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1. 发明授权

US10002749B2 Extinguishing arcs in a plasma chamber 有权
公开(公告)号：US10002749B2
公开(公告)日：2018-06-19
申请号：US14742960
申请日：2015-06-18
申请人： TRUMPF Huettinger GmbH + Co. KG
发明人： Andre Grede , Daniel Krausse , Anton Labanc , Christan Thome , Alberto Pena Vidal
IPC分类号： H01J37/32
CPC分类号： H01J37/32944 , H01J37/32064 , H01J37/3299
摘要： An arc extinguishing method for extinguishing arcs in a plasma chamber of a plasma system, comprising providing a plasma operating power during a plasma operation to the plasma chamber for generating plasma in the plasma chamber and carrying out a plasma-processing process using the generated plasma, by generating an analog signal by a digital-to-analog converter (DAC) and amplifying the generated analog signal on an amplifier path, monitoring, by an arc detection device, the plasma system for arcs, and in response to detecting an occurrence of an arc, controlling the DAC by the arc detection device such that the generated analog signal by the DAC is modified.

2. 发明授权

US09928992B2 Plasma generation device 有权
公开(公告)号：US09928992B2
公开(公告)日：2018-03-27
申请号：US15169768
申请日：2016-06-01
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Yoshihiro Sakaguchi , Shin-Ichi Imai
IPC分类号： H01J37/32 , A61L2/14 , H05H1/48 , H05H1/46 , C02F1/46
CPC分类号： H01J37/32064 , A61L2/14 , C02F1/4608 , C02F2303/04 , H01J37/32036 , H01J37/32045 , H01J37/32816 , H01J37/32825 , H05H1/48 , H05H2001/4682
摘要： A plasma generation device includes: a pair of electrodes that cause plasma to be generated in atmospheric pressure by a voltage being applied between the pair of electrodes; and a power source that includes a step-up transformer that has a coupling coefficient of 0.9 or greater and 0.9999 or less and generates the voltage.

3. 发明授权

US09818579B2 Reducing stored electrical energy in a lead inductance 有权
公开(公告)号：US09818579B2
公开(公告)日：2017-11-14
申请号：US14325499
申请日：2014-07-08
申请人： TRUMPF Huettinger Sp. z o. o.
发明人： Pawel Ozimek , Rafal Bugyi , Robert Dziuba , Andrzej Klimczak , Marcin Zelechowski
IPC分类号： H01J37/32 , H01M10/42 , H01M10/44 , H05H1/36
CPC分类号： H01J37/32064 , H01J37/32091 , H01J37/32174 , H01M10/42 , H01M10/425 , H01M10/4264 , H01M10/44 , H05H1/36 , Y02E60/12
摘要： According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.

4. 发明申请

US20170001918A1 Selective area coating sintering 审中-公开
标题翻译：选择性涂层烧结
公开(公告)号：US20170001918A1
公开(公告)日：2017-01-05
申请号：US15201307
申请日：2016-07-01
申请人： nGimat Co.
发明人： Andrew Tye Hunt , Stephen Johnson
IPC分类号： C04B37/02 , H01J37/32
CPC分类号： H01J37/32064 , C23C24/10 , C23C24/106 , H01J37/32009 , H01J2237/336
摘要： The present disclosure is directed to a variable sintered coating or a variable microstructure coating as well as an apparatus and method of making such a variable coating onto substrates. The substrate has some electrical conductivity and is used as one electrode while an ionized gas is used as the other electrode that is moved over the areas of the powder coating to be sintered. An electrical current is used to cause a plasma produced through the gas, resulting in a combined energy and temperature profile sufficient for powder-powder and powder-substrate bonding. This preferred method is referred to as “flame-assisted flash sintering” (FAFS).
摘要翻译：本公开涉及可变烧结涂层或可变微结构涂层以及在衬底上制备这种可变涂层的装置和方法。基板具有一些导电性，并且用作一个电极，而使用离子化气体作为在待烧结的粉末涂层的区域上移动的另一个电极。使用电流来引起通过气体产生的等离子体，从而产生足够的粉末和粉末 - 基质粘合的能量和温度曲线。该优选方法被称为“火焰辅助闪蒸烧结”（FAFS）。

