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1. 发明申请

WO2017200628A3 DIAMOND COATED ANTIREFLECTIVE WINDOW SYSTEM AND METHOD 审中-公开
公开(公告)号：WO2017200628A3
公开(公告)日：2017-11-23
申请号：PCT/US2017/020288
申请日：2017-03-01
申请人： AKHAN SEMICONDUCTOR INC
发明人： KHAN, Adam , POLAK, Robert
IPC分类号： G02B1/11
摘要： A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.

2. 发明申请

WO2017200628A2 DIAMOND COATED ANTIREFLECTIVE WINDOW SYSTEM AND METHOD 审中-公开
标题翻译：金刚石涂层防反射窗系统和方法
公开(公告)号：WO2017200628A2
公开(公告)日：2017-11-23
申请号：PCT/US2017/020288
申请日：2017-03-01
申请人： AKHAN SEMICONDUCTOR INC
发明人： KHAN, Adam , POLAK, Robert
摘要： A system and method for diamond based multilayer antireflective coating for optical windows are provided. An antireflective coatings for optical windows may include an optical grade silicon substrate, a first polycrystalline diamond film on the silicon substrate, a germanium film on the first polycrystalline diamond film, a fused silica film on the germanium film; and a second polycrystalline diamond film on the fused silica film. A method of fabricating a diamond based multilayer antireflective coating may include the steps of cleaning and seeding an optical substrate, forming a first diamond layer on the optical substrate, forming a germanium layer on the first diamond layer, forming a fused silica layer on the germanium layer, cleaning and seeding the germanium layer, and forming a second diamond layer on the germanium layer.
摘要翻译：提供了一种用于光学窗口的金刚石基多层抗反射涂层的系统和方法。用于光学窗口的抗反射涂层可以包括光学级硅基底，在硅基底上的第一多晶金刚石膜，在第一多晶金刚石膜上的锗膜，在锗膜上的熔凝硅石膜; 和在熔凝硅石膜上的第二多晶金刚石膜。制造金刚石基多层抗反射涂层的方法可包括以下步骤：清洁和接种光学基材;在光学基材上形成第一金刚石层;在第一金刚石层上形成锗层;在锗上形成熔凝硅石层层，清洁并接种锗层，并在锗层上形成第二金刚石层。

3. 发明申请

WO2023003947A1 DIAMOND STRUCTURES FOR TOOLING 审中-公开
公开(公告)号：WO2023003947A1
公开(公告)日：2023-01-26
申请号：PCT/US2022/037701
申请日：2022-07-20
申请人： AKHAN SEMICONDUCTOR, INC.
发明人： KHAN, Adam , KOVI, Kiran, Kumar
IPC分类号： C23C16/27 , B24B53/047 , B24D3/10 , C04B35/80 , C30B29/04 , C04B35/573 , H01L21/687
摘要： A tool such as a wafer handler or wafer chuck can include a surface having at least one protrusion. A diamond coating is formed from diamond grains sized so that 90% of the grains are between 200 and 300 nanometers, with the diamond coating being deposited on the surface at a temperature below 500 degrees Celsius over the at least one protrusion. Dopants can be used to provide electrical conductivity needed for electrostatic wafer chuck.

4. 发明申请

WO2022146724A1 MONOLITHICALLY INTEGRATED WAVEGUIDE SENSORS ON DIAMOND DISPLAY GLASS SYSTEM AND METHOD 审中-公开
公开(公告)号：WO2022146724A1
公开(公告)日：2022-07-07
申请号：PCT/US2021/064108
申请日：2021-12-17
申请人： AKHAN SEMICONDUCTOR, INC.
发明人： KHAN, Adam , KOVI, Kiran, Kumar , SCHIRMANN, Ernest , ALBERTH, William
IPC分类号： H01L27/32
摘要： A transparent display includes a display including a transparent substrate and a patterned diamond layer formed on the transparent substrate to at least in part define a diamond waveguide. At least two electronic devices can be connected by the diamond waveguide, and can include a sensor, a transducer, or electronic circuitry, including communication, control, or data processing electronic circuitry.

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