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    • 21. 发明申请
    • SINGLE STEP CHEMICAL MECHANICAL POLISH PROCESS TO IMPROVE THE SURFACE ROUGHNESS IN MRAM TECHNOLOGY
    • 单步化学机械抛光工艺改善MRAM技术中的表面粗糙度
    • WO2003030263A1
    • 2003-04-10
    • PCT/US2002/003044
    • 2002-01-24
    • INFINEON TECHNOLOGIES NORTH AMERICA CORP.
    • SENG, Low, Kia
    • H01L27/22
    • H01L43/12B82Y10/00H01L21/3212H01L27/222
    • A method of lithographically forming a semiconductor device that reduces the effects of edge topography when misalignment occurs. The method comprises forming a dielectric layer (20) having a top surface, etching a trench (22) in the dielectric layer and depositing a liner (26) on the top surface of the dielectric layer and within the trench. A metal layer (24) is then deposited on the liner and polishes until the metal layer is coplanar with the liner on the top surface of the dielectric layer, leaving a portion of the liner exposed. A stack layer (32) is deposited atop the exposed liner and on the polished metal layer and patterned. The exposed liner and non-patterned portion of the stack layer are removed simultaneously. A magnetic RAM (MRAM) can be processed in which undesirable magnetic properties caused by mis-alignment of the magnetic stack are minimized because of the improved edge topography.
    • 一种光刻形成半导体器件的方法,当发生不对准时减少边缘形貌的影响。 该方法包括形成具有顶表面的电介质层(20),蚀刻电介质层中的沟槽(22),并在介质层的顶表面和沟槽内沉积衬垫(26)。 然后将金属层(24)沉积在衬垫上并抛光,直到金属层与电介质层顶表面上的衬垫共面,留下衬套的一部分。 堆叠层(32)沉积在暴露的衬垫顶部和抛光的金属层上并被图案化。 堆叠层的暴露的衬垫和非图案化部分被同时移除。 可以处理磁性RAM(MRAM),其中由于改进的边缘形貌,使磁性堆叠的错误对准引起的不期望的磁性能最小化。
    • 22. 发明申请
    • ACTIVE AUTO ZERO CIRCUIT FOR PROGRAMMABLE TIME CONTINUOUS OPEN LOOP AMPLIFIERS
    • 可编程时间连续开环放大器的主动自动零电路
    • WO2003003568A2
    • 2003-01-09
    • PCT/US2002/016738
    • 2002-05-28
    • INFINEON TECHNOLOGIES NORTH AMERICA CORP.
    • BLON, ThomasCYRUSIAN, Sasan
    • H03F3/45
    • H03F3/45197H03F3/45659H03F3/45753H03F2203/45616
    • An active offset cancellation circuit for an open loop differential amplifier having programmable gain is disclosed. The amplifier is operated on a two-phase clock where the normal operation occurs on the first phase and offset detection and cancellation occurs on the second phase. On the first phase, the programmable gain of the amplifier is set according to the application of the amplifier. On the second phase, the programmable gain of the amplifier is set to the maximum value and the offset cancellation circuit measures the offset created by the amplifier when both differential inputs are connected to a common source. The circuit then adjusts a bias current and stores this adjustment to cancel offset during the operational phase of the amplifier. During the operational phase, the first phase of the clock, the programmable gain is again returned to a value according to the application and the stored adjustment is used to bias the current in one of the two input stages of the amplifier, canceling any offset imparted by the amplifier circuitry. One each clock cycle, any additional offset is similarly detected and canceled. Further, by varying the gain as described, residual offset is reduced.
    • 公开了一种具有可编程增益的开环差分放大器的有源偏移消除电路。 放大器工作在两相时钟,第一相出现正常工作,第二相发生偏移检测和取消。 在第一阶段,根据放大器的应用设置放大器的可编程增益。 在第二阶段,将放大器的可编程增益设置为最大值,并且当两个差分输入连接到公共源时,偏移消除电路测量由放大器产生的偏移。 该电路然后调整偏置电流并存储该调整以在放大器的操作阶段消除偏移。 在运行阶段,在时钟的第一阶段,根据应用,可编程增益再次返回到一个值,并且所存储的调整用于偏置放大器的两个输入级之一的电流,消除所赋予的任何偏移 由放大器电路。 一个每个时钟周期,任何额外的偏移量也被类似地检测和取消。 此外,通过改变如所述的增益,剩余偏移减小。