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    • 1. 发明申请
    • SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN
    • 基板支撑与基板加热器和对称RF返回
    • WO2013003266A2
    • 2013-01-03
    • PCT/US2012/043967
    • 2012-06-25
    • APPLIED MATERIALS, INC.CHANG, YuTZU, Gwo-ChuanCUI, AnqingKUANG, William W.CUVALCI, Olkan
    • CHANG, YuTZU, Gwo-ChuanCUI, AnqingKUANG, William W.CUVALCI, Olkan
    • F27B17/0025H01J37/32091H01J37/32715H01L21/67103H01L21/67248
    • Apparatus for processing a substrate are provided herein. In some embodiments, a substrate support includes a substrate support surface and a shaft; an RF electrode disposed in the substrate support proximate the substrate support surface to receive RF current from an RF source; a heater disposed proximate the substrate support surface to provide heat to a substrate when disposed on the substrate support surface, the heater having one or more conductive lines to provide power to the heater; a thermocouple to measure the temperature of a substrate when disposed on the substrate support surface; and a conductive element having an interior volume with the one or more conductive lines and the thermocouple disposed through the interior volume, the conductive element coupled to the RF electrode and having an electric field of about zero in the interior volume when RF current is provided to the conductive element.
    • 本文提供了用于处理衬底的设备。 在一些实施例中,衬底支撑件包括衬底支撑表面和轴; 设置在所述衬底支撑件中的RF电极,靠近所述衬底支撑表面以从RF源接收RF电流; 设置在所述基板支撑表面附近的加热器,以在设置在所述基板支撑表面上时向所述基板提供热量,所述加热器具有一个或多个导线以向所述加热器提供电力; 当设置在基板支撑表面上时测量基板的温度的热电偶; 以及具有内部体积的导电元件,所述一个或多个导电线和所述热电偶穿过所述内部体积设置,所述导电元件耦合到所述RF电极并且当RF电流被提供给所述内部体积时具有约零的电场 导电元件。
    • 9. 发明申请
    • UPLINK POWER CONTROL MESSAGE DESIGN IN WIRELESS OFDMA SYSTEMS
    • 无线OFDMA系统中的UPLINK功率控制消息设计
    • WO2011097925A1
    • 2011-08-18
    • PCT/CN2010/080066
    • 2010-12-21
    • MEDIATEK INC.CHANG, Yu-HaoCHEN, Yih-Shen
    • CHANG, Yu-HaoCHEN, Yih-Shen
    • H04W52/16H04W52/26
    • H04W52/54H04W52/146H04W52/241H04W52/42
    • A method of uplink power control in a wireless OFDMA system is provided. A serving base station first configures a fast feedback channel by transmitting a feedback allocation message to a mobile station. The mobile station then reports downlink channel information via the allocated fast feedback channel. Based on the reported downlink channel information, the serving base station estimates uplink channel quality and thereby detects a channel variation and generates an uplink power adjustment message that delivers a power offset to adjust the transmitting power level of the mobile station. In one novel aspect, the uplink power adjustment message also comprises feedback allocation information that re-configures the fast feedback channel without extra signaling overhead. In addition, the novel power adjustment message eliminates redundant information such that it is transmitted via a minimum resource unit without requiring extra resource.
    • 提供了一种在无线OFDMA系统中的上行链路功率控制的方法。 服务基站首先通过向移动台发送反馈分配消息来配置快速反馈信道。 移动台然后经由分配的快速反馈信道报告下行链路信道信息。 基于所报告的下行链路信道信息,服务基站估计上行链路信道质量,从而检测信道变化,并产生传递功率偏移以调整移动台的发射功率电平的上行链路功率调整消息。 在一个新颖的方面,上行链路功率调整消息还包括重新配置快速反馈信道而没有额外的信令开销的反馈分配信息。 另外,新的功率调整消息消除了冗余信息,使得它经由最小资源单元被传输,而不需要额外的资源。
    • 10. 发明申请
    • LOW LATENCY SYNCHRONIZATION SCHEME FOR WRIELESS OFDMA SYSTEMS
    • 用于无线OFDMA系统的低延迟同步方案
    • WO2010108393A1
    • 2010-09-30
    • PCT/CN2010/070119
    • 2010-01-11
    • MEDIATEK INC.CHANG, Yu-HaoLIAO, Pei-Kai
    • CHANG, Yu-HaoLIAO, Pei-Kai
    • H04L27/26
    • H04L5/0053H04L27/2602H04L27/2656H04W56/00
    • In advanced wireless OFDMA communication systems, hierarchical synchronization is adopted to synchronize between a base station (BS) and a mobile station (MS). In a hierarchical synchronization architecture, primary advanced preamble (PA-Preamble) is used for coarse time domain synchronization while cell ID is detected using several accumulated secondary advanced preambles (SA-Preambles). Network entry latency can be reduced by adjusting the relative location of superframe header (SFH), PA-Preamble and SA-Preambles within a superframe. Three different synchronization channel (SCH) architectures are proposed to provide different tradeoffs between network entry latency and the robustness of SA-Preamble design and cell ID detection.
    • 在先进的无线OFDMA通信系统中,采用分层同步来在基站(BS)和移动台(MS)之间进行同步。 在分层同步架构中,主要的高级前同步码(PA-Preamble)用于粗略的时域同步,同时使用几个累加的辅助高级前导码(SA-前导码)来检测小区ID。 可以通过调整超帧中的超帧头(SFH),PA前导码和SA-前导码的相对位置来减少网络进入延迟。 提出了三种不同的同步信道(SCH)架构,以提供网络入口延迟与SA-前导码设计和小区ID检测的鲁棒性之间的不同权衡。