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    • 15. 发明申请
    • PLANARIZATION FILMS FOR ADVANCED MICROELECTRONIC APPLICATIONS AND DEVICES AND METHODS OF PRODUCTION THEREOF
    • 用于高级微电子应用的平面薄膜及其制造方法
    • WO2005017617A1
    • 2005-02-24
    • PCT/US2003/034347
    • 2003-10-27
    • HONEYWELL INTERNATIONAL INCHUANG, WeiKENNEDY, JosephKATSANES, Ronald
    • HUANG, WeiKENNEDY, JosephKATSANES, Ronald
    • G03C1/00
    • H01L21/02118C04B26/12C04B2111/00482C08J7/02C08J2361/00C23F1/10C23F1/44C23F3/00C23F3/04H01L21/31051H01L21/312Y10T428/31942C04B2103/0093C04B2103/40
    • A planarization composition is disclosed herein that comprises: a) a structural constituent; and b) a solvent system, wherein the solvent system is compatible with the structural constituent and lowers the lowers at least one of the intermolecular forces or surface forces components of the planarization composition. A film that includes this planarization composition is also disclosed. In addition, another planarization composition is disclosed herein that comprises: a) a cresol-based polymer compound; and b) a solvent system comprising at least one alcohol and at least one ether acetate-based solvent. A film that includes this planarization composition is also disclosed. A layered component is also disclosed herein that comprises: a) a substrate having a surface topography; and b) a planarization composition or a film such as those described herein, wherein the composition is coupled to the substrate. Methods of forming a planarization compositions are also disclosed herein that comprise: a) providing a structural constituent; b) providing a solvent system, wherein the solvent system is compatible with the structural constituent and lowers at least one of the intermolecular forces or surface forces components of the planarization composition; and c) blending the structural constituent and the solvent system to form a planarization composition. Methods of forming a film are also disclosed that comprise: a) providing a planarization composition such as those disclosed herein; and b) evaporating at least part of the solvent system to form a film.
    • 本文公开了一种平面化组合物,其包括:a)结构成分; 和b)溶剂体系,其中所述溶剂体系与所述结构组分相容并降低所述平坦化组合物的至少一种分子间力或表面力组分。 还公开了包含该平坦化组合物的膜。 此外,本文公开了另外的平坦化组合物,其包括:a)甲酚基聚合物化合物; 和b)包含至少一种醇和至少一种乙酸乙烯酯类溶剂的溶剂体系。 还公开了包含该平坦化组合物的膜。 本文还公开了一种分层组件,其包括:a)具有表面形貌的衬底; 和b)平面化组合物或诸如本文所述的那些的膜,其中所述组合物与所述基材偶联。 本文还公开了形成平坦化组合物的方法,其包括:a)提供结构成分; b)提供溶剂体系,其中所述溶剂体系与所述结构组分相容并降低所述平坦化组合物的分子间力或表面力组分中的至少一种; 和c)将结构成分和溶剂体系混合以形成平坦化组合物。 还公开了形成膜的方法,其包括:a)提供诸如本文公开的那些的平坦化组合物; 和b)蒸发至少部分溶剂系统以形成膜。
    • 18. 发明申请
    • PREPARATION OF POLYISOBUTYLENE-BASED POLYMER NETWORKS BY THIOL-ENE CHEMISTRY
    • 通过THIOL-ENE化学制备基于聚异丁烯的聚合物网络
    • WO2014138017A1
    • 2014-09-12
    • PCT/US2014/020208
    • 2014-03-04
    • KENNEDY, JosephNUGAY, TurgutNUGAY, NihanTHE UNIVERSITY OF AKRON
    • KENNEDY, JosephNUGAY, TurgutNUGAY, Nihan
    • C08F110/10C08G75/04
    • C08F110/10C08F10/10C08F299/00C08G75/04C08G75/045C08K5/37C08F4/16C08F2/10
    • A PIB-based polymer network includes at least one sulfur containing segment and at least two PIB polymer segments. The at least two PIB polymer segments each include a core and at least two polyisobutylene polymer chains extending therefrom. The at least one sulfur containing segment includes at least one sulfur atom that is located between any two polyisobutylene polymer chains from two different PIB polymer segments, so that the sulfur containing segment connects those two different PIB polymer segments together. The PIB-based polymer network is produced by the thiol-ene reaction in the presence of light or heat. The reaction products include at least two polyisobutylene polymer precursor moieties, each polyisobutylene polymer precursor moiety having at least two end group selected from the end groups -CH 2 -CH(CH 3 )=CH 2 , -CH 2 =C(CH 3 ) 2 , and -CH 2 -CH=CH 2 ;and at least one multi-functional thiol.
