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    • 18. 发明申请
    • MICROMACHINED COMB DRIVE FOR QUANTITATIVE NANOINDENTATION
    • MICROMACHINED COMB DRIVE用于定量纳米材料
    • WO2010003149A1
    • 2010-01-07
    • PCT/US2009/049697
    • 2009-07-06
    • HYSITRON INCORPORATEDOH, YunjeSYED ASIF, Syed, AmanulaWARREN, Oden
    • OH, YunjeSYED ASIF, Syed, AmanulaWARREN, Oden
    • G01N3/40G01N3/00G01N3/02G01N3/06
    • G01N3/40G01B7/34G01N3/42G01N19/00G01N2203/0051G01N2203/0286G01N2203/0617G01Q60/366Y10S977/956
    • A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
    • 微机电(MEMS)纳米压头换能器,包括主体,可相对于主体移动的探头,连接到可移动探针的端部的压头,以及微加工梳状驱动器。 微加工梳状驱动器包括静电致动器电容器,该静电致动器电容器包括多个梳状电容器,其被配置为在施加偏置电压到致动电容器时沿包括压痕方向的位移轴沿着位移轴与压头尖端一起驱动探头。 微加工梳状驱动器还包括形成差分电容位移传感器的多个感测电容器,每个感测电容器包括多个梳状电容器,并且每个感测电容器被配置为提供一起代表探针位置的电容电平,其中, 致动器电容器和感测电容器的梳状电容器包括耦合到主体的固定电极梳和耦合到探针的可移动电极梳。