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    • 7. 发明授权
    • Laser sustained plasma light source with electrically induced gas flow
    • 具有电致气流的激光持续等离子体光源
    • US09390892B2
    • 2016-07-12
    • US13924608
    • 2013-06-23
    • KLA-Tencor Corporation
    • Anatoly ShchemelininIlya Bezel
    • H01J7/24H05B31/26H01J37/32H01J61/04H01J61/12H01J61/14H01J61/16H01J61/20H01J61/28H01J65/04
    • H01J37/32055H01J61/04H01J61/125H01J61/14H01J61/16H01J61/20H01J61/28H01J65/04
    • A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb. Charged particles are introduced into the working gas of the plasma bulb. An arrangement of electrodes maintained at different voltage levels drive the charged particles through the working gas. The movement of the charged particles within the working gas causes the working gas to flow in the direction of movement of the charged particles by entrainment. The resulting working gas flow increases convection around the plasma and increases laser to plasma interaction. The working gas flow within the plasma bulb can be stabilized and controlled by control of the voltages present on the each of the electrodes. A more stable flow of working gas through the plasma contributes to a more stable plasma shape and position within the plasma bulb.
    • 激光持续等离子体光源包括等离子体灯泡,其包含由等离子体灯泡内的电流驱动的工作气体流。 带电粒子被引入等离子体灯泡的工作气体中。 维持在不同电压水平的电极布置驱动带电粒子通过工作气体。 带电粒子在工作气体内的移动导致工作气体通过夹带在带电粒子的运动方向上流动。 所产生的工作气体流量增加等离子体周围的对流并且增加激光到等离子体相互作用。 可以通过控制存在于每个电极上的电压来稳定和控制等离子体灯泡内的工作气体流。 通过等离子体的工作气体的更稳定的流动有助于在等离子体灯泡内更稳定的等离子体形状和位置。