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    • 1. 发明授权
    • Thin-film bulk acoustic wave delay line
    • 薄膜体声波延迟线
    • US09473106B2
    • 2016-10-18
    • US13530029
    • 2012-06-21
    • Adam WathenWilliam HuntFarasat MunirKyle Spencer DavisJames Geoffrey MaloneyRyan Sloan Westafer
    • Adam WathenWilliam HuntFarasat MunirKyle Spencer DavisJames Geoffrey MaloneyRyan Sloan Westafer
    • H03H9/00H03H9/30H03H9/54
    • H03H9/30
    • A thin-film bulk acoustic wave delay line device providing true-time delays and a method of fabricating same. An exemplary device can comprise several thin-film layers including thin-film transducer layers, thin-film delay layers, and stacks of additional thin-film materials providing acoustic reflectors and matching networks. The layer material selection and layer thicknesses can be controlled to improve impedance matching between transducers and the various delay line materials. For example, the transducer layers and delay layers can comprise piezoelectric and amorphous forms of the same material. The layers can be deposited on a carrier substrate using standard techniques. The device can be configured so that mechanical waves propagate solely within the thin films, providing a substrate-independent device. The device, so constructed, can be of a small size, e.g. 40 μm per side, and capable of handling high power levels, potentially up to 20 dBm, with low insertion loss of approximately 3 dB.
    • 提供真实时间延迟的薄膜体声波延迟线装置及其制造方法。 示例性装置可以包括几个薄膜层,包括薄膜换能器层,薄膜延迟层和提供声反射器和匹配网络的附加薄膜材料的叠层。 可以控制层材料选择和层厚度,以改善换能器和各种延迟线材料之间的阻抗匹配。 例如,换能器层和延迟层可以包括相同材料的压电和无定形形式。 可以使用标准技术将这些层沉积在载体衬底上。 该器件可以被配置为使得机械波仅在薄膜内传播,从而提供与衬底无关的器件。 如此构造的装置可以具有小尺寸,例如, 并且能够处理高功率水平,潜在地高达20dBm,低插入损耗约为3dB。
    • 5. 发明授权
    • Broadband electroacoustic delay lines
    • 宽带电声延迟线
    • US3946341A
    • 1976-03-23
    • US53903275
    • 1975-01-06
    • LIGNES TELEGRAPH TELEPHON
    • CHIRON BERNARDPUYHAUBERT JEANSEGUIN MICHEL
    • H03H9/30H03H9/26H01L41/10H03H9/32
    • H03H9/30
    • In a broadband microwave acoustic delay line, two or more transducers are used for energy translation from electromagnetic into acoustic (one type) and reverse (the other type) which are mechanically independent and resonant at acoustic frequencies different from one to the others. Each transducer of one type is connected to a first end of a matching section which constitutes a series resonant circuit tuned at a frequency within the band different from the frequency corresponding to any other transducer. The second ends of the two or more matching sections are connected at the same end of a wideband impedance transformer.
    • 在宽带微波声波延迟线中,使用两个或更多个换能器将能量从电磁转换成声学(一种)和反向(另一种类型),它们在机械上是独立的,并且在不同于其它声学频率的声频频率下共振。 一种类型的每个换能器连接到匹配部分的第一端,该匹配部分构成在与对应于任何其它换能器的频率不同的频带内的频率调谐的串联谐振电路。 两个或多个匹配部分的第二端连接在宽带阻抗变压器的同一端。
    • 6. 发明授权
    • Ultrasonic signal transmission device with phase response shaping
    • 具有相位响应形状的超声波信号传输装置
    • US3882429A
    • 1975-05-06
    • US45630174
    • 1974-03-29
    • ANDERSEN LAB INC
    • MARTIN TOM ALAN
    • H03H9/02H03H9/30H03H9/36H03H9/42H03H9/44H03H9/46H03H9/26
    • H03H9/44H03H9/02535H03H9/02818H03H9/30H03H9/36H03H9/42H03H9/46
    • An electrical signal transmission device such as a delay line or filter of the acoustic, reflection mode type wherein an input electrical signal is converted to acoustic energy propagating along a medium such as a thin rectangular strip of spring steel toward a mismatching structure such as an array of gratings which reflects a portion of the energy for further propagation and conversion to an output electrical signal. The phase response of the device is shaped or compensated by a region of phase affecting material, such as a thin mass-loading film of gold or similar material, located on the propagating medium in the path of the reflected signal. A pattern or profile generated from the measured phase response of the device is used to control application of the material, preferably by vapor deposition, the profile and thickness of the region or film being predetermined to shape the phase response without affecting the amplitude response.
    • 一种电信号传输装置,例如声学,反射模式类型的延迟线或滤波器,其中输入电信号被转换成沿着诸如弹簧钢的薄矩形条的介质传播的声能朝着诸如阵列的不匹配结构传播 的反射一部分能量以进一步传播并转换成输出电信号的光栅。 该器件的相位响应由相位影响材料的区域(例如位于反射信号的路径中的传播介质上的金或类似材料的薄质量加载膜)的区域成形或补偿。 使用从测量的相位响应产生的图案或轮廓来控制材料的应用,优选地通过气相沉积,预定区域或膜的轮廓和厚度以形成相位响应而不影响振幅响应。