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    • 1. 发明申请
    • TEMPERATURE MEASURING APPARATUS
    • 温度测量装置
    • WO2011070319A1
    • 2011-06-16
    • PCT/GB2010/002242
    • 2010-12-08
    • CALEX ELECTRONICS LIMITEDBARRY, Timothy Kenneth
    • BARRY, Timothy Kenneth
    • G01J5/06G01J5/16
    • G01J5/06G01J5/0834G01J5/16G01J2005/068H01L2224/48091H01L2924/00014
    • Apparatus for measuring the temperature of an object comprises an optical tube, a first temperature sensor located at a closed end of the optical tube, a lens located at an open end of the optical tube and arranged to focus radiation from the object onto the first temperature sensor, a shutter located at the open end of the optical tube, the shutter having an open position allowing radiation from the object to reach the first temperature sensor and a closed position preventing radiation from the object reaching the first temperature sensor, a second temperature sensor located on the shutter, a third temperature sensor for measuring the substrate temperature of the first temperature sensor, a control device arranged to open and close the shutter, and a processing device connected to the first temperature sensor, the second temperature sensor, the third temperature sensor and the control device. The processing device is arranged to take first measurements from the first, second and third temperature sensors when the shutter is in its closed position, calculate an offset value from these measurements, open the shutter, take a second measurement from the first temperature sensor, and calculate the temperature of the object from the second measurement, the substrate temperature and the offset value.
    • 用于测量物体的温度的装置包括光学管,位于光学管的封闭端的第一温度传感器,位于光学管的开口端的透镜,并被布置成将来自物体的辐射聚焦到第一温度 传感器,位于光学管的开口端的快门,闸门具有允许来自物体的辐射到达第一温度传感器的打开位置,以及防止来自物体到达第一温度传感器的辐射的关闭位置,第二温度传感器 位于快门上的第三温度传感器,用于测量第一温度传感器的基板温度的第三温度传感器,布置成打开和关闭快门的控制装置,以及连接到第一温度传感器,第二温度传感器,第三温度 传感器和控制装置。 处理装置被设置为当快门处于其关闭位置时从第一温度传感器,第二温度传感器和第三温度传感器获取第一测量值,从这些测量值计算偏移值,打开快门,从第一温度传感器进行第二测量,以及 从第二次测量,基板温度和偏移值计算物体的温度。