专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US10917960B2 Deposition apparatus 有权
公开(公告)号：US10917960B2
公开(公告)日：2021-02-09
申请号：US15395200
申请日：2016-12-30
申请人： CANON ANELVA CORPORATION
发明人： Masahiro Atsumi , Hidekazu Nishimura , Masahiro Shibamoto , Hiroshi Yakushiji
IPC分类号： H01J37/32 , H05H1/10 , C23C14/06 , C23C14/32 , C23C14/56 , C23C16/458 , C23C16/50 , H05H1/48
摘要： A deposition apparatus includes a plasma generator for generating a plasma by arc discharge, and a deposition unit for forming a film on a member by the plasma generated by the plasma generator. The plasma generator includes a target holder for holding a target and applying a negative potential to the target, an anode to which a positive potential is applied, and a capture for capturing droplets from the target. The anode has an opening, and the capture is arranged in the opening.

2. 发明授权

US10418170B2 Systems and methods for reducing undesired eddy currents 有权
公开(公告)号：US10418170B2
公开(公告)日：2019-09-17
申请号：US15808803
申请日：2017-11-09
申请人： TAE TECHNOLOGIES, INC.
发明人： Nikolaus Rath
IPC分类号： H01F27/34 , G21B1/05 , H05H1/10
摘要： Systems and methods to reduce the amplitude of undesirable eddy currents in conducting structures, e.g., induced by the translation of an FRC into a confinement chamber, while leaving beneficial eddy currents unaffected. This is achieved by inducing opposing currents in the same conducting structures prior to plasma translation into the confinement chamber.

3. 发明申请

US20180323007A1 SYSTEMS AND METHODS FOR REDUCING UNDESIRED EDDY CURRENTS 审中-公开
公开(公告)号：US20180323007A1
公开(公告)日：2018-11-08
申请号：US15808803
申请日：2017-11-09
申请人： TAE TECHNOLOGIES, INC.
发明人： Nikolaus Rath
IPC分类号： H01F27/34 , H05H1/10
CPC分类号： H01F27/34 , G21B1/052 , H01F2027/348 , H05H1/10 , Y02E30/122
摘要： Systems and methods to reduce the amplitude of undesirable eddy currents in conducting structures, e.g., induced by the translation of an FRC into a confinement chamber, while leaving beneficial eddy currents unaffected. This is achieved by inducing opposing currents in the same conducting structures prior to plasma translation into the confinement chamber.

4. 发明申请

US20160276044A1 SYSTEMS AND METHODS FOR FORMING AND MAINTAINING A HIGH PERFORMANCE FRC 审中-公开
标题翻译：用于形成和维护高性能FRC的系统和方法
公开(公告)号：US20160276044A1
公开(公告)日：2016-09-22
申请号：US15078918
申请日：2016-03-23
申请人： TRI ALPHA ENERGY, INC.
发明人： Michel Tuszewski , Michl W. Binderbauer , Dan Barnes , Eusebio Garate , Houyang Guo , Sergei Putvinski , Artem N. Smirnov
IPC分类号： G21B1/05 , G21B1/15 , H05H1/10
CPC分类号： G21B1/052 , G21B1/15 , H05H1/10 , Y02E30/122 , Y02E30/16
摘要： A high performance field reversed configuration (FRC) system includes a central confinement vessel, two diametrically opposed reversed-field-theta-pinch formation sections coupled to the vessel, and two divertor chambers coupled to the formation sections. A magnetic system includes quasi-dc coils axially positioned along the FRC system components, quasi-dc mirror coils between the confinement chamber and the formation sections, and mirror plugs between the formation sections and the divertors. The formation sections include modular pulsed power formation systems enabling static and dynamic formation and acceleration of the FRCs. The FRC system further includes neutral atom beam injectors, pellet injectors, gettering systems, axial plasma guns and flux surface biasing electrodes. The beam injectors are preferably angled toward the midplane of the chamber. In operation, FRC plasma parameters including plasma thermal energy, total particle numbers, radius and trapped magnetic flux, are sustainable at or about a constant value without decay during neutral beam injection.
摘要翻译：高性能场反向配置（FRC）系统包括中央限制容器，耦合到容器的两个直径相对的反向场-θ夹紧形成部分和耦合到形成部分的两个偏滤器室。磁性系统包括沿着FRC系统部件轴向定位的准直流线圈，在限制室和形成部分之间的准直流镜面线圈，以及形成部分和偏滤器之间的镜塞。形成部分包括使得FRC能够静态和动态形成和加速的模块化脉冲动力形成系统。 FRC系统还包括中性原子束注射器，丸粒注射器，吸气系统，轴向等离子体枪和通量表面偏置电极。梁喷射器优选地朝向腔室的中平面成角度。在操作中，FRC等离子体参数包括等离子体热能，总粒子数，半径和被捕获的磁通量，在中性束注入期间可以恒定值或约为恒定值，而不衰减。

