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1. 发明申请

WO2013003235A3 LAMP FAILURE DETECTOR 审中-公开
公开(公告)号：WO2013003235A3
公开(公告)日：2013-01-03
申请号：PCT/US2012/043828
申请日：2012-06-22
申请人： APPLIED MATERIALS, INC. , SEREBRYANOV, Oleg , GOLDIN, Alexander
发明人： SEREBRYANOV, Oleg , GOLDIN, Alexander
IPC分类号： H01L21/66 , H01L21/324
摘要： Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.

2. 发明申请

WO2012091910A3 PROTECTION DEVICE FOR SOLID STATE LASER 审中-公开
公开(公告)号：WO2012091910A3
公开(公告)日：2012-07-05
申请号：PCT/US2011/064462
申请日：2011-12-12
申请人： APPLIED MATERIALS, INC. , SEREBRYANOV, Oleg V. , GOLDIN, Alexander , MAYUR, Abhilash J. , TERTITSKI, Leonid M.
发明人： SEREBRYANOV, Oleg V. , GOLDIN, Alexander , MAYUR, Abhilash J. , TERTITSKI, Leonid M.
IPC分类号： H01S3/10 , H01S3/13 , H01S5/06
摘要： Embodiments of the invention provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser a ramp generator to ramp down power to the laser, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the power to the laser upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down power to the laser upon detection of missing pulses or signal failure.

3. 发明申请

WO2011103391A2 HIGH EFFICIENCY HIGH ACCURACY HEATER DRIVER 审中-公开
标题翻译：高效高精度加热器驱动器
公开(公告)号：WO2011103391A2
公开(公告)日：2011-08-25
申请号：PCT/US2011/025391
申请日：2011-02-18
申请人： APPLIED MATERIALS, INC. , GOLDIN, Alexander , SEREBRYANOV, Oleg V.
发明人： GOLDIN, Alexander , SEREBRYANOV, Oleg V.
IPC分类号： H01L21/324
CPC分类号： F24C15/00 , H01L21/324 , H01L21/67115 , H01L21/67248 , H05B1/0233 , H05B3/0047
摘要： A rapid thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The rapid thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.
摘要翻译：描述了具有包括两个晶体管和两个二极管的灯驱动电路的快速热处理室。快速热处理室包括多个卤素灯，灯驱动器，测量晶片温度的温度传感器，连接到温度传感器和灯驱动器的温度控制器，温度控制器向灯驱动器提供控制信号，晶片温度和所需温度的功能。灯驱动器包括由控制信号控制的两个晶体管，使得提供给多个卤素灯的功率的功率因数在0.9至1的范围内。

4. 发明申请

WO2012091910A2 PROTECTION DEVICE FOR SOLID STATE LASER 审中-公开
标题翻译：固态激光器的保护装置
公开(公告)号：WO2012091910A2
公开(公告)日：2012-07-05
申请号：PCT/US2011064462
申请日：2011-12-12
申请人： APPLIED MATERIALS INC , SEREBRYANOV OLEG V , GOLDIN ALEXANDER , MAYUR ABHILASH J , TERTITSKI LEONID M
发明人： SEREBRYANOV OLEG V , GOLDIN ALEXANDER , MAYUR ABHILASH J , TERTITSKI LEONID M
IPC分类号： H01S3/10 , H01S3/13 , H01S5/06
CPC分类号： H01S3/0014 , B23K26/0081 , B23K26/0626 , H01S3/10038
摘要： Embodiments of the invention provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser a ramp generator to ramp down power to the laser, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the power to the laser upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down power to the laser upon detection of missing pulses or signal failure.
摘要翻译：本发明的实施例提供了用于控制激光器的系统，装置和方法。该系统包括控制器，用于控制激光器斜坡发生器以降低对激光器的功率，斜坡发生器与控制器电耦合并与激光器耦合，以及与斜坡发生器电耦合的硬件保护系统，其中斜坡发生器监控从控制器和硬件保护系统发送到斜坡发生器的信号，以在信号故障检测时检测信号故障并降低激光器的功率。该方法包括将控制状态信号从用于激光的控制器发送到斜坡发生器，监视用于丢失脉冲的控制状态信号，从硬件保护系统向斜坡发生器发送硬件互锁状态信号，监视硬件互锁状态信号用于信号故障，并且在检测到丢失的脉冲或信号故障时向激光器提供功率。

