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    • 73. 发明申请
    • ANTIREFLECTIVE COATING MATERIAL FOR PHOTORESISTS
    • 用于电影的抗反射涂层材料
    • WO01013180A1
    • 2001-02-22
    • PCT/EP2000/007572
    • 2000-08-04
    • G03F7/004C09D5/00C09D179/00G03F7/09G03F7/11H01L21/027C09D179/02
    • G03F7/091
    • The present invention relates to an antireflective coating composition comprising an admixture of: a) a polymer defined by structure (I) where R1 & R2 are independently hydrogen, or C1 to C5 alkyl, R3 is a methyl, ethyl, propyl or butyl group, R4-R7 are independently hydrogen, or C1 to C5 alkyl n = 10 to 50,000, (b) a fluorine-containing, sparingly water-soluble (0.1 % - 10 % by weight in water) organic C3-C13 aliphatic carboxylic acid; (c) a non-metallic hydroxide; and (d) a solvent. The invention also relates to a method for producing such an antireflective coating composition and to a method for producing a microelectronic device using such an antireflective coating composition in conjunction with a photoresist composition.
    • 本发明涉及一种抗反射涂料组合物,其包含以下混合物:a)由结构(I)定义的聚合物,其中R 1和R 2独立地为氢或C 1至C 5烷基,R 3为甲基,乙基,丙基或丁基, R4-R7独立地为氢,或C1〜C5烷基n = 10〜50,000,(b)含氟的微水溶性(0.1%-10重量%)的有机C3-C13脂族羧酸; (c)非金属氢氧化物; 和(d)溶剂。 本发明还涉及一种制备这种抗反射涂料组合物的方法和一种使用这种抗反射涂料组合物与光致抗蚀剂组合物一起制备微电子器件的方法。
    • 77. 发明申请
    • UNSATURATED OLIGOPHENOL CYANATES
    • 不饱和oligophenol氰酸
    • WO00009477A1
    • 2000-02-24
    • PCT/EP1999/005757
    • 1999-08-09
    • G03F7/027C07C261/00C07C261/02C07D251/32C08F8/00C08F290/14C08G73/00C08G73/06C08J5/04C09D179/00
    • C07C261/02C07C2603/68
    • The invention relates to unsaturated oligophenol cyanates of the general formula (I) [A-]n[B-A-]xB[-A]m, in which A is a group of formula (II) and B is a group of formula (III), where R , R and R are each hydrogen or a bond with a group B, there being either one or two bonds with B; and both R and R as well as R and R separately or jointly represent a direct bond or hydrogen and a bond with a group A, there being either one or two bonds with A. The indices m and n are 0 or 1 but not both 1 at the same time and x is a whole number between 0 and 10, where at least one of the numbers m, n and x is not 0. The above unsaturated oligophenol cyanates can be prepared by reacting the corresponding oligophenols with chlorine cyanide. They have a low viscosity and owing to their double bonds are able to undergo free-radical polymerization. They are especially suitable for use as matrix materials for fibre-reinforced composites and for radiation-curable varnishes and coatings.
    • 中描述的通式(I)[A-] n的[B-A-]×B [-A]米的不饱和oligophenol氰酸酯。 其中,每个A是一个基团式(II)的且B为式的基团(III),其中R <1>,R <2>和R <3>各自为氢或一个键合到基团B,以及一个 或两个键与B都存在,且R <4>和R <4“>和R <5>和R <5”>各自enweder一起代表一个直接键或氢,和一个Sindung到的基团的,其中 一个或两个键合到一个存在。 指数m和n是0或1,但不同时为1,并且x为0至10的整数,的数m,其中至少一个,n和x是大于零的其它 所述不饱和oligophenol氰酸酯可以由相应的Oligophenole与氯化氰反应来制备。 它们具有低粘度,是自由基固化由于存在双键。 它们特别适合作为用于纤维增强复合材料和可辐射固化油漆和涂料的基体材料。