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    • 12. 发明申请
    • METHOD AND APPARATUS FOR DISPOSING OF FLUORINE-CONTAINING COMPOUND BY DECOMPOSITION
    • 通过分解处理含氟化合物的方法和装置
    • WO00074821A1
    • 2000-12-14
    • PCT/JP1999/003074
    • 1999-06-09
    • B01D53/86B01J23/34B01J23/38B01J23/63B01J23/70B01J23/16
    • B01J23/34B01D53/8659B01J23/38B01J23/63B01J23/70Y02C20/10Y02C20/30
    • A method which comprises contacting a fluorine-containing compound such as C2F6, CF4, CHF3, SF6, NF3 or the like with a catalyst for the decomposition of a fluorine-containing compound together with a catalyst for the decomposition of at least one of CO, SO2F2 and N2O in the presence of water and optionally oxygen. A catalyst for the decomposition of at least one of CO, SO2F2 and N2O preferably comprises at least one of Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of metal or oxide. By the treatment according to the method, a fluorine atom in a fluorine-containing compound can be converted to HF, which is easily absorbed by water or an aqueous alkaline solution, and substances formed by the decomposition of a fluorine-containing compound, such as CO, SO2F2 and N2O, can also be decomposed.
    • 一种方法,其包括使含氟化合物如C 2 F 6,CF 4,CHF 3,SF 6,NF 3等与用于分解含氟化合物的催化剂和用于分解CO, SO 2 F 2和N 2 O在水和任选的氧的存在下反应。 用于分解CO,SO 2 F 2和N 2中的至少一种的催化剂优选包含金属或氧化物形式的Pd,Pt,Cu,Mn,Fe,Co,Rh,Ir和Au中的至少一种。 通过根据该方法的处理,含氟化合物中的氟原子可以转化为HF,容易被水或碱性水溶液吸收,并且通过分解含氟化合物形成的物质,例如 CO,SO2F2和N2O也可以分解。
    • 20. 发明申请
    • METHOD FOR TREATING EXHAUST GAS CONTAINING FLUORINE-CONTAINING COMPOUND
    • 用于处理含有含氟化合物的排气的方法
    • WO01076725A1
    • 2001-10-18
    • PCT/JP2001/003117
    • 2001-04-11
    • B01D53/68B01D53/77B01D53/86B01J21/04H01L21/205H01L21/302
    • B01D53/8659B01J21/04Y02C20/30Y02P70/605
    • A method for treating an exhaust gas containing a fluorine-containing compound with a catalyst after the removal of solids from the gas, characterized in that the catalyst is a gamma -alumina having a crystal structure such that, in diffraction angles 2 theta obtained by the measurement with a X-ray diffractometer, diffraction lines having an intensity of 100 or more appear at five angles of 33 DEG +/- 1 DEG , 37 DEG +/- 1 DEG , 40 DEG +/- 1 DEG , 46 DEG +/- 1 DEG , 67 DEG +/- 1 DEG ; a preferable method, characterized in that one or more of H2, O2 and H2O are added to the above exhaust gas as a gas for aiding the decomposition of the fluorine-containing compound; and an apparatus for practicing the method. The method allows the treatment of a perfluorocompound (PFC) with good efficiency and over a long period of time.
    • 在从气体中除去固体后,用催化剂处理含有含氟化合物的废气的方法,其特征在于,所述催化剂是具有晶体结构的γ-氧化铝,使得在由 用X射线衍射仪测量,强度为100以上的衍射线出现在33°+/- 1°,37°+/- 1°,40°+/- 1°,46°+ - 1°,67°+/- 1°; 一种优选的方法,其特征在于,将H 2,O 2和H 2 O中的一种或多种添加到作为用于促进含氟化合物分解的气体的上述废气中; 以及实施该方法的装置。 该方法允许以高效率和长时间处理全氟化合物(PFC)。