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1. 发明授权

US06548613B2 Organic anti-reflective coating polymer and preparation thereof 有权
标题翻译：有机抗反射涂层聚合物及其制备方法
公开(公告)号：US06548613B2
公开(公告)日：2003-04-15
申请号：US09747364
申请日：2000-12-22
申请人： Min-Ho Jung , Sung-Eun Hong , Jae-Chang Jung , Geun-Su Lee , Ki-Ho Baik
发明人： Min-Ho Jung , Sung-Eun Hong , Jae-Chang Jung , Geun-Su Lee , Ki-Ho Baik
IPC分类号： C08F22018
CPC分类号： C08F220/34 , G03F7/091
摘要： The present invention provides a polymer that can be used as an anti-refelctive coating (ARC) polymer, an ARC composition comprising the same, methods for producing the same, and methods for using the same. The polymer of the present invention is particularly useful in a submicrolithographic process, for example, using KrF (248 nm), ArF (193 nm), or F2 (157 nm) laser as a light source. The polymer of the present invention comprises a chromophore that is capable of absorbing light at the wavelengths used in a submicrolithographic process. Thus, the ARC of the present invention significantly reduces or prevents back reflection of light and the problem of the CD alteration caused by the diffracted and/or reflected light. The ARC of the present invention also significantly reduces or eliminates the standing wave effect and reflective notching. Therefore, the polymer of the present invention can be used to produce a stable ultrafine pattern that is suitable in manufacturing of 64 M, 256 M, 1 G, 4 G and 16 G DRAM semiconductor devices. Moreover, the ARC of the present invention significantly improves the production yield, of such semiconductor devices.
摘要翻译：本发明提供可用作抗反射涂层（ARC）聚合物的聚合物，包含其的ARC组合物，其制备方法及其使用方法。本发明的聚合物在亚微光刻工艺中特别有用，例如使用KrF（248nm），ArF（193nm）或F2（157nm）激光作为光源。本发明的聚合物包括能够吸收在亚微光刻工艺中使用的波长的光的发色团。因此，本发明的ARC显着地减少或防止了光的反射和由衍射光和/或反射光引起的CD改变的问题。本发明的ARC还显着地减少或消除驻波效应和反射性切口。因此，本发明的聚合物可用于制备适合于制造64M，256M，1G，4G和16G DRAM半导体器件的稳定超细晶格。此外，本发明的ARC显着提高了这种半导体器件的生产成本。

2. 发明授权

US06235850B1 Epoxy/acrylic terpolymer self-fixturing adhesive 有权
标题翻译：环氧/丙烯酸三元共聚物自固化粘合剂
公开(公告)号：US06235850B1
公开(公告)日：2001-05-22
申请号：US09209971
申请日：1998-12-11
申请人： Mario Alberto Perez , Ahmed Salih Abuelyaman , Ikuko Ebihara , Lani S. Kangas
发明人： Mario Alberto Perez , Ahmed Salih Abuelyaman , Ikuko Ebihara , Lani S. Kangas
IPC分类号： C08F22018
CPC分类号： C08F220/32 , C09D153/00 , C08L2666/04
摘要： A (meth)acrylate terpolymer is provided comprising 1-30% of total terpolymer weight epoxy-functional (meth)acrylate monomer units, 1-98% of total terpolymer weight tackifier (meth)acrylate monomer units, and 1-98% of total terpolymer weight compatibilizing (meth)acrylate monomer units, wherein said compatibilizing (meth)acrylate monomer unit is a (meth)acrylic ester derived from an aromatic alcohol containing 6-14 carbon atoms. Also provided are self-fixturing adhesive compositions comprising the acrylate terpolymer of the present invention and methods of their use.
摘要翻译：提供（甲基）丙烯酸酯三元共聚物，其包含1-30％的三元共聚物重量环氧官能的（甲基）丙烯酸酯单体单元，1-98％的总三元共聚物增粘剂（甲基）丙烯酸酯单体单元，和1-98％三元共聚物相容性（甲基）丙烯酸酯单体单元，其中所述相容化（甲基）丙烯酸酯单体单元是衍生自含有6-14个碳原子的芳族醇的（甲基）丙烯酸酯。还提供了包含本发明的丙烯酸酯三元共聚物及其使用方法的自固化粘合剂组合物。

