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1. 发明申请

WO2003085384A1 SURFACE CLEANING AND PARTICLE COUNTING 审中-公开
标题翻译：表面清洁和颗粒计数
公开(公告)号：WO2003085384A1
公开(公告)日：2003-10-16
申请号：PCT/US2002/010199
申请日：2002-04-02
申请人： CONVEY TECHNOLOGY INCORPORATED , BATCHELDER, John, Samuel
发明人： BATCHELDER, John, Samuel
IPC分类号： G01N21/00
CPC分类号： G01N21/47 , G01N1/02 , G01N15/0612 , G01N21/88 , G01N21/94 , G01N2001/028 , G01N2001/2833 , G01N2015/144 , G01N2015/1452 , G01N2021/4707 , G01N2021/8864 , G01N2021/8887 , G01N2021/945
摘要： A method and an apparatus for detecting removable particulates initially on a test surface or surface to be inspected. The removable particles are transferred to a portion of a tacky surface (130)on a carrier by adhering and then removing the portion of the tacky surface (130)from the test surface. The carrier is received by a positioning means (131) and passed through the field of view of a surface inspection means (100)guided by a controller (170). Signals from the surface inspection means are combined with coordinates from the controller (170)to produce particle coordinates, which indicate particulates initally on the test surface. Particle coordinates on the tacky surface (130)measured before the tacky surface (130)is adhered and removed from the test surface can be compared with particle coordinates measured after the tacky surface (130)is adhered and removed from teh test surface. Several test surfaces can be sequentially inspected using the same carrier by storing particle coordinates after each measurements andcomparing the recent measurement with thecumulative previous measurements. The tacky surface (130)and the associated particle coordiantes can be conveyed to other analytical instuments for subsequent analysis.
摘要翻译：一种最初在待检查的测试表面或表面上检测可去除的微粒的方法和装置。通过粘附然后从测试表面去除粘性表面（130）的一部分，将可除去的颗粒转移到载体上的粘性表面（130）的一部分上。载体由定位装置（131）接收并通过由控制器（170）引导的表面检查装置（100）的视场。来自表面检查装置的信号与来自控制器（170）的坐标组合以产生在测试表面上初始地指示微粒的粒子坐标。可以将在粘性表面（130）之前测量的在粘性表面（130）上的粘度表面（130）上的粒子坐标与测试表面粘附并除去粘度表面（130）之后测量的粒子坐标进行比较。可以通过在每次测量之后存储粒子坐标并将最近的测量与累积的先前测量值相比较，使用相同的载体来顺序地检查几个测试表面。粘性表面（130）和相关的颗粒协调器可以被传送到其他分析实验用于随后的分析。

2. 发明申请

WO2003085383A1 SURFACE CLEANING AND PARTICLE COUNTING 审中-公开
标题翻译：表面清洁和颗粒计数
公开(公告)号：WO2003085383A1
公开(公告)日：2003-10-16
申请号：PCT/US2002/010564
申请日：2002-04-01
申请人： CONVEY TECHNOLOGY INCORPORATED , BATCHELDER, John, samuel
发明人： BATCHELDER, John, samuel
IPC分类号： G01N15/10
CPC分类号： G01N21/94 , G01N1/02 , G01N15/0612 , G01N21/47 , G01N21/88 , G01N2001/028 , G01N2001/2833 , G01N2015/144 , G01N2015/1452 , G01N2021/4707 , G01N2021/8864 , G01N2021/8887 , G01N2021/945
摘要： A method and an apparatus for detecting removable particulates initially on a test surface or surface to be inspected. The removable particles are transferred to a portion of a tacky surface (130) on a carrier (406) by adhering and then removing the portion of the tacky surface (130) from the test surface. The carrier (406) is received by a positioning means (131) and passed through the field of view of a surface inspection means guided by a controller (170). Signals from the surface inspection means are combined with coordinates from the controller (170) to produce particle coordinates (511), which indicate particulates initially on the test surface. Particle coordinates (511) on the tacky surface (130) measured before the tacky surface (130) is adhered and removed from the test surface (512) can be compared with particle coordinates (511) measured after the tacky surface (130) is adhered and removed from the test surface (512). Several test surfaces (512, 513, 514) can be sequentially inspected using the same carrier (406) by storing particle coordinates (511) after each measurement and comparing the most recent measurement with the cumulative previous measurements. The tacky surface (130) and the associated particle coordinates (511) can be conveyed to other analytical instruments for subsequent analysis.
摘要翻译：一种最初在待检查的测试表面或表面上检测可去除的微粒的方法和装置。通过粘附然后从测试表面去除粘性表面（130）的一部分，将可除去的颗粒转移到载体（406）上的粘性表面（130）的一部分上。载体（406）由定位装置（131）接收并通过由控制器（170）引导的表面检查装置的视场。来自表面检查装置的信号与来自控制器（170）的坐标组合，以产生最初在测试表面上指示颗粒的颗粒坐标（511）。可以将在粘性表面（130）上粘附并从测试表面（512）去除之前测量的粘性表面（130）上的粒子坐标（511）与在粘性表面（130）粘附之后测量的颗粒坐标（511）进行比较并从测试表面（512）移除。通过在每次测量之后存储粒子坐标（511）并将最近的测量与累积的先前测量值进行比较，可以使用相同的载体（406）来顺序检查几个测试表面（512,513,514）。粘性表面（130）和相关联的颗粒坐标（511）可以被传送到其他分析仪器用于随后的分析。

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