会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Method of forming and removing resist pattern
    • 形成和去除抗蚀剂图案的方法
    • US5252433A
    • 1993-10-12
    • US667986
    • 1991-03-12
    • Hirofumi FujiokaYasuhiro YoshidaHiroyuki NakajimaHitoshi NagataShinji Kishimura
    • Hirofumi FujiokaYasuhiro YoshidaHiroyuki NakajimaHitoshi NagataShinji Kishimura
    • G03F7/038C08F30/00C08F30/04C08F30/10G03F7/039G03F7/26G03F7/42H01L21/027H01L21/30G03C5/00G03C5/16
    • G03F7/265G03F7/422
    • The present invention is directed to a method of forming and removing a resist pattern, used in a semiconductor manufacture. In a first mode of the present invention, an upper resist layer containing germanium is selectively formed on a bottom resist layer and a resist pattern is formed with the upper resist layer as a mask. In a second mode of the present invention, a resist layer formed on a substrate is selectively exposed to introduce a germanium compound into the exposed portions and the above described resist layer is subjected to an anisotropic dry etching to remove the nonexposed portions of the resist layer, whereby forming a resist pattern. Accordingly, the fine pattern can be formed on the substrate in high accuracy by the use of the above described resist pattern. In addition, in the first and the second modes of the present invention, the resist pattern is removed by the use of an acid having an oxidizing power, so that the resist pattern can be easily removed from the substrate.
    • 本发明涉及用于半导体制造中的形成和去除抗蚀剂图案的方法。 在本发明的第一模式中,在底部抗蚀剂层上选择性地形成含有锗的上抗蚀剂层,并且以上抗蚀剂层形成抗蚀剂图案作为掩模。 在本发明的第二方式中,选择性地暴露在基板上形成的抗蚀剂层,以将锗化合物引入到暴露部分中,并且对上述抗蚀剂层进行各向异性干法蚀刻以除去抗蚀剂层的未曝光部分 ,从而形成抗蚀剂图案。 因此,可以通过使用上述抗蚀剂图案以高精度在基板上形成精细图案。 此外,在本发明的第一和第二模式中,通过使用具有氧化能力的酸去除抗蚀剂图案,使得抗蚀剂图案可以容易地从基板去除。
    • 5. 发明申请
    • Metal-Containing Compositions and Method of Making Same
    • 含金属的组合物及其制备方法
    • US20080015278A1
    • 2008-01-17
    • US11792739
    • 2006-06-12
    • Mangala MalikJoseph Schwab
    • Mangala MalikJoseph Schwab
    • C08F30/04C08F30/10C08J3/28
    • C08J3/28C08F230/04
    • The present invention relates to metal-containing compositions with refractive indices of at least 1.5 comprising a metal-containing precursor unit (MU), a prepolymer unit (PU), and a catalyst or an initiator capable of inducing a combining reaction of ethylenically unsaturated functional groups of the metal-containing precursor unit and reactive functional groups of the prepolymer unit. In another embodiment, the composition comprises MU and a catalyst or initiator capable of inducing a combining reaction of the metal-containing precursor units. Both MU and PU contain additional functional groups, which may be selected to impart compatibility with each other and to produce optically clear films. The metal-containing compositions can be used to produce films or articles having a transmittance of at least 90% and index of refraction in the range of 1.5 to 1.8 in the 400-700 nm range of light and 1.5 to 2.4 in the 150-400 nm range of light.
    • 本发明涉及具有至少1.5的折射率的含金属组合物,其包含含金属的前体单元(MU),预聚物单元(PU),以及能够诱导烯属不饱和官能团的组合反应的催化剂或引发剂 含金属的前体单元的基团和预聚物单元的反应性官能团。 在另一个实施方案中,组合物包含MU和能够诱导含金属的前体单元的组合反应的催化剂或引发剂。 MU和PU都包含另外的官能团,其可以被选择以赋予彼此的相容性并产生光学透明的膜。 含金属的组合物可用于生产具有至少90%的透光率和在400-700nm光范围内的1.5至1.8范围内的折射率和在150-400中的1.5至2.4的膜或制品 nm范围的光。
    • 6. 发明授权
    • Method of forming and removing resist pattern
    • 形成和去除抗蚀剂图案的方法
    • US5426016A
    • 1995-06-20
    • US87100
    • 1993-07-07
    • Hirofumi FujiokaYasuhiro YoshidaHiroyuki NakajimaHitoshi NagataShinji Kishimura
    • Hirofumi FujiokaYasuhiro YoshidaHiroyuki NakajimaHitoshi NagataShinji Kishimura
    • G03F7/038C08F30/00C08F30/04C08F30/10G03F7/039G03F7/26G03F7/42H01L21/027H01L21/30G03C5/00
    • G03F7/265G03F7/422
    • The present invention is directed to a method of forming and removing a resist pattern, used in a semiconductor manufacture.In a first mode of the present invention, an upper resist layer containing germanium is selectively formed on a bottom resist layer and a resist pattern is formed with the upper resist layer as a mask. In a second mode of the present invention, a resist layer formed on a substrate is selectively exposed to introduce a germanium compound into the exposed portions and the above described resist layer is subjected to an anisotropic dry etching to remove the nonexposed portions of the resist layer, whereby forming a resist pattern. Accordingly, the fine pattern can be formed on the substrate in high accuracy by the use of the above described resist pattern. In addition, in the first and the second modes of the present invention, the resist pattern is removed by the use of an acid having an oxidizing power, so that the resist pattern can be easily removed from the substrate.
    • 本发明涉及用于半导体制造中的形成和去除抗蚀剂图案的方法。 在本发明的第一模式中,在底部抗蚀剂层上选择性地形成含有锗的上抗蚀剂层,并且以上抗蚀剂层形成抗蚀剂图案作为掩模。 在本发明的第二模式中,选择性地暴露形成在基板上的抗蚀剂层,以将锗化合物引入到暴露部分中,并且对上述抗蚀剂层进行各向异性干蚀刻以除去抗蚀剂层的未涂覆部分 ,从而形成抗蚀剂图案。 因此,可以通过使用上述抗蚀剂图案以高精度在基板上形成精细图案。 此外,在本发明的第一和第二模式中,通过使用具有氧化能力的酸去除抗蚀剂图案,使得抗蚀剂图案可以容易地从基板去除。