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    • 4. 发明授权
    • GaN vertical bipolar transistor
    • GaN垂直双极晶体管
    • US08823140B2
    • 2014-09-02
    • US13675916
    • 2012-11-13
    • Avogy, Inc.
    • Hui NieAndrew EdwardsIsik KizilyalliDave Bour
    • H01L29/66
    • H01L21/04H01L29/0615H01L29/2003H01L29/42304H01L29/66318H01L29/732H01L29/7371
    • An embodiment of a semiconductor device includes a III-nitride base structure of a first conductivity type, and a III-nitride emitter structure of a second conductivity type having a first surface and a second surface. The second surface is substantially opposite the first surface. The first surface of the III-nitride emitter structure is coupled to a surface of the III-nitride base structure. The semiconductor also includes a first dielectric layer coupled to the second surface of the III-nitride emitter structure, and a spacer coupled to a sidewall of the III-nitride emitter structure and the surface of the III-nitride base structure. The semiconductor also includes a base contact structure with a III-nitride material coupled to the spacer, the surface of the III-nitride base structure, and the first dielectric layer, such that the first dielectric layer and the spacer are disposed between the base contact structure and the III-nitride emitter structure.
    • 半导体器件的实施例包括第一导电类型的III族氮化物基底结构和具有第一表面和第二表面的第二导电类型的III族氮化物发射极结构。 第二表面基本上与第一表面相对。 III族氮化物发射极结构的第一表面耦合到III族氮化物基底结构的表面。 半导体还包括耦合到III族氮化物发射极结构的第二表面的第一电介质层和耦合到III族氮化物发射极结构的侧壁和III族氮化物基底结构的表面的间隔物。 该半导体还包括具有连接到间隔物,III族氮化物基底结构的表面和第一介电层的III族氮化物材料的基底接触结构,使得第一介电层和间隔物设置在基底触点 结构和III族氮化物发射极结构。
    • 9. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
    • 半导体器件及其制造方法
    • US20130137253A1
    • 2013-05-30
    • US13705610
    • 2012-12-05
    • Hiroshi KONOTakashi Shinohe
    • Hiroshi KONOTakashi Shinohe
    • H01L21/04
    • H01L21/04H01L29/0619H01L29/0834H01L29/0839H01L29/1608H01L29/66068H01L29/7395H01L29/7802
    • A semiconductor device includes: a silicon carbide substrate having first and second main surfaces; a first silicon carbide layer provided on the first main surface of the silicon carbide substrate; first silicon carbide regions formed on a surface of the first silicon carbide layer; second and third silicon carbide regions formed on respective surfaces of the first silicon carbide regions; a fourth silicon carbide region formed between facing first silicon carbide regions with the first silicon carbide layer therebetween; a gate insulating film formed continuously on surfaces of the first silicon carbide regions, the first silicon carbide layer, and the fourth silicon carbide region; a gate electrode formed on the gate insulating film; an interlayer insulating film covering the gate electrode; a first electrode electrically connected to the second and third silicon carbide regions; and a second electrode formed on the second main surface of the silicon carbide substrate.
    • 半导体器件包括:具有第一和第二主表面的碳化硅衬底; 设置在所述碳化硅衬底的所述第一主表面上的第一碳化硅层; 第一碳化硅区域形成在第一碳化硅层的表面上; 形成在第一碳化硅区域的相应表面上的第二和第三碳化硅区域; 形成在面对的第一碳化硅区域之间的第四碳化硅区域,其间具有第一碳化硅层; 在第一碳化硅区域,第一碳化硅层和第四碳化硅区域的表面上连续形成的栅极绝缘膜; 形成在栅极绝缘膜上的栅电极; 覆盖栅电极的层间绝缘膜; 电连接到第二和第三碳化硅区域的第一电极; 以及形成在碳化硅衬底的第二主表面上的第二电极。