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1. 发明申请

WO2003083169A1 APPARATUS AND METHOD FOR DEPOSITING ORGANIC MATTER OF VAPOR PHASE 审中-公开
标题翻译：用于沉积蒸气相的有机物的装置和方法
公开(公告)号：WO2003083169A1
公开(公告)日：2003-10-09
申请号：PCT/KR2003/000605
申请日：2003-03-27
申请人： ANS INC , KIM, Dong-Soo , BAE, Kyung-Bin , CHOI, Dong-Kwon
发明人： KIM, Dong-Soo , BAE, Kyung-Bin , CHOI, Dong-Kwon
IPC分类号： C23C16/44
CPC分类号： C23C16/45589 , C23C14/12 , C23C14/228 , C23C16/4481 , C23C16/4485 , C23C16/4486
摘要： The present invention relates to a vapor organic material deposition method and a vapor organic material deposition apparatus using the same which are capable of fast growing a thin film uniformly on a wider substrate by spraying a vapor organic material in a gravity direction using a spraying unit installed in an upper side of the same and accurately and stably adjusting a thickness of a wider substrate of an organic thin film by using a diluting gas as a deposition material and continuously carrying a small size heat source to a scan head.
摘要翻译：本发明涉及一种蒸气有机材料沉积方法及其蒸汽有机材料沉积装置，该装置能够通过使用安装的喷涂装置在重力方向上喷射蒸汽有机材料，使薄膜均匀地快速生长在较宽的基材上通过使用稀释气体作为沉积材料并且将小尺寸的热源连续地携带到扫描头，在相同的上侧并且准确且稳定地调节有机薄膜的较宽基板的厚度。

2. 发明申请

WO2008026865A1 APPARATUS AND METHOD FOR DEPOSITING ORGANIC THIN FILM 审中-公开
标题翻译：沉积有机薄膜的装置和方法
公开(公告)号：WO2008026865A1
公开(公告)日：2008-03-06
申请号：PCT/KR2007/004133
申请日：2007-08-28
申请人： JUSUNG ENGINEERING CO., LTD. , CHOI, Dong Kwon
发明人： CHOI, Dong Kwon
IPC分类号： C23C14/24
CPC分类号： C23C14/12 , C23C14/228 , C23C14/246
摘要： Provided are an apparatus and a method for depositing an organic thin film. The apparatus includes: a chamber, a substrate seating unit disposed inside the chamber, a spraying unit for evaporating and spraying a raw organic material and a raw dopant material, and a deposition source supplying module configured for supplying the raw organic material and the raw dopant material to the spraying unit. An organic thin film having targeted doping concentration can be manufactured by controlling amounts of a raw organic material and a raw dopant material of powder form supplied into a chamber. And the amounts of the raw organic material and the raw dopant material supplied into a chamber are maintained constant while a plurality of processes is performed, so that reproducibility of the organic thin film containing dopants can be improved.
摘要翻译：提供了一种用于沉积有机薄膜的装置和方法。该装置包括：室，设置在室内的基板座单元，用于蒸发和喷射原始有机材料和原始掺杂剂材料的喷射单元，以及沉积源供应模块，其被配置用于供应原始有机材料和原始掺杂剂材料到喷涂单元。具有目标掺杂浓度的有机薄膜可以通过控制供给到室中的原料有机材料和粉末形式的原料掺杂剂材料的量来制造。并且在进行多个处理时，供给到室中的原料有机材料和原料掺杂剂材料的量保持恒定，使得可以提高含有掺杂剂的有机薄膜的再现性。

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