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    • 3. 发明授权
    • Micromachined circuit elements driven by micromachined DC-to-DC
converter on a common substrate
    • 由微加工的DC-DC转换器在公共基板上驱动的微加工电路元件
    • US6058027A
    • 2000-05-02
    • US251103
    • 1999-02-16
    • Douglas A. VarghaSean S. Cahill
    • Douglas A. VarghaSean S. Cahill
    • B81B3/00H01H59/00H02M3/38H02M3/42
    • H02M3/38H02M3/44H01H59/0009
    • The present invention comprises the combination of one or more micromachined circuit elements and a micromachined DC-to-DC step-up converter on the same or different substrates, so as to allow the operation of the micromachined circuit element at a different voltage, typically a higher or a negative voltage, in comparison to the input power supply to the system. The micromachined structure of such a converter requires little chip area and is normally fully compatible with the micromachined structure of other micromachined circuit elements, such switches and resonators, providing obvious advantages when formed on the same substrate as such devices. Similarly, micromachined switches have the advantage of providing substantially greater isolation between the signal being switched and the signal doing the switching, and provide a much better ratio between the off resistance to the on resistance than can be achieved with transistor switching devices, such as by way of example, MOS switches. Micromachined resonators also offer many advantages, such as an equivalent of tuned circuits with very high Q factor, and do so without requiring inductors or active devices in oscillatory circuits having a risk of instability, and of allowing the realization of the equivalent of complicated tuned circuits in a small chip area.
    • 本发明包括在相同或不同的衬底上组合一个或多个微加工电路元件和微机械加工的DC-DC升压转换器,以便允许微加工电路元件的操作在不同的电压,通常为 与系统的输入电源相比较高或负电压。 这种转换器的微加工结构需要很少的芯片面积,并且通常完全与其它微加工电路元件(例如开关和谐振器)的微加工结构完全兼容,当与这种器件形成在相同的衬底上时,提供了明显的优点。 类似地,微加工开关具有在被切换的信号和进行切换的信号之间提供显着更大的隔离的优点,并且提供比可以用晶体管开关器件实现的关断电阻与导通电阻之间更好的比例,例如通过 例子,MOS开关。 微加工谐振器还具有许多优点,例如等效于具有非常高Q因子的调谐电路,并且不需要在具有不稳定性的风险的振荡电路中的电感器或有源器件,并且允许实现等效于复杂调谐电路 在一个小芯片领域。