5. 发明授权

US09514917B1 Controlled-energy electrical arc systems, methods, and apparatuses 有权
标题翻译：受控能量电弧系统，方法和装置
公开(公告)号：US09514917B1
公开(公告)日：2016-12-06
申请号：US14013933
申请日：2013-08-29
申请人： The Boeing Company
发明人： Carl Roy McIver , Eddie Kwon
IPC分类号： H01T2/02 , F02P17/12 , H01J37/32
CPC分类号： H01J37/32064 , H05H1/52
摘要： Systems, methods, and apparatuses for triggering electrical arcs are disclosed. Such arcs are useful for testing combustible fluids and equipment operating near ignition hazards. Arcs may be produced with a defined energy at a defined time with little variation in arc energy. Consistent production of arcs is facilitated by one or more of conditioned electrodes, control and/or reduction of parasitic capacitance, avoidance of corona sources, and non-interfering arc triggers. Electrodes may be conditioned by repeated application of conditioning arcs. Conditioned electrodes have relatively physically consistent and chemically consistent tips. Arc triggers may be charged particle sources such as light sources operating in cooperation with a target to produce free electrons proximate the electrodes.
摘要翻译：公开了用于触发电弧的系统，方法和装置。这种电弧可用于测试可燃液体和在点火危险下运行的设备。电弧可以在规定的时间内以限定的能量产生，电弧能量的变化很小。通过调节电极中的一个或多个，寄生电容的控制和/或减少，电晕源避免和非干扰电弧触发来促进电弧的一致产生。电极可以通过重复施加调节弧来调节。条件电极具有相对物理上一致和化学上一致的提示。电弧触发可以是带电粒子源，例如与目标协作操作的光源，以在电极附近产生自由电子。

6. 发明授权

US09443703B2 Apparatus for generating a hollow cathode arc discharge plasma 有权
标题翻译：用于产生中空阴极电弧放电等离子体的装置
公开(公告)号：US09443703B2
公开(公告)日：2016-09-13
申请号：US14362397
申请日：2012-10-17
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： Henry Morgner , Gösta Mattausch , Christoph Metzner , Michael Junghähnel , Rainer Labitzke , Lars Klose , Torsten Werner , Jörg Kubusch
IPC分类号： H01J7/24 , H01J37/32 , H05H1/48
CPC分类号： H01J37/32568 , H01J37/32055 , H01J37/32064 , H01J37/32596 , H01J37/32669 , H01J37/32807 , H01J2237/0822 , H01J2237/152 , H01J2237/327 , H05H1/48
摘要： An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.
摘要翻译：一种用于产生中空阴极电弧放电等离子体的装置，包括两个等离子体源，每个等离子体源包括空心阴极和与中空阴极相关联的电极，并且具有延伸穿过电极的开口，其中两个等离子体的中空阴极源极连接到在两个空心阴极之间产生双极，中频脉冲电压的脉冲发生器。这里，在两个等离子体源中的每一个中，空心阴极直接地或与至少一个电流方向限制部件的互连连接到相关联的电极。

7. 发明申请

US20160141155A1 Current Threshold Response Mode for Arc Management 审中-公开
标题翻译：电弧管理的当前阈值响应模式
公开(公告)号：US20160141155A1
公开(公告)日：2016-05-19
申请号：US15002213
申请日：2016-01-20
申请人： Advanced Energy Industries, Inc.
发明人： Skip B. Larson , Kenneth E. Nauman, JR.
IPC分类号： H01J37/32
CPC分类号： H01J37/32944 , H01J37/32064 , H01J37/3299
摘要： This disclosure describes systems, methods, and apparatuses for extinguishing electrical arcs in a plasma processing chamber. Once an arc is detected, the steady state voltage provided to the plasma processing chamber can be reduced, and the current being provided to the chamber decays below a steady state value as the arc is extinguished. When the current falls to or below a current threshold, the voltage can be ramped back up bringing the voltage and current back to steady state values. This technique enables power to return to a steady state level faster than traditional arc mitigation techniques.
摘要翻译：本公开描述了用于在等离子体处理室中熄灭电弧的系统，方法和装置。一旦检测到电弧，可以减小提供给等离子体处理室的稳态电压，并且当电弧熄灭时，提供给室的电流衰减到低于稳态值。当电流下降到或低于电流阈值时，可以将电压反斜坡，使电压和电流恢复到稳定状态值。这种技术使电源能够比传统的电弧缓解技术更快地恢复到稳定状态。