    • 基于PIB的聚合物网络包括至少一个含硫段和至少两个PIB聚合物链段。 所述至少两个PIB聚合物链段各自包含芯和从其延伸的至少两个聚异丁烯聚合物链。 至少一个含硫部分包含位于来自两个不同PIB聚合物链段的任何两个聚异丁烯聚合物链之间的至少一个硫原子,使得含硫链段将那两个不同的PIB聚合物链段连接在一起。 基于PIB的聚合物网络通过在光或热存在下的硫醇 - 烯反应制备。 反应产物包括至少两个聚异丁烯聚合物前体部分,每个聚异丁烯聚合物前体部分具有至少两个选自端基-CH 2 -CH(CH 3)= CH 2,-CH 2 = C(CH 3)2和-CH 2 -CH = CH 2;和至少一个多官能硫醇。
    • 19. 发明申请
    • COMPOSITIONS, COATINGS AND FILMS FOR TRI-LAYER PATTERNING APPLICATIONS AND METHODS OF PREPARATION THEREOF
    • 三层布置方法的组合物,涂料和薄膜及其制备方法
    • WO2008106379A1
    • 2008-09-04
    • PCT/US2008/054814
    • 2008-02-23
    • HONEYWELL INTERNATIONAL INC.KENNEDY, JosephXIE, SongyuanDO, KimMUKHOPADHYAY, Sudip
    • KENNEDY, JosephXIE, SongyuanDO, KimMUKHOPADHYAY, Sudip
    • C08L83/04C08G77/18C08G77/20C09D183/04G03F7/09H01L21/312C08K3/28C08K5/101C08K5/17C08K5/18C08K5/3432
    • G03F7/0752C08G77/20C08G77/70C08L83/04C08L83/06C09D183/04G03F7/091G03F7/11H01L21/02126H01L21/02216H01L21/02282H01L21/3122C08L2666/44
    • Compositions for use in tri-layer applications are described herein, wherein the composition has a matrix and includes: a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, at least one condensation catalyst, and at least one solvent.. Tri-layer structures are also contemplated herein that comprise an organic underlayer (first layer), antireflective compositions and/or films contemplated herein (second layer) and a photoresist material (third layer) that are coupled to one another. Methods of producing a composition for tri-layer patterning applications includes: providing a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, providing at least one condensation catalyst, providing at least one solvent, providing at least one pH modifier, blending the formulated polymer and part of the at least one solvent in a reaction vessel to form a reactive mixture; and incorporating the at least one pH modifier, the at least one condensation catalyst and the remaining at least one solvent into the reactive mixture to form the composition.
    • 本文描述了用于三层应用的组合物,其中所述组合物具有基质,并且包括:配制的聚合物,其包含形成聚合物基质的至少一种类型的硅基部分,多个与基质偶联的乙烯基 聚合物的多个苯基,以及耦合到聚合物基质,多个至少一个缩合催化剂和至少一种溶剂的多个苯基。本文还涵盖三层结构,其包含有机底层(第一层),抗反射 本文考虑的组合物和/或膜(第二层)和彼此耦合的光致抗蚀剂材料(第三层)。 制备用于三层图案化应用的组合物的方法包括:提供配制的聚合物,其包含形成聚合物基质的至少一种类型的硅基部分,与聚合物基体偶联的多个乙烯基,以及多个 提供至少一种缩合催化剂,提供至少一种溶剂,提供至少一种pH调节剂,将配制的聚合物和部分至少一种溶剂混合在反应容器中以形成 反应性混合物 并将至少一种pH调节剂,至少一种缩合催化剂和剩余的至少一种溶剂掺入到反应混合物中以形成组合物。