5. 发明申请

WO2011103391A3 HIGH EFFICIENCY HIGH ACCURACY HEATER DRIVER 审中-公开
标题翻译：高效高精度加热器驱动器
公开(公告)号：WO2011103391A3
公开(公告)日：2012-02-09
申请号：PCT/US2011025391
申请日：2011-02-18
申请人： APPLIED MATERIALS INC , GOLDIN ALEXANDER , SEREBRYANOV OLEG V
发明人： GOLDIN ALEXANDER , SEREBRYANOV OLEG V
IPC分类号： H01L21/324
CPC分类号： F24C15/00 , H01L21/324 , H01L21/67115 , H01L21/67248 , H05B1/0233 , H05B3/0047
摘要： A rapid thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The rapid thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.
摘要翻译：描述了具有包括两个晶体管和两个二极管的灯驱动电路的快速热处理室。快速热处理室包括多个卤素灯，灯驱动器，测量晶片温度的温度传感器，连接到温度传感器和灯驱动器的温度控制器，温度控制器向灯驱动器提供控制信号，晶片温度和所需温度的功能。灯驱动器包括由控制信号控制的两个晶体管，使得提供给多个卤素灯的功率的功率因数在0.9至1的范围内。

6. 发明申请

WO2013003235A2 LAMP FAILURE DETECTOR 审中-公开
标题翻译：灯泡故障检测器
公开(公告)号：WO2013003235A2
公开(公告)日：2013-01-03
申请号：PCT/US2012043828
申请日：2012-06-22
申请人： APPLIED MATERIALS INC , SEREBRYANOV OLEG , GOLDIN ALEXANDER
发明人： SEREBRYANOV OLEG , GOLDIN ALEXANDER
CPC分类号： H05B37/036 , H05B37/038
摘要： Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.
摘要翻译：提供了一种用于在快速热处理（RTP）工具中检测灯泡故障的装置和方法。提供可以适应直流和/或交流电压的灯故障检测系统。所述系统沿着由至少两个串联连接的灯形成的电路路径采样电压信号，基于所采样的电压信号计算出至少两个串联灯的第一灯两端的电压降，并确定是否已经发生灯故障关于第一灯上的电压降与施加到电路路径的总电压之间的关系。

7. 发明申请

WO2010025236A1 COMPOSITION AND METHOD FOR TREATING COLDS 审中-公开
标题翻译：用于处理色彩的组合物和方法
公开(公告)号：WO2010025236A1
公开(公告)日：2010-03-04
申请号：PCT/US2009/055170
申请日：2009-08-27
申请人： GOLDIN, Alexander
发明人： GOLDIN, Alexander
IPC分类号： A01N45/00 , A61K31/56
CPC分类号： A61K31/335 , A61K9/0043 , A61K31/00 , A61K31/55 , A61K31/56 , A61K31/573 , A61K45/06 , A61K2300/00
摘要： Viral upper respiratory tract infections, upper respiratory infections, and common colds can be effectively treated by the administration of a combination of a nasal steroid and a nasal antihistamine. By the administration of the combination of a nasal steroid and a nasal antihistamine with the onset of cold symptoms, the histamine cascade and the inflammatory response are impeded or eliminated, reducing the severity, duration, or frequency of the onset of cold symptoms. The combination of a nasal steroid and a nasal antihistamine may be, for example, a physical mixture of the steroid and antihistamine, or it may effectively be a combination wherein the patient is administered one component (either the steroid or the antihistamine) followed by the other, without physical mixing beforehand.
摘要翻译：病毒性上呼吸道感染，上呼吸道感染和常见感冒可以通过给予鼻类固醇和鼻用抗组胺药的组合来有效治疗。通过施用鼻型类固醇和鼻用抗组胺剂与冷症状的组合，阻止或消除组胺级联和炎症反应，降低冷症状发作的严重性，持续时间或频率。鼻类固醇和鼻抗组胺剂的组合可以是例如类固醇和抗组胺药的物理混合物，或者其可以有效地是其中给予患者一种组分（无论是类固醇或抗组胺药）其他，没有物理混合事先。

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