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    • 75. 发明申请
    • OPTICAL MICROPHONE ASSEMBLY
    • WO2020193962A1
    • 2020-10-01
    • PCT/GB2020/050765
    • 2020-03-20
    • SENSIBEL ASSAMUELS, Adrian James
    • LACOLLE, MatthieuSAGBERG, HåkonVENNERØD, Jakob
    • G01H9/00H04R23/00
    • An optical microphone assembly (2) comprises a micro-electromechanical system (MEMS) component (4), a semiconductor chip (6), and an outer housing including at least part of a non-MEMS supporting structure and defining an aperture (32). The MEMS component comprises an interferometric arrangement, which comprises a membrane (8) and at least one optical element (10) spaced from the membrane (8). The semiconductor chip (6) comprises at least one photo detector (14) and has mounted thereon or integrated therein a light source (16). The MEMS component (4) is mounted on the non-MEMS supporting structure and sealed to the outer housing such that the MEMS component (4) closes the aperture (32). The semiconductor chip (6) is mounted separately from the MEMS component (4) on the non-MEMS supporting structure in a spaced relationship with the MEMS component (4) such that the MEMS component (4) is displaced relative to the semiconductor chip (6) in a direction perpendicular to a reflecting surface of the membrane (8). The light source (16) is arranged to provide light (38) to the interferometric arrangement such that a first portion (40) of said light propagates along a first optical path via said interferometric arrangement and a second portion (42) of said light propagates along a second, different optical path via said interferometric arrangement such that at least one of said first and second portions (40, 42) is reflected by the reflecting surface of the membrane (8), thereby giving rise to an optical path difference between the first and second optical paths which depends on a distance between the membrane (8) and the optical element (10). The at least one photo detector (14) is arranged to detect at least part of an interference pattern generated by said first and second portions (40, 42) of light dependent on said optical path difference.
    • 77. 发明申请
    • OPTICAL MICROPHONE ASSEMBLY
    • WO2019220103A1
    • 2019-11-21
    • PCT/GB2019/051323
    • 2019-05-15
    • SINTEF TTO ASSAMUELS, Adrian James
    • ANGELSKÅR, HallvardBAKKE, ThorJOHANSEN, Ib-RuneLACOLLE, MatthieuVENNERØD, JakobVOGL, AndreasWANG, Dag
    • H04R23/00
    • An optical microphone assembly (38) comprises a rigid substrate (42); an interferometic arrangement, a light source (48), at least one photo detector (50) and an enclosure (74). The interferometric arrangement comprises a membrane (46) and at least one optical element (62) spaced from the membrane (46), wherein the at least one optical element comprises a surface (60) of the substrate (42) and/or is disposed on a surface (60) of the substrate (42). The light source (48) is arranged to provide light to the interferometric arrangement such that a first portion of the light propagates along a first optical path via the interferometric arrangement and a second portion of the light propagates along a second different optical path via the interferometric arrangement, thereby giving rise to an optical path difference between the first and second optical paths which depends on a distance between the membrane (46) and the optical element (62). The photo detector(s) (50) are arranged to detect at least part of an interference pattern generated by said first and second portions of light dependent on said optical path difference. The enclosure (74) is arranged to form an acoustic cavity (76) in fluid communication with one side of the membrane (46). The volume of the acoustic cavity (76) is at least 3mm multiplied by d 2 , where d is a diameter of the membrane (46).