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    • 1. 发明申请
    • PLANAR MOTOR WITH WEDGE SHAPED MAGNETS AND DIAGONAL MAGNETIZATION DIRECTIONS
    • 带楔形磁铁和对角线磁化方向的平面电机
    • WO2010041771A3
    • 2010-08-12
    • PCT/JP2009067952
    • 2009-10-09
    • NIPPON KOGAKU KKBINNARD MICHAEL BGERY JEAN-MARC
    • BINNARD MICHAEL BGERY JEAN-MARC
    • H02K41/03H02K1/17
    • H02K1/17H02K1/278H02K41/031H02K2201/18
    • A planar motor (32) for positioning a stage (44) along a first axis, and along a second axis that is perpendicular to the first axis includes a conductor array (52) and a magnet array (34). The conductor array (52) includes at least one conductor (256). The magnet array (34) is positioned near the conductor array (52) and is spaced apart from the conductor array (52) along a third axis that is perpendicular to the first axis and the second axis. The magnet array (34) includes a first magnet unit (264) having a first diagonal magnet (Dl) with a diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. This leads to strong magnetic fields above the magnet array (34) and strong force generation capability. Further, the planar motor (32) provided herein has less stray magnetic fields that extend beyond the magnet array (34) than a comparable prior art planar motor. Moreover, the first magnet unit (264) can include a second diagonal magnet (D2), a third diagonal magnet (D3), and a fourth diagonal magnet (D4) that cooperate to provide a first combined magnetic flux (276) that is somewhat aligned along the third axis in a first flux direction. In this embodiment, each diagonal magnet (Dl) (D2) (D3) (D4) has the diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. Moreover, each diagonal magnet (Dl) (D2) (D3) (D4) can be generally triangular wedge shaped and the diagonal magnets (Dl) (D2) (D3) (D4) are arranged together into the shape of a parallelepiped.
    • 用于沿着第一轴线并且沿着垂直于第一轴线的第二轴线定位工作台(44)的平面马达(32)包括导体阵列(52)和磁体阵列(34)。 导体阵列(52)包括至少一个导体(256)。 磁体阵列(34)位于导体阵列(52)附近并且沿着垂直于第一轴线和第二轴线的第三轴线与导体阵列(52)间隔开。 磁体阵列(34)包括具有第一对角磁体(D1)的第一磁体单元(264),第一对角磁体具有与第一轴线,第二轴线和第三轴线对角的对角磁化方向(268)。 这导致磁体阵列(34)上方的强磁场和强大的力生成能力。 此外,本文提供的平面电机(32)具有比可比较的现有技术平面电机更少的超出磁体阵列(34)的杂散磁场。 此外,第一磁体单元(264)可以包括第二对角线磁体(D2),第三对角线磁体(D3)和第四对角线磁体(D4),它们协作以提供一定的第一组合磁通量(276) 沿着第三轴线在第一通量方向上对齐。 在该实施例中,每个对角线磁体(D1)(D2)(D3)(D4)具有与第一轴线,第二轴线和第三轴线对角的对角线磁化方向(268)。 此外,每个对角线磁体(D1)(D2)(D3)(D4)可以是大致三角形楔形形状,并且对角线磁体(D1)(D2)(D3)(D4)一起布置为平行六面体形状。
    • 2. 发明申请
    • SYSTEM AND METHOD FOR MEASURING AND MAPPING A SIDEFORCE FOR A MOVER
    • 用于测量和映射行动的系统和方法
    • WO2008144219A1
    • 2008-11-27
    • PCT/US2008/062779
    • 2008-05-06
    • NIKON CORPORATIONGERY, Jean-MarcBINNARD, Mike
    • GERY, Jean-MarcBINNARD, Mike
    • A47B9/02
    • G03B27/58
    • A mover (344) that moves a stage (238) along a first axis includes a magnetic component (354), a conductor component (356), and a sensor (366). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) to generate a force when current is directed to the conductor component (356). The sensor (366) can be used for determining a first axis component of a magnetic flux of the magnetic component (354) during operation of the mover (344). Further, the sensor (366) can be used to determine a side force (365) that along a second axis that is orthogonal to the first axis that is being generated by the mover (344). With this design, the mover (344) or other components can be controlled to compensate for the side force (370).
