or the unexposed patterned portions of the target structure to provide a plurality of non-contiguous structures that include at least a portion of the radiation-reactive material; and separating the plurality of non-contiguous structures comprising the radiation-reactive material from the substrate structure into a fluid material. Each non-contiguous structure of the radiation-reactive material provides at least a portion of a separate particle after the separation.
摘要翻译：制造颗粒的方法包括提供包含固体基材的基材结构; 在所述衬底结构上形成目标结构，所述目标结构包括辐射反应材料; 使用图案化掩模形成空间图案化的辐射束; 将至少一部分目标结构暴露于辐射反应性材料反应的空间图案化辐射束，同时使目标结构的其他部分未暴露于辐射; 基本上除去所述目标结构的所述暴露或未暴露的图案化部分中的一者以提供包含所述辐射反应材料的至少一部分的多个不连续结构; 以及将包含辐射反应性材料的多个非连续结构从基板结构分离成流体材料。辐射反应性材料的每个非连续结构在分离后提供分离颗粒的至少一部分。

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