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1. 发明申请

WO1993014909A1 APPARATUS FOR LOADING, UNLOADING AND PRECISELY POSITIONING ARTICLES WITH RESPECT TO A TABLE 审中-公开
标题翻译：装载，卸载和精确定位的装置与装置相关的装置
公开(公告)号：WO1993014909A1
公开(公告)日：1993-08-05
申请号：PCT/US1993000770
申请日：1993-01-28
申请人： ORBOT SYSTEMS, LTD. , ORBOTECH INC. , SHTEINITZ, Dan , KOZAK, Michael , BRANDSTATTER, Omri , ELENT, Michael
发明人： ORBOT SYSTEMS, LTD. , ORBOTECH INC.
IPC分类号： B25J09/06
CPC分类号： H05K13/0015 , H05K13/0061
摘要： Apparatus for precisely positioning an article on a supporting surface formed (14) with two registration shoulders (14a, 14b) at an angle to each other corresponding to that of, and engageable with, a registration corner on the article. The apparatus includes a gripper assembly (20) having a coupling pivotal about an axis perpendicular to the supporting surface such that when the gripper assembly (20) is moved to bring the registration corner of the article into engagement with one of the registration shoulders (14a, 14b) further movement of the gripper assembly (20) and article in the same direction pivots the gripper assembly (20) and article until the registration corner of the article is also brought into engagement with the other registration shoulder.
摘要翻译：用于将物品精确地定位在具有两个对准肩部（14a，14b）的形成（14）的支撑表面上的物品对应于物品上的配准角并与之配合的位置。该装置包括夹具组件（20），其具有围绕垂直于支撑表面的轴线枢转的联接件，使得当夹持器组件（20）移动以使物品的配准角与其中一个登记肩部（14a）接合时，14b）夹持器组件（20）和物品沿相同方向的进一步运动使夹持器组件（20）和物品枢转，直到制品的配准角也与另一个配准肩部接合。

2. 发明申请

WO1992009880A1 METHOD AND APPARATUS FOR AUTOMATIC OPTICAL INSPECTION 审中-公开
标题翻译：用于自动光学检测的方法和设备
公开(公告)号：WO1992009880A1
公开(公告)日：1992-06-11
申请号：PCT/US1991008746
申请日：1991-11-25
申请人： ORBOT SYSTEMS LTD. , ORBOT INC.
发明人： ORBOT SYSTEMS LTD. , ORBOT INC. , FINAROV, Moshe
IPC分类号： G01N21/41

3. 发明申请

WO9209880A2 METHOD AND APPARATUS FOR AUTOMATIC OPTICAL INSPECTION 审中-公开
标题翻译：自动光学检测方法与装置
公开(公告)号：WO9209880A2
公开(公告)日：1992-06-11
申请号：PCT/US9108746
申请日：1991-11-25
申请人： ORBOT SYSTEMS LTD , ORBOT INC
发明人： FINAROV MOSHE
IPC分类号： G01B11/06 , G01J4/00 , G01N21/21 , G01N21/41 , G01N21/55 , G01N21/84 , G01N21/88 , G01N21/95 , G01N21/956
CPC分类号： G01N21/88 , G01B11/0641 , G01J4/00 , G01N21/211 , G01N21/41 , G01N21/8422 , G01N2021/9513 , G01N2021/95638
摘要： An inspection system for providing high contrast images of two materials of an article to be inspected is disclosed. Light with variable spectral range and large angular coverage is passed from the source through a polarizer, reflects from or is transmitted through the article to be inspected, passes through an analyzer and is detected by a sensor. A phase compensator is disposed either between the polarizer and the sample or the sample and the analyzer. Two of the three polarization optical components, that is, the polarizer, the compensator and the analyzer, are separately adjusted until the maximum contrast is found in the image. This enables high contrast imaging of surfaces of objects of similar optical reflectivity, (such as surfaces consisting of two similar specular materials, or surfaces partly covered with transparent films) which cannot be imaged using normal reflective image forming techniques. The system of the invention can also be operated to measure the thickness or index of refraction of transparent thin films.
摘要翻译：公开了一种用于提供待检查物品的两种材料的高对比度图像的检查系统。具有可变光谱范围和大角度覆盖的光从光源通过偏振器，从或被透射通过待检查物品，通过分析器并由传感器检测。相位补偿器设置在偏振器和样品或样品和分析仪之间。三个偏振光学部件中的两个，即偏振器，补偿器和分析器，分别调整直到在图像中发现最大对比度。这使得能够使用普通反射成像技术不能成像的具有相似光反射率的物体的表面（例如由两个相似的镜面材料组成的表面或部分被透明膜部分覆盖的表面）进行高对比度成像。也可以操作本发明的系统来测量透明薄膜的厚度或折射率。

