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1. 发明授权

US07593610B2 Multi-mode optical coherence device and fabrication method thereof 有权
标题翻译：多模光学相干装置及其制造方法
公开(公告)号：US07593610B2
公开(公告)日：2009-09-22
申请号：US11607992
申请日：2006-12-04
申请人： Hiroshi Wada
发明人： Hiroshi Wada
IPC分类号： G02B6/26 , B02B6/42 , B02B6/10
CPC分类号： G02B6/2813
摘要： In an MMI device with which a plurality of narrow width single-mode waveguides are provided at both ends of a multimode waveguide M, and light introduced into one single-mode waveguide on the input side is interfered in the multimode waveguide to be emitted from two single-mode waveguides on the output side, a wall face perpendicular to the optical axis direction that is not provided with a single-mode waveguide is formed with an inclination being given in the thickness direction, at both ends of the multimode waveguide. Thereby, the light which is incident on the wall face is reflected toward the substrate side. In this case, because the angle of incidence into the substrate is small, almost all of the light is radiated into the inside of the substrate without being returned to the single-mode waveguide on the incident side. Therefore, an MMI device which is capable of completely eliminating the return of the reflected light with a simple structure, and a manufacturing method for the same are provided.
摘要翻译：在多模波导M的两端设置有多个窄宽度单模波导的MMI装置中，并且导入到输入侧的一个单模波导的光被干扰从多个波导中发射出来在多模波导的两端，在厚度方向上形成在输出侧的单模波导，与没有设置单模波导的光轴方向垂直的壁面。由此，入射到壁面上的光被反射向基板侧。在这种情况下，由于入射到基板的角度小，几乎所有的光都被辐射到基板的内部，而不会返回到入射侧的单模波导。因此，能够以简单的结构完全消除反射光的返回的MMI装置及其制造方法。

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