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    • 2. 发明授权
    • Pattern formation method and apparatus using atomic beam holography technology
    • 使用原子束全息技术的图案形成方法和装置
    • US06329105B1
    • 2001-12-11
    • US09290189
    • 1999-04-13
    • Junichi FujitaFujio Shimizu
    • Junichi FujitaFujio Shimizu
    • G03H500
    • G03H5/00H01J2237/3175
    • A pattern formation method wherein a very small pattern composed of a desired element (atoms) is formed directly on a substrate by using atomic beam hologram technology. Quantum coherent reflection of an atomic wave is utilized. A coherent atomic beam is irradiated as a material wave, for example, upon a hologram of the transmission type to modulate the atomic beam with pattern information included in the hologram. The atomic beam having passed through and diffracted by the hologram is introduced to a reflecting plane so that the atomic beam may be quantum coherent reflected by the reflecting plane, and the atomic beam thus reflected is introduced into a substrate. A binary (two-value) hologram produced by computer synthesis is used suitably as the hologram. A hologram of the potential control type may be also used.
    • 通过使用原子束全息图技术,在基板上直接形成由期望的元素(原子)构成的非常小的图案的图案形成方法。 利用原子波的量子相干反射。 相干原子束作为材料波照射,例如,在透射型的全息图上,用包含在全息图中的图案信息调制原子束。 通过全息图衍射的原子束被引入到反射平面,使得原子束可以被反射面反射的量子相干,并且将如此反射的原子束引入到衬底中。 通过计算机合成产生的二值(双值)全息图被适当地用作全息图。 也可以使用电位控制型的全息图。
    • 4. 发明授权
    • X-ray shearing interferometer
    • X射线剪切干涉仪
    • US06590954B1
    • 2003-07-08
    • US10177402
    • 2002-06-20
    • Jeffrey A. Koch
    • Jeffrey A. Koch
    • G03H500
    • G01N23/04G03H5/00
    • An x-ray interferometer for analyzing high density plasmas and optically opaque materials includes a point-like x-ray source for providing a broadband x-ray source. The x-rays are directed through a target material and then are reflected by a high-quality ellipsoidally-bent imaging crystal to a diffraction grating disposed at 1× magnification. A spherically-bent imaging crystal is employed when the x-rays that are incident on the crystal surface are normal to that surface. The diffraction grating produces multiple beams which interfere with one another to produce an interference pattern which contains information about the target. A detector is disposed at the position of the image of the target produced by the interfering beams.
    • 用于分析高密度等离子体和光学不透明材料的X射线干涉仪包括用于提供宽带x射线源的点状x射线源。 x射线被引导通过目标材料,然后被高质量的椭圆形弯曲成像晶体反射到以1x放大倍数设置的衍射光栅。 当入射到晶体表面的X射线与该表面正交时,采用球形弯曲的成像晶体。 衍射光栅产生多个彼此干涉的光束,以产生包含关于目标的信息的干涉图案。 检测器设置在由干涉光束产生的目标图像的位置。