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1. 发明授权

US6103452A Photosensitive composition and calcined pattern obtained by use thereof 失效
标题翻译：通过使用它们获得的感光组合物和煅烧图案
公开(公告)号：US6103452A
公开(公告)日：2000-08-15
申请号：US256999
申请日：1999-02-25
申请人： Masahisa Kakinuma , Ooki Tomobe , Kouichi Takagi
发明人： Masahisa Kakinuma , Ooki Tomobe , Kouichi Takagi
IPC分类号： H01J9/20 , C08F2/48 , C08F290/12 , C08F299/00 , C09D4/00 , C09D5/00 , C09D5/22 , C09D5/24 , G03F7/00 , G03F7/004 , G03F7/038 , H01B1/22 , H01B3/00 , H01B3/08 , H01J9/227 , G03F7/033 , G08K2/46
CPC分类号： G03F7/0007 , G03F7/0388
摘要： Disclosed are a photosensitive composition which is developable with an aqueous alkaline solution and such calcined patterns as a conductor pattern, a vitreous dielectric pattern, and a fluorescent pattern which are obtained by the use of the photosensitive composition. The photosensitive composition comprises (A) a carboxyl group-containing photosensitive polymer obtained by the reaction of a copolymer of (a) an unsaturated double bond-containing acid anhydride and (b) an unsaturated double bond-containing compound with (c) a compound containing a hydroxyl group and an unsaturated double bond, (B) a diluent, (C) a photopolymerization initiator, (D) an inorganic powder, and (E) a stabilizer. The composition may be in the form of paste or in the form of a dry film. When the photosensitive composition is in the form of paste, the paste is applied to a substrate and then dried to form a film. When the photosensitive composition is in the form of a dry film, the film is laminated on the substrate. A calcined pattern of high fineness is obtained by patterning the superposed layer of the composition by selective exposure to light and development, and thereafter calcining the patterned film.
摘要翻译：公开了一种可用碱性水溶液显影的光敏组合物，以及通过使用光敏组合物获得的诸如导体图案，玻璃状电介质图案和荧光图案的煅烧图案。感光性组合物包含（A）通过（a）含不饱和双键的酸酐和（b）不饱和双键的化合物的共聚物与（c）化合物（c）的共聚物反应得到的含羧基的感光性聚合物含有羟基和不饱和双键，（B）稀释剂，（C）光聚合引发剂，（D）无机粉末和（E）稳定剂。组合物可以是糊状或干膜形式。当感光性组合物为糊状时，将糊状物施加到基材上，然后干燥以形成膜。当感光组合物为干膜的形式时，将膜层压在基材上。通过选择性地暴露于光和显影，然后对图案化膜进行煅烧来图案化组合物的叠层来获得高细度的煅烧图案。

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