4. 发明申请

WO1993015474A1 METHOD OF INSPECTING ARTICLES 审中-公开
标题翻译：检查文章的方法
公开(公告)号：WO1993015474A1
公开(公告)日：1993-08-05
申请号：PCT/US1993000791
申请日：1993-01-28
申请人： ORBOT SYSTEMS LTD. , ORBOTECH INC. , SMILANSKY, Zeev , NISSIM, Moshe , HAREL, Eyal
发明人： ORBOT SYSTEMS LTD. , ORBOTECH INC.
IPC分类号： G06K09/00
CPC分类号： G06K9/6203 , G01N21/8851 , G01N21/95607 , G01N2021/95615 , H04N7/18
摘要： A method of inspecting an article (1) with respect to a stored list of reference features (6) by scanning the article to detect online features (5), transforming their coordinates according to registration transformation parameters to correct for misregistration of the article, and comparing (7) the transformed coordinates of the online features with those of the stored reference features for matches. According to this method, an initial estimate of the required registration transformation parameters is provided and is dynamically improved by continuously computing and periodically updating the estimate from the coordinates of the online features detected during the scanning of the article (1) and the coordinates of the stored reference features (6).
摘要翻译：一种通过扫描物品来检测在线特征（5），根据登记变换参数变换其坐标来校正物品的重合不足的方法，通过扫描物品来检查物品（1）相对于参考特征（6）的存储的列表，以及将（7）在线特征的变换坐标与存储的参考特征的坐标进行比较。根据该方法，提供所需注册变换参数的初始估计，并且通过连续地计算并周期性地从在文章（1）的扫描期间检测到的在线特征的坐标和存储参考特征（6）。

5. 发明申请

WO9209880A3 METHOD AND APPARATUS FOR AUTOMATIC OPTICAL INSPECTION 审中-公开
标题翻译：自动光学检测方法与装置
公开(公告)号：WO9209880A3
公开(公告)日：1992-08-20
申请号：PCT/US9108746
申请日：1991-11-25
申请人： ORBOT SYSTEMS LTD , ORBOT INC
发明人： FINAROV MOSHE
IPC分类号： G01B11/06 , G01J4/00 , G01N21/21 , G01N21/41 , G01N21/55 , G01N21/84 , G01N21/88 , G01N21/95 , G01N21/956
CPC分类号： G01N21/88 , G01B11/0641 , G01J4/00 , G01N21/211 , G01N21/41 , G01N21/8422 , G01N2021/9513 , G01N2021/95638
摘要： An inspection system for providing high contrast images of two materials of an article (12) to be inspected is disclosed. Light with variable spectral range and large angular coverage (2α) is passed from the source (61) through a polarizer (65), reflects from or is transmitted through the article (12) to be inspected, passes through an analyzer (73) and is detected by a sensor (72). A phase compensator (66, 74) is disposed either between the polarizer and (65) and the article (12) or the article (12) and the analyzer (73). Two of the three polarization optical components, that is, the polarizer (65), the compensator (66, 74) and the analyzer (73), are separately adjusted until the maximum contrast is found in the image. This enables high contrast imaging of surfaces of objects of similar optical reflectivity, (such as surfaces consisting of two similar specular materials, or surfaces partly covered with transparent films) which cannot be imaged using normal reflective image forming techniques. The system of the invention can also be operated to measure the thickness or refractive index of transparent thin films.

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