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1. 发明申请

WO2007102324A1 位相ロックイン型高周波走査トンネル顕微鏡审中-公开
标题翻译：相位锁定型高频扫描隧道显微镜
公开(公告)号：WO2007102324A1
公开(公告)日：2007-09-13
申请号：PCT/JP2007/053428
申请日：2007-02-23
申请人：財団法人大阪産業振興機構 , 国立大学法人大阪大学 , 遠藤勝義 , 稲垣耕司 , 有馬健太
发明人：遠藤勝義 , 稲垣耕司 , 有馬健太
IPC分类号： G01N13/12
CPC分类号： G01Q60/12
摘要： Provided is a phase lock-in type high-frequency scanning tunnel microscope, which can observe an atomic image of the surface of an insulator or a wide-band-gap semiconductor. The microscope comprises a bias power source (8) for applying a high-frequency bias voltage of a rectangular or sinusoidal wave between a probe (1) and a specimen (2), a current amplifier (5) for amplifying a detection current, in which a tunnel current to flow between the probe and the specimen and a current derived from a stray capacity are mixed, and signal processing means (a lock-in amplifier (6) or a DSP) having phase lock-in functions to input the current amplified by the current amplifier and to synchronize a sampling signal with the frequency of the high-frequency bias voltage and lock the same with the frequency of the high-frequency bias voltage so that the current derived from the stray capacity is eliminated to generate a feedback signal exclusively of the tunnel current.
摘要翻译：提供一种可以观察绝缘体或宽带隙半导体的表面的原子图像的锁相型高频扫描隧道显微镜。显微镜包括用于在探针（1）和样品（2）之间施加矩形或正弦波的高频偏置电压的偏置电源（8），用于放大检测电流的电流放大器（5）混合在探针和样本之间流动的隧道电流和从杂散能力导出的电流，并且具有相位锁定功能的信号处理装置（锁定放大器（6）或DSP）用于输入电流由电流放大器放大，并使采样信号与高频偏置电压的频率同步，并将其与高频偏置电压的频率锁定，从而消除从杂散容量导出的电流以产生反馈信号专用于隧道电流。

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