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    • 1. 发明授权
    • Laser machining apparatus with switchable laser system and laser machining method
    • 具有可切换激光系统和激光加工方法的激光加工设备
    • US08916798B2
    • 2014-12-23
    • US13372546
    • 2012-02-14
    • Christoph Plüss
    • Christoph Plüss
    • B23K26/36B23K26/42B23K26/06B23P25/00B23K26/30B23K26/38B23K26/08
    • B23P25/006B23K26/0624B23K26/083B23K26/0853B23K26/0861B23K26/0884B23K26/36B23K26/361B23K26/38B23K26/70
    • A laser machining apparatus and method for producing from a workpiece a rotating cutting tool having a cutting edge and a flank. The laser machining apparatus works in two different operating modes. In the first operating mode, a first laser head is used for machining the workpiece at high advance speeds of the workpiece relative to the first laser head to form a rough desired contour with pulses having a duration in the nanosecond range resulting in laser melt cutting. Subsequently, the laser machining apparatus is operated in the second operating mode generating laser pulses with having a pulse duration in the picosecond range. In the second operating mode, a second laser head is activated by means of an optical scanner system and directs the laser pulses onto a two-dimensional pulse area on the surface of the workpiece, the material removal is accomplished by laser ablation.
    • 一种用于从工件生产具有切割边缘和侧面的旋转切削工具的激光加工设备和方法。 激光加工设备有两种不同的工作模式。 在第一操作模式中,第一激光头用于以相对于第一激光头的工件的高进给速度加工工件,以形成具有在纳秒范围内的持续时间的脉冲的粗略期望轮廓,从而导致激光熔融切割。 随后,激光加工装置在第二工作模式下工作,产生脉冲持续时间在皮秒范围内的激光脉冲。 在第二操作模式中,第二激光头通过光学扫描器系统激活,并将激光脉冲引导到工件表面上的二维脉冲区域上,通过激光烧蚀实现材料去除。
    • 3. 发明申请
    • WORKPIECE DIVIDING METHOD
    • 工作分歧方法
    • US20130298744A1
    • 2013-11-14
    • US13871125
    • 2013-04-26
    • DISCO CORPORATION
    • Satoshi KUMAZAWA
    • B26D9/00B23K26/42B23K26/36
    • B26D9/00B23K26/0093B23K26/364B23K26/40B23K26/60B23K2103/50H01L33/0095Y10T83/0215
    • A workpiece dividing method for dividing a platelike workpiece into a plurality of individual chips. The workpiece dividing method includes a workpiece preparing step of preparing the platelike workpiece, at least one side of the workpiece being formed as a mat surface, a holding step of holding the workpiece on a holding surface of a chuck table in the condition where the mat surface of the workpiece is exposed, a cut groove forming step of cutting the mat surface of the workpiece held on the holding surface of the chuck table by using a cutting blade to thereby form a cut groove with a remaining portion, and a laser cutting step of applying a laser beam to the workpiece along the cut groove to thereby cut the remaining portion.
    • 一种用于将板状工件分割成多个单独芯片的工件分割方法。 工件分割方法包括:制备板状工件的工件准备步骤,工件的至少一侧形成为垫表面;保持工序,其将工件保持在卡盘的保持面上, 露出工件的表面,切割槽形成步骤,通过使用切割刀片来切割保持在卡盘的保持表面上的工件的垫表面,从而形成具有剩余部分的切割槽,以及激光切割步骤 沿着切割槽将激光束施加到工件,从而切割剩余部分。
    • 5. 发明授权
    • Machining information supply equipment and supply system
    • 加工信息供应设备和供应系统
    • US08436273B2
    • 2013-05-07
    • US12669230
    • 2008-07-04
    • Takeshi Sakamoto
    • Takeshi Sakamoto
    • B23K26/04B23K26/42G06F19/00
    • B23K26/38B23K26/40B23K2103/50G05B2219/45031G05B2219/45041G05B2219/49104
    • A processing information supply apparatus 10 is prepared for a laser processing apparatus for forming a modified region, which becomes a starting point of cutting, along a line to cut within an object to be processed by irradiating the object with laser light while locating a light-converging point within the object. The processing information supply apparatus 10 includes an object information input unit 12 for inputting processing object information on the object to be processed, a processing condition database 19 in which data on processing conditions corresponding to the processing object information is accumulated, a processing condition setting unit 16 for referring to the processing condition data in the database 19 and setting the processing condition for the object based on the processing object information, and a condition information output unit 13 for outputting processing condition information for the set processing condition. Thus, the processing information supply apparatus and the supply system capable of favorably acquiring the processing information applied to the laser processing apparatus at a processing worker side are realized.
    • 准备处理信息提供装置10,用于激光处理装置,用于通过用激光照射物体,沿着待切割的物体中的切割线切割成为切割的起始点,形成改变区域, 对象内的收敛点。 处理信息提供装置10包括用于输入关于待处理对象的处理对象信息的对象信息输入单元12,其中累积与处理对象信息相对应的处理条件的数据的处理条件数据库19,处理条件设置单元 用于参照数据库19中的处理条件数据和基于处理对象信息设置对象的处理条件的条件信息输出单元13以及用于输出处理条件信息的条件信息输出单元13。 因此,可以实现能够有利地获取在处理工作者侧应用于激光加工装置的处理信息的处理信息提供装置和供给系统。
    • 7. 发明授权
    • Method for stablizing an output of a pulsed laser system using pulse shaping
    • 使用脉冲整形来稳定脉冲激光系统的输出的方法
    • US08263903B2
    • 2012-09-11
    • US12782458
    • 2010-05-18
    • Pascal DeladurantayeLouis DesbiensYves TaillonDany LemieuxBrian W. Baird
    • Pascal DeladurantayeLouis DesbiensYves TaillonDany LemieuxBrian W. Baird
    • B23K26/42B23K26/06B23K26/073
    • H01S5/06835H01S3/06758H01S3/094003H01S5/0057H01S5/0428
    • A method for stabilizing an output of a pulsed laser system includes a directly modulated laser diode by mitigating the effect of switching transients on the temporal shape of the outputted pulses. The method includes controlling a pulse shaping signal to define, over time, processing and conditioning periods. During the processing periods, the pulse shaping signal has an amplitude profile tailored to produce the desired temporal shape of the output. Each conditioning period either immediately precedes or follows a processing period. During a given processing period, the amplitude profile of the pulse shaping signal is tailored so that the drive current of the laser diode is lower than its maximum value during the corresponding processing period, and is of the same order of magnitude as the laser threshold current of the laser diode. In this manner, the stability of the output during the corresponding processing period is improved.
    • 用于稳定脉冲激光系统的输出的方法包括通过减轻对输出脉冲的时间形状的切换瞬变的影响的直接调制的激光二极管。 该方法包括控制脉冲整形信号以定义时间上的处理和调节周期。 在处理周期期间,脉冲整形信号具有调整的幅度分布,以产生输出的期望时间形状。 每个调理期间紧接在处理期之前或之后。 在给定的处理周期期间,调整脉冲整形信号的幅度分布,使得激光二极管的驱动电流在相应的处理周期内低于其最大值,并且与激光阈值电流具有相同的数量级 的激光二极管。 以这种方式,提高了在相应处理期间输出的稳定性。