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    • 3. 发明申请
    • STORAGE CAPACITOR FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FORMING THE SAME
    • 用于机电系统的存储电容器及其形成方法
    • WO2013070608A1
    • 2013-05-16
    • PCT/US2012/063715
    • 2012-11-06
    • QUALCOMM MEMS TECHNOLOGIES, INC.
    • SEO, Jae HyeongTUNG, Ming-HauMIGNARD, Marc M.
    • G02B26/00
    • G02B26/001
    • This disclosure provides systems, methods and apparatus for storage capacitors. In one aspect, an electromechanical systems (EMS) device includes a substrate, an optical stack disposed over the substrate, a mechanical layer positioned over the optical stack, and a storage capacitor. The optical stack includes a stationary electrode and at least one dielectric layer disposed over the stationary electrode, and the storage capacitor includes a first plate, a second plate and a dielectric structure disposed between the first and second plates. The first plate includes a portion of the mechanical layer positioned over an optically non-active region of the device, and the dielectric structure of the storage capacitor includes a portion of the at least one dielectric layer of the optical stack.
    • 本公开提供了用于存储电容器的系统,方法和装置。 一方面,机电系统(EMS)装置包括衬底,设置在衬底上的光学堆叠,位于光学堆叠上的机械层和存储电容器。 光学堆叠包括固定电极和设置在固定电极上的至少一个电介质层,并且存储电容器包括设置在第一和第二板之间的第一板,第二板和电介质结构。 第一板包括位于器件的光学无效区域上的机械层的一部分,并且存储电容器的电介质结构包括光学堆叠的至少一个电介质层的一部分。