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    • 4. 发明申请
    • LIQUID JET HEAD AND PRODUCTION THEREOF
    • 液体喷嘴及其生产
    • WO1993022140A1
    • 1993-11-11
    • PCT/JP1993000524
    • 1993-04-23
    • SEIKO EPSON CORPORATIONHASEGAWA, KazumasaSHIMADA, MasatoSAWADA, Masayuki
    • SEIKO EPSON CORPORATION
    • B41J02/045
    • B41J2/1629B41J2/14233B41J2/161B41J2/1631B41J2/1642B41J2/1645B41J2/1646B41J2002/14379Y10S29/016Y10T29/42Y10T29/49401
    • A head for jetting a liquid using a piezoelectric device, more particularly a liquid jet head and a method of production thereof which reduces the size, attains a higher density and improves liquid jet characteristics using a PZT thin film piezoelectric device, and has high producibility. A thin piezoelectric device comprising a thin diaphragm (103), a lower electrode (104), a piezoelectric film (105) and an upper electrode (106) is formed on a liquid chamber (102) and a plurality of the devices are disposed on the same substrate. The pitch of disposition of the liquid chambers (102) is the same as that of the nozzles (109), and the dimension of the liquid chambers, the thickness of the piezoelectric films (105) and the thickness of the diaphragm (103) are so constituted as to satisfy a specific relation. A first substrate (101) on which the piezoelectric devices, the liquid chambers (102), etc, are formed and a second substrate (107) on which liquid flow paths (108) are formed are bonded and integrated with each other so as to constitute the liquid jet head. The production method comprises: 1) forming the diaphragms on the substrate and forming the piezoelectric devices on the diaphragms using a thin film forming technique, and then 2) disposing means for protecting the surface of the substrate on the side of the piezoelectric device by a jig, etc, and forming the liquid chambers by etching from the opposite surface. The liquid jet head of this invention is preferably used for a liquid jet recording apparatus for recording characters, image data, etc, on a medium such as paper using an ink.
    • 使用PZT薄膜压电元件,使用压电装置喷射液体的头部,特别是液体喷射头及其制造方法,其使尺寸减小,获得更高的密度,并提高液体喷射特性,并且具有高的可生产性。 在液体室(102)上形成有薄膜(103),下电极(104),压电膜(105)和上电极(106)的薄压电器件,多个器件设置在 相同的底物。 液体室(102)的配置间距与喷嘴(109)的间距相同,液体室的尺寸,压电膜(105)的厚度和隔膜(103)的厚度为 构成为满足具体的关系。 其上形成有压电装置,液体室(102)等的第一基板(101)和形成有液体流路(108)的第二基板(107)彼此结合并一体化,以便 构成液体喷头。 该制造方法包括:1)在基板上形成隔膜,并使用薄膜形成技术在隔膜上形成压电元件,然后2)设置在压电元件侧保护基板表面的装置 夹具等,并通过相对表面的蚀刻形成液体室。 本发明的液体喷射头优选用于在诸如使用油墨的纸张等介质上记录字符,图像数据等的液体喷射记录装置。