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    • 2. 发明授权
    • Voltage instability predictor (VIP)—method and system for performing adaptive control to improve voltage stability in power systems
    • 电压不稳定性预测器(VIP) - 用于执行自适应控制以改善电力系统中的电压稳定性的方法和系统
    • US06219591B1
    • 2001-04-17
    • US09079983
    • 1998-05-15
    • Khoi Tien VuDamir Novosel
    • Khoi Tien VuDamir Novosel
    • G05D500
    • G01R31/085H02J3/24
    • A Voltage Instability Predictor (VIP) estimates the proximity of a power system to voltage collapse in real time. The VIP can be implemented in a microprocessor-based relay whose settings are changed adaptively to reflect system changes. Only local measurements (voltage and current) at the bus terminal are required. Contrary to the most common strategy to maintain voltage stability, which is to shed blocks of load when the voltage drops below a certain fixed threshold, which threshold is difficult to select since voltage magnitudes are a poor indicator of how close the system is to a collapse, the inventive VIP detects this proximity to collapse by monitoring the relationship between the apparent impedance {overscore (Z)}app and the Thevenin-impedance circle.
    • 电压不稳定性预测器(VIP)估计电力系统与电压崩溃的实时接近。 VIP可以在基于微处理器的继电器中实现,其设置自适应地改变以反映系统变化。 只需要总线端子的局部测量(电压和电流)。 与维持电压稳定性最常见的策略相反,当电压下降到一定的固定阈值以下时,这是阻止负载的块,因为电压幅度是系统接近崩溃的一个很差的指标 ,本发明的VIP通过监视视在阻抗(过滤(Z)} app和戴维南 - 阻抗圈之间的关系来检测这种接近于崩溃。
    • 3. 发明授权
    • Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control
    • 用于形成具有增强的临界尺寸(CD)控制的图案层的等离子体蚀刻方法
    • US06350390B1
    • 2002-02-26
    • US09507808
    • 2000-02-22
    • Chi Kang LiuChang Jen ShiehPei Hung Chen
    • Chi Kang LiuChang Jen ShiehPei Hung Chen
    • G05D500
    • G05D5/03H01L21/31144H01L21/32139
    • A feed forward method for forming within a microelectronic fabrication a patterned target layer with controlled critical dimension (CD) first provides a substrate having formed thereover a blanket target layer, in turn having formed thereover a blanket anti-reflective coating (ARC) layer, in turn having formed thereover a paltered photoresist layer. There is then established a correlation which describes an interrelation between the patterned photoresist layer linewidth and a plasma species concentration within a plasma for forming from the blanket anti-reflective coating (ARC) layer a patterned anti-reflective coating (ARC) layer such that a patterned target layer subsequently formed from the blanket target layer is formed with a patterned target layer measured linewidth closer to a patterned target layer target linewidth The linewidth of the patterned photoresist layer is then measured and there is determined a deviation of the patterned photoresist measured linewidth from a patterned photoresist layer target linewidth. The plasma species concentration is then adjusted when etching the blanket anti-reflective coating (ARC) layer to form the patterned anti-reflective coating (ARC) layer such that the patterned target layer may be formed with the patterned target layer measured linewidth closer to a patterned target layer target linewidth.
    • 用于在微电子制造中形成具有受控临界尺寸(CD)的图案化目标层的前馈方法首先提供了在其上形成有覆盖目标层的基底,其又形成在覆盖层抗反射涂层(ARC)层上, 在其上形成有改变的光致抗蚀剂层。 然后建立描述图案化光致抗蚀剂层线宽和等离子体中等离子体物质浓度之间的相互关系的相关性,以从毯状抗反射涂层(ARC)层形成图案化抗反射涂层(ARC)层,使得 随后由覆盖目标层形成的图案化目标层形成有图案化目标层,测量的线宽更接近图案化目标层目标线宽图案化光致抗蚀剂层的线宽然后被测量,并且确定图案化的光致抗蚀剂测量的线宽与 图案化的光刻胶层目标线宽。 然后在蚀刻毯子抗反射涂层(ARC)层时调整等离子体物质浓度,以形成图案化抗反射涂层(ARC)层,使得图案化目标层可以形成有图案化目标层,测量的线宽更接近于 图案目标层目标线宽。
    • 4. 发明授权
    • Pressure-regulating arrangement
    • 压力调节装置
    • US06269835B1
    • 2001-08-07
    • US09503830
    • 2000-02-15
    • Christian Kochsmeier
    • Christian Kochsmeier
    • G05D500
    • F02M37/22Y10T137/2645Y10T137/8085Y10T137/87362
    • In a pressure-regulating arrangement between a pump and a load, in particular between a fuel pump and an internal combustion engine, in which, if the flow from the pump exceeds a predetermined pressure, a cutoff quantity is branched off and fed back into a storage container, according to the invention the pressure regulator (9), together with the cutoff line (14), is combined with a filter (2) in one structural unit. All three connections (feed (4), flow (7) and cutoff connection (15)) are preferably arranged on the same side of a common housing (1). In a particularly advantageous embodiment, all three connections are arranged coaxially with one another, so that if an appropriate connecting piece is used, installation faults can be ruled out.
    • 在泵和负载之间,特别是燃料泵和内燃机之间的压力调节装置中,其中如果来自泵的流量超过预定压力,则切断量被分支并反馈到 存储容器根据本发明,压力调节器(9)与截止线(14)一起在一个结构单元中与过滤器(2)组合。所有三个连接(进料(4),流动(7)和 切断连接(15))优选地布置在公共壳体(1)的同一侧上。 在特别有利的实施例中,所有三个连接部彼此同轴设置,因此如果使用适当的连接件,则可以排除安装故障。
    • 6. 发明授权
    • Applications and methods for voltage instability predictor (VIP)
    • 电压不稳定性预测器(VIP)的应用与方法
    • US06249719B1
    • 2001-06-19
    • US09333185
    • 1999-06-14
    • Khoi Tien VuDanny E. JulianJan Ove GjerdeMurari M. Saha
    • Khoi Tien VuDanny E. JulianJan Ove GjerdeMurari M. Saha
    • G05D500
    • H02J3/12H02J3/00H02J3/24H02J2003/001
    • A Voltage Instability Predictor (VIP) estimates the proximity of a power system to voltage collapse in real time. The VIP can be implemented in a microprocessor-based relay whose settings are changed adaptively to reflect system changes. Only local measurements (voltage and current) at the bus terminal are required. The VIP detects the proximity to collapse by monitoring the relationship between the apparent impedance {overscore (Z)}app and the Thévenin-impedance. In addition, we disclose: (1) that the VIP may be used in connection with non-radial topologies; (2) a new, more robust method to track voltage collapse in terms of impedance using rolling sums; and (3) a new method for representing distance to voltage collapse in terms of power margins.
    • 电压不稳定性预测器(VIP)估计电力系统与电压崩溃的实时接近。 VIP可以在基于微处理器的继电器中实现,其设置自适应地改变以反映系统变化。 只需要总线端子的局部测量(电压和电流)。 VIP通过监测视在阻抗(overscore(Z)} app和Thévenin-impedance之间的关系来检测邻近的崩溃。 此外,我们披露:(1)VIP可能与非径向拓扑结合使用; (2)使用滚动和来跟踪阻抗方面的电压崩溃的新的,更鲁棒的方法; 和(3)在功率裕度方面表示距离电压崩溃的新方法。