专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06898831B2 Method of producing a surface acoustic wave device 失效
标题翻译：制造表面声波装置的方法
公开(公告)号：US06898831B2
公开(公告)日：2005-05-31
申请号：US10235566
申请日：2002-09-06
申请人： Takashi Iwamoto
发明人： Takashi Iwamoto
IPC分类号： H03H9/145 , H03H3/08 , H03H9/02 , H03H9/25 , H04R17/00 , H01L4/04 , H01L4/08 , H01L4/18
CPC分类号： H03H9/14541 , Y10T29/42 , Y10T29/49005 , Y10T29/49128 , Y10T29/49789 , Y10T29/49798
摘要： A surface acoustic wave device includes interdigital transducer (IDT) electrode and reflectors disposed on a piezoelectric substrate. Each of the IDT electrode and the reflectors has a multi-layer film structure including at least one layer (high specific gravity metal component containing layer) including as a major component a metal with a specific gravity of at least about 15 and having a film-thickness of at least about 10 nm, and at least one layer (low specific gravity metal component containing layer) including as a major component a metal with a specific gravity of up to about 10 and a volume resistivity as a bulk value (at about 20° C.) of up to about 10×10−8 Ω·m, and having a film-thickness of at least about 10 nm. For example, the multi-layer structure includes an Ni film (low specific gravity metal component containing layer) with a film-thickness of about 150 nm disposed on a Ti film, a Cu film (low specific gravity metal component containing layer) with a film-thickness of about 250 nm disposed on the Ni film, and an Au film (high specific gravity metal component containing layer) with a film-thickness of about 50 nm disposed on the Cu film.
摘要翻译：表面声波装置包括叉指式换能器（IDT）电极和设置在压电基板上的反射器。 IDT电极和反射器中的每一个具有多层膜结构，其包括至少一层（高比重金属成分含有层），其包含作为主要成分的比重为至少约15的金属，并且具有膜 - 至少约10nm的厚度和至少一层（低比重金属成分含有层），其包含比重高达约10的金属作为主要成分，体积电阻率为体积值（约为20） ℃），高达约10×10 -8Ω·m，并且具有至少约10nm的膜厚度。例如，多层结构包括设置在Ti膜上的膜厚约150nm的Ni膜（低比重金属成分含有层），Cu膜（低比重金属成分含有层），具有设置在Ni膜上的约250nm的膜厚度和设置在Cu膜上的膜厚度为约50nm的Au膜（高比重金属成分含有层）。

2. 发明授权

US06922879B2 Method of manufacturing an acceleration sensor 失效
标题翻译：制造加速度传感器的方法
公开(公告)号：US06922879B2
公开(公告)日：2005-08-02
申请号：US10694513
申请日：2003-10-27
申请人： Mitsugu Ogiura
发明人： Mitsugu Ogiura
IPC分类号： G01P15/09 , H01L41/08 , H01L41/22 , H01L41/257 , H01L41/293 , H01L41/297 , H04R17/00 , H01L4/04 , H01L4/08 , H01L4/18 , H01L2/00
CPC分类号： G01P15/0922 , Y10T29/42 , Y10T29/49004 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/49156 , Y10T29/49789 , Y10T29/49798
摘要： An acceleration sensor includes a piezoelectric element and support frames for supporting the ends of the piezoelectric element in the longitudinal direction. The piezoelectric element is formed by stacking an even number of piezoelectric layers greater than or equal to four layers. Electrodes are provided in between the layers and on the front and back faces of the piezoelectric element. The interlayer electrodes including a segmented electrode and lead electrodes are alternately stacked with the piezoelectric layers therebetween. The interlayer electrode in the middle in the thickness direction is a segmented electrode. The piezoelectric layers are polarized in the thickness direction so that charge having the same polarity is extracted from the electrodes when the acceleration is applied. Also, the center portion and both end portions of each piezoelectric layer are polarized in opposite directions.
摘要翻译：加速度传感器包括压电元件和用于在纵向方向上支撑压电元件的端部的支撑框架。压电元件通过层叠大于或等于四层的偶数个压电层而形成。电极设置在层之间以及压电元件的正面和背面上。包括分段电极和引线电极的层间电极与它们之间的压电层交替堆叠。厚度方向中间的层间电极是分段电极。压电层在厚度方向上极化，使得当施加加速度时，从电极中提取具有相同极性的电荷。此外，每个压电层的中心部分和两个端部部分在相反的方向上极化。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式