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    • 3. 发明申请
    • X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY VACUUM SEAL
    • X射线源,高压发生器,电子束枪,旋转靶组件,旋转靶和旋转真空密封
    • US20160020058A1
    • 2016-01-21
    • US14774424
    • 2014-03-12
    • NIKON METROLOGY NV
    • Roger HADLAND
    • H01J35/02H01J35/04H05G1/12F16C35/04H01J35/16F16J15/16F16C33/76H01J35/10H01J29/48
    • H01J35/025F16C33/768F16C35/042F16J15/16H01J29/48H01J35/04H01J35/06H01J35/101H01J35/106H01J35/108H01J35/16H01J37/065H01J2235/0236H01J2235/083H01J2235/086H01J2235/087H01J2235/1046H01J2235/1204H01J2235/1262H01J2235/20H01J2237/2482H02M1/32H02M7/106H05G1/12
    • Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b—not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c—not shown) arranged therebetween. The rotary vacuum seal includes a pumpable chamber (302) at a position intermediate between high-pressure and low-pressure ends of a bore (301) for a rotating shaft (401). The rotary target assembly is configured such that when a torque between a bearing housing (403) and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target (500) has a plurality of target plates (560) supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode (123a) maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
    • 本文公开了一种用于x射线源的高压发生器(120),x射线枪,电子束装置,旋转真空密封件,用于x射线源的靶组件,旋转x射线发射 目标(500)和x射线源。 这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源,其适用于商业和研究的X射线应用如计算机断层摄影。 特别地,高电压发生器包括电连接第一电压倍增器(122a,122b)和第二电压倍增器(122b,122c)之间的屏蔽电极(123a,123b)。 电子束装置包括控制光电检测器(202a,202b,未示出)和具有布置在其间的透明导电屏蔽(203a和203b,203c-未示出)的光发射器(201a,202a)。 旋转式真空密封件包括位于用于旋转轴(401)的孔(301)的高压和低压端之间的位置的可泵送室(302)。 旋转目标组件被构造成使得当轴承壳体(403)和真空壳体之间的扭矩超过预定扭矩时,轴承壳体相对于真空壳体旋转。 旋转X射线发射目标(500)具有支撑在轮毂上的多个目标板(560),所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极(123a)。