8. 发明授权

US09309596B2 Flame-assisted flash sintering 有权
标题翻译：火焰辅助闪光烧结
公开(公告)号：US09309596B2
公开(公告)日：2016-04-12
申请号：US14169470
申请日：2014-01-31
申请人： nGimat LLC
发明人： Andrew Tye Hunt , Stephen Johnson , Ganesh Venugopal
IPC分类号： H01L21/326 , C23C24/08 , H01J37/32
CPC分类号： C23C24/082 , C23C24/087 , H01J37/248 , H01J37/32027 , H01J37/32036 , H01J37/32064 , H01J37/32449 , H01J2237/332 , H01J2237/336 , H01L21/0237 , H05H1/48
摘要： The present disclosure is directed to an apparatus and method of sintering inorganic powder coatings on substrates, and includes a flame and an electric plasma. The method is capable of being used in an open atmospheric environment. The substrate is electrically conductive and is used as one electrode while the flame is used as the other electrode that is moved over the areas of the powder coating to be sintered. An electrical current is used to cause a plasma produced through the flame, resulting in a combined energy and temperature profile sufficient for inorganic powder-powder and powder-substrate bonding. This method is referred to as flame-assisted flash sintering” (FAFS).
摘要翻译：本公开涉及一种在基底上烧结无机粉末涂层的装置和方法，并且包括火焰和电等离子体。该方法能够在开放的大气环境中使用。基板是导电的，并且用作一个电极，而火焰用作在待烧结的粉末涂层的区域上移动的另一个电极。使用电流来引起通过火焰产生的等离子体，从而产生足够的无机粉末粉末和粉末 - 基底粘合的能量和温度分布。这种方法被称为火焰辅助闪蒸烧结（FAFS）。

9. 发明申请

US20150361561A1 FLAME-ASSISTED FLASH SINTERING 审中-公开
标题翻译：火焰辅助闪光烧结
公开(公告)号：US20150361561A1
公开(公告)日：2015-12-17
申请号：US14721171
申请日：2015-05-26
申请人： NGIMAT CO.
发明人： Andrew Tye Hunt , Stephen Johnson , Ganesh Venugopal
IPC分类号： C23C24/08 , H01J37/32
CPC分类号： C23C24/082 , C23C24/087 , H01J37/248 , H01J37/32027 , H01J37/32036 , H01J37/32064 , H01J37/32449 , H01J2237/332 , H01J2237/336 , H01L21/0237 , H05H1/48
摘要： The present disclosure is directed to an apparatus and method of sintering inorganic powder coatings on substrates, and includes a flame and an electric plasma. The method is capable of being used in an open atmospheric environment. The substrate is electrically conductive and is used as one electrode while the flame is used as the other electrode that is moved over the areas of the powder coating to be sintered. An electrical current is used to cause a plasma produced through the flame, resulting in a combined energy and temperature profile sufficient for inorganic powder-powder and powder-substrate bonding. This method is referred to as “flame-assisted flash sintering” (FAFS).
摘要翻译：本公开涉及一种在基底上烧结无机粉末涂层的装置和方法，并且包括火焰和电等离子体。该方法能够在开放的大气环境中使用。基板是导电的，并且用作一个电极，而火焰用作在待烧结的粉末涂层的区域上移动的另一个电极。使用电流来引起通过火焰产生的等离子体，从而产生足够的无机粉末粉末和粉末 - 基底粘合的能量和温度分布。该方法称为“火焰辅助闪蒸烧结”（FAFS）。

10. 发明申请

US20140354149A1 APPARATUS FOR GENERATING A HOLLOW CATHODE ARC DISCHARGE PLASMA 有权
标题翻译：用于产生中空阴极电弧放电等离子体的装置
公开(公告)号：US20140354149A1
公开(公告)日：2014-12-04
申请号：US14362397
申请日：2012-10-17
申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
发明人： Henry Morgner , Gösta Mattausch , Christoph Metzner , Michael Junghähnel , Rainer Labitzke , Lars Klose , Torsten Werner , Jörg Kubusch
IPC分类号： H01J37/32
CPC分类号： H01J37/32568 , H01J37/32055 , H01J37/32064 , H01J37/32596 , H01J37/32669 , H01J37/32807 , H01J2237/0822 , H01J2237/152 , H01J2237/327 , H05H1/48
摘要： An apparatus for generating a hollow cathode arc discharge plasma, including two plasma sources, each including a hollow cathode and an electrode which is associated with the hollow cathode and which has an opening that extends through the electrode, wherein the hollow cathodes of the two plasma sources are connected to a pulse generator which generates a bipolar, medium-frequency pulsed voltage between the two hollow cathodes. Here, in each of the two plasma sources, the hollow cathode is connected in an electrically conducting manner, directly or with interconnection of at least one current direction limiting component, to the associated electrode.
摘要翻译：一种用于产生中空阴极电弧放电等离子体的装置，包括两个等离子体源，每个等离子体源包括空心阴极和与中空阴极相关联的电极，并且具有延伸穿过电极的开口，其中两个等离子体的中空阴极源极连接到在两个空心阴极之间产生双极，中频脉冲电压的脉冲发生器。这里，在两个等离子体源中的每一个中，空心阴极直接地或与至少一个电流方向限制部件的互连连接到相关联的电极。

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