5. 发明申请

US20110305847A1 LINEAR PLASMA SYSTEM 有权
标题翻译：线性等离子体系
公开(公告)号：US20110305847A1
公开(公告)日：2011-12-15
申请号：US13161317
申请日：2011-06-15
申请人： Quanyuan T. Shang
发明人： Quanyuan T. Shang
IPC分类号： C23C16/509 , H05H1/24 , H05H1/10 , H01L21/3065
CPC分类号： H05H1/46 , C23C16/45574 , C23C16/505 , C23C16/545 , H01J37/3244 , H01J37/32541 , H01J37/32669 , H05H2001/466 , H05H2001/483 , H05H2001/488
摘要： The invention relates to a linear plasma system. The linear plasma system includes a number of troughs of an electrode alternating with a number of peaks of the electrode forming a sawtooth shape, a reactive gas feed, a precursor gas feed, and a power source. The reactive gas feed is disposed on the electrode and configured to continuously release a reactive gas into an array of holes located at the trough apex. The precursor gas feed is disposed on the electrode and configured to continuously release a precursor gas into an array of holes located at the peak apex. The power source is configured to apply radio frequency power to the electrode to simultaneously interact with the reactive gas mixed with the precursor gas to generate plasma, which is used to create a product that is deposited on a substrate.
摘要翻译：本发明涉及一种线性等离子体系统。线性等离子体系统包括多个电极沟槽，其与形成锯齿形状的电极的多个峰交替，反应气体进料，前体气体进料和电源。反应性气体进料设置在电极上并被构造成将反应性气体连续地释放到位于槽顶部的孔阵列中。前体气体进料设置在电极上并被构造成将前体气体连续释放到位于峰顶点处的孔阵列中。电源被配置为向电极施加射频功率以与混合有前体气体的反应气体同时相互作用，以产生用于产生沉积在衬底上的产品的等离子体。

6. 发明授权

US4618470A Magnetic confinement nuclear energy generator 失效
标题翻译：磁约束核能发电机
公开(公告)号：US4618470A
公开(公告)日：1986-10-21
申请号：US445934
申请日：1982-12-01
申请人： Winfield W. Salisbury
发明人： Winfield W. Salisbury
IPC分类号： H05H1/10 , H05H1/18 , G21B1/00
CPC分类号： H05H1/18 , H05H1/10 , Y02E30/126
摘要： A fusion reactor (10) includes a sphere (12). Structure (20) is disposed within the interior of the sphere (12) for producing a magnetic field. Structure (24, 26) is circumferentially disposed around the exterior of the sphere (12) for producing a countermagnetic field. Structure (28, 32, 38, 46a) is provided for injecting a gas containing fusible ions into the sphere (12). Structure (30, 32, 38, 46) is also provided for heating the gas within the interior of the sphere (12). Structure (62, 64, 66, 68) is provided for extracting heat from the sphere (12).
摘要翻译：聚变反应器（10）包括球体（12）。结构（20）设置在球体（12）的内部以产生磁场。结构（24,26）周向地设置在球体（12）的外部周围，用于产生反磁场。提供结构（28,32,38,46a），用于将含有可熔离子的气体注入到球体（12）中。还提供了结构（30,32,38,46），用于加热球体（12）内部的气体。提供用于从球体（12）提取热量的结构（62,64,66,68）。

