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    • 1. 发明申请
    • PARTIAL PRESSURE MEASURING CELL WITH COLD-CATHODE ION SOURCE FOR LEAK DETECTION IN VACUUM SYSTEMS
    • 部分压力测量电池,用于阴极离子源,用于真空系统中的泄漏检测
    • WO1991009413A1
    • 1991-06-27
    • PCT/CH1990000272
    • 1990-11-27
    • BALZER, Richard
    • H01J41/06
    • H01J41/06G01M3/202
    • The partial pressure measuring cell consists of a combination of a magnetically guided cold-cathode discharge to ionise the residual gas (ion source) with magnetic separation of the ion masses (masss spectrometer). Here the discharge is formed by a suitable non-uniform magnetic field in such a way that the scatter of the ion energy is small enough to ensure the resolution of the mass separation needed for partial pressure measurement (in leak detection). The ions are accelerated solely in the electric field of the discharge chamber. The special shape of the cold-cathode discharge used affects the electric field in such a way that the energy of the emitted ions is low and virtually independent of the discharge voltage. Owing to the low ion energy, only a modest magnetic field is required for mass separation so that the mass spectrometer and the ion source can be integrated with the magnetic discharge guide system into a single magnetic system.
    • 分压测量单元由磁导向冷阴极放电与离子源(质谱仪)的磁分离电离残留气体(离子源)组成。 在这里,放电由合适的非均匀磁场形成,使得离子能量的散射足够小以确保分压测量所需的质量分离(在泄漏检测中)。 离子仅在放电室的电场中加速。 所使用的冷阴极放电的特殊形状以这样的方式影响电场,使得所发射的离子的能量低,并且几乎不依赖于放电电压。 由于低离子能量,质量分离仅需要适度的磁场,使得质谱仪和离子源可以与磁放电引导系统集成成单个磁系统。