3. 发明授权

US06686413B2 Cyclohexylalkyl (meth) acrylate ester-based resin composition 失效
标题翻译：（甲基）丙烯酸环己基烷基酯类树脂组合物
公开(公告)号：US06686413B2
公开(公告)日：2004-02-03
申请号：US09938653
申请日：2001-08-27
申请人： Kazuhiko Nakamura , Yoshiyuki Yokota , Kunio Takahashi , Masaya Yoshida
发明人： Kazuhiko Nakamura , Yoshiyuki Yokota , Kunio Takahashi , Masaya Yoshida
IPC分类号： C08F22018
CPC分类号： C08F20/18 , C07C69/54 , C07C2601/14
摘要： The present invention provides a novel (meth)acrylate ester-based resin composition which, for example, exhibits various good properties such as weather resistance, heat resistance, water resistance, acid resistance, alkali resistance, warm water resistance, impact resistance, flexibility, processability, adhesion, hardness, and elongation when being used for various uses such as coating agents (e.g. for films, plastics, glass, paper, fibers, leather), pressure sensitive adhesives, and adhesives in addition to various paints (e.g. paints for building exteriors, paints for building materials, paints for metals, paints for plastics, heavy anticorrosive paints, waterproof paints for roofs). This resin composition comprises a (meth)acrylate ester-based polymer and an aqueous medium, wherein the (meth)acrylate ester-based polymer is obtained by a process including the step of polymerizing a monomer component including a polymerizable unsaturated monomer as an essential component wherein the polymerizable unsaturated monomer is a cyclohexylalkyl ester of (meth)acrylic acid wherein the cyclohexyl group may have a substituent, and wherein the (meth)acrylate ester-based polymer is dispersed in the aqueous medium.
摘要翻译：本发明提供一种新型（甲基）丙烯酸酯类树脂组合物，其例如具有耐候性，耐热性，耐水性，耐酸性，耐碱性，耐温水性，耐冲击性，柔软性，用于各种用途的加工性，粘合性，硬度和伸长率，例如涂料（例如用于薄膜，塑料，玻璃，纸，纤维，皮革），压敏粘合剂和粘合剂以及各种涂料（例如建筑用涂料外观，建筑材料涂料，金属涂料，塑料涂料，重防腐涂料，屋顶防水涂料）。该（甲基）丙烯酸酯系聚合物和水性介质，其中，（甲基）丙烯酸酯系聚合物是通过以下工序得到的：（A）其中所述可聚合不饱和单体是（甲基）丙烯酸的环己基烷基酯，其中环己基可以具有取代基，并且其中（甲基）丙烯酸酯类聚合物分散在水性介质中。

4. 发明授权

US06214931B1 Pressure-sensitive adhesives and self-adhesive films using said adhesives 失效
标题翻译：使用所述粘合剂的压敏粘合剂和自粘膜
公开(公告)号：US06214931B1
公开(公告)日：2001-04-10
申请号：US09117215
申请日：1999-04-21
申请人： Willy Segers , Jean-Marie Hoebeke , Jean-Marie Loutz
发明人： Willy Segers , Jean-Marie Hoebeke , Jean-Marie Loutz
IPC分类号： C08F22018
CPC分类号： C08F220/08 , C09J133/064 , Y10T428/2891
摘要： Pressure sensitive adhesives comprised of an aqueous dispersion of a copolymer of acrylic esters obtained in the presence of a crosslinking monomer carrying a functional group are set forth, said copolymer having a glass transition temperature which does not exceed 0° C. The crosslinking monomer is methacrylic anhydride. The resulting adhesive displays improved adhesion and cohesion properties.
摘要翻译：介绍了在存在携带官能团的交联单体的丙烯酸酯的共聚物的水性分散体中所形成的压敏粘合剂，所述共聚物的玻璃化转变温度不超过0℃。交联单体是甲基丙烯酸酐。所得粘合剂显示出改进的粘附性和内聚性。

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