    • 沿着第一轴线移动台架(238)的移动器(344)包括磁性部件(354),导体部件(356)和传感器(366)。 磁性部件(354)包括由磁场包围的一个或多个磁体(354D)。 导体部件(356)位于磁性部件(354)附近。 此外,当电流被引导到导体部件(356)时,导体部件(356)与磁性部件(354)相互作用以产生一个力。 传感器(366)可以用于在移动器(344)的操作期间确定磁性部件(354)的磁通量的第一轴分量。 此外,传感器(366)可以用于确定沿着与由移动器(344)生成的第一轴正交的第二轴线的侧向力(365)。 通过这种设计,可以控制动子(344)或其他部件以补偿侧力(370)。
    • 3. 发明申请
    • PLANAR MOTOR WITH WEDGE SHAPED MAGNETS AND DIAGONAL MAGNETIZATION DIRECTIONS
    • 具有楔形磁铁的平面电机和对角磁化方向
    • WO2010041771A2
    • 2010-04-15
    • PCT/JP2009/067952
    • 2009-10-09
    • NIKON CORPORATIONBINNARD, Michael, B.GERY, Jean-Marc
    • BINNARD, Michael, B.GERY, Jean-Marc
    • H02K41/03H02K1/17
    • H02K1/17H02K1/278H02K41/031H02K2201/18
    • A planar motor (32) for positioning a stage (44) along a first axis, and along a second axis that is perpendicular to the first axis includes a conductor array (52) and a magnet array (34). The conductor array (52) includes at least one conductor (256). The magnet array (34) is positioned near the conductor array (52) and is spaced apart from the conductor array (52) along a third axis that is perpendicular to the first axis and the second axis. The magnet array (34) includes a first magnet unit (264) having a first diagonal magnet (Dl) with a diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. This leads to strong magnetic fields above the magnet array (34) and strong force generation capability. Further, the planar motor (32) provided herein has less stray magnetic fields that extend beyond the magnet array (34) than a comparable prior art planar motor. Moreover, the first magnet unit (264) can include a second diagonal magnet (D2), a third diagonal magnet (D3), and a fourth diagonal magnet (D4) that cooperate to provide a first combined magnetic flux (276) that is somewhat aligned along the third axis in a first flux direction. In this embodiment, each diagonal magnet (Dl) (D2) (D3) (D4) has the diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. Moreover, each diagonal magnet (Dl) (D2) (D3) (D4) can be generally triangular wedge shaped and the diagonal magnets (Dl) (D2) (D3) (D4) are arranged together into the shape of a parallelepiped.
    • 用于沿着第一轴定位台(44)并且沿着垂直于第一轴的第二轴定位的平面马达(32)包括导体阵列(52)和磁体阵列(34)。 导体阵列(52)包括至少一个导体(256)。 磁体阵列(34)位于导体阵列(52)附近,并且沿着垂直于第一轴线和第二轴线的第三轴线与导体阵列(52)间隔开。 磁体阵列(34)包括第一磁体单元(264),第一磁体单元(264)具有与第一轴线,第二轴线和第三轴线对角的具有对角线磁化方向(268)的第一对角磁体(D1)。 这导致磁体阵列(34)上方的强磁场和强力产生能力。 此外,本文提供的平面电动机(32)具有比可比现有技术的平面电动机更少的超过磁体阵列(34)的杂散磁场。 此外,第一磁体单元(264)可以包括第二对角磁体(D2),第三对角线磁体(D3)和第四对角线磁体(D4),其协作以提供稍微有点的第一组合磁通(276) 沿着第三轴在第一磁通方向对准。 在该实施例中,每个对角线磁体(D1)(D2)(D3)(D4)具有与第一轴线,第二轴线和第三轴线对角的对角线磁化方向(268)。 此外,每个对角磁体(D1)(D2)(D3)(D4)可以是大致三角形的楔形,并且对角磁体(D1)(D2)(D3)(D4)被布置成平行六面体形状。