7. 发明授权

US4354999A Plasma confinement 失效
标题翻译：等离子体约束
公开(公告)号：US4354999A
公开(公告)日：1982-10-19
申请号：US77996
申请日：1979-09-24
申请人： Robert V. Priest
发明人： Robert V. Priest
IPC分类号： H05H1/10 , G21B1/00
CPC分类号： H05H1/10 , Y02E30/126
摘要： An Atomic Fusion Device wherein a laser beam is focused to the center of a spherical reaction chamber having a mirrored inner surface. The spherical reaction chamber is evacuated and surrounded by a concentric lithium jacket which is surrounded by a concentric cryogenic jacket in which is immersed a multiaxis Ioffe bar system. A mixture of deuterium and tritium plasma is continuously introduced into the reaction chamber at a metered rate through the preheat units and compressed at the center of the chamber by the electromagnetic field created by the superconductive Ioffe bar system. This mixture is ignited by the laser beam to create a steady-state, self-sustaining lithium blanket. Power is controlled by controlling the plasma input rate and energy is coupled out of the device by electromagnetic coupling or by recirculating the lithium through a heat exchanger.
摘要翻译：原子融合装置，其中激光束聚焦到具有镜像内表面的球形反应室的中心。将球形反应室抽真空并被同心的锂护套包围，同心的锂护套被同心式的低温夹套围绕，其中浸入多轴Ioffe bar系统。氘和氚等离子体的混合物通过预热单元以计量的速率连续地引入反应室，并通过超导Ioffe bar系统产生的电磁场在室的中心被压缩。该混合物被激光束点燃以产生稳态的自持式锂弹垫。通过控制等离子体输入速率来控制功率，并且通过电磁耦合将能量耦合到设备外部，或者通过热交换器再循环锂。

8. 发明授权

US4048436A Heat treating 失效
标题翻译：热处理
公开(公告)号：US4048436A
公开(公告)日：1977-09-13
申请号：US619087
申请日：1975-10-02
申请人： Susumu Hiratake , Mitsuhiro Matsui
发明人： Susumu Hiratake , Mitsuhiro Matsui
IPC分类号： B23K10/00 , H05B7/00 , H05H1/26 , H05H1/40 , H05H1/10
CPC分类号： H05H1/26 , B23K10/00 , H05B7/00 , H05H1/40
摘要： A heat treating apparatus including a crucible to contain molten metal, at least one plasma ejecting nozzle which is constructed so as to generate a plasma jet and is secured with respect to the crucible around the central axis of it and a magnetic field generating means to generate a magnetic field interacting with the plasma jet and deflecting it.
摘要翻译：一种热处理装置，包括：坩埚，用于容纳熔融金属;至少一个等离子体喷射喷嘴，其构造成产生等离子体射流，并相对于坩埚围绕其中心轴线固定;以及磁场产生装置，与等离子体射流相互作用并使其偏转的磁场。

9. 发明授权

US3568116A Process and apparatus for transferring energy to an electrically conductive medium 失效
标题翻译：将能量转移到电导体介质的过程和装置
公开(公告)号：US3568116A
公开(公告)日：1971-03-02
申请号：US3568116D
申请日：1967-09-06
申请人： COMMISSARIAT ENERGIE ATOMIQUE
发明人： SOLE JEAN
IPC分类号： H01F6/00 , H01F6/02 , H01L39/20 , H01S3/093 , H05H1/10 , H05H1/24 , H01F1/08 , H01F7/22 , H01S3/09
CPC分类号： H05H1/10 , H01F6/005 , H01F6/02 , H01L39/20 , H01S3/093 , Y02E30/126 , Y10S505/88
摘要： A process and apparatus for transferring energy to an electrically conductive medium. The conductive medium is disposed in an inner chamber which is surrounded by an annular chamber having walls internally covered with a layer adapted to have superconductive properties. According to the present disclosure the layer is brought to a state of superconductivity producing a current density in the superconducting layer, said trapped current across the superconducting layers producing a magnetic field in the annular chamber which corresponds to a given energy and transferring this energy into the electrically conductive medium in the inner chamber by causing the transition of said layers from the superconductive state to the normal state.

10. 发明授权

US3116209A Method for exchanging energy with a plasma by magnetic punping 失效
标题翻译：通过磁力冲击与等离子体交换能量的方法
公开(公告)号：US3116209A
公开(公告)日：1963-12-31
申请号：US17492562
申请日：1962-02-21
申请人： HALL LAURENCE S
发明人： HALL LAURENCE S
IPC分类号： H05H1/10
CPC分类号： H05H1/105

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式