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    • 1. 发明授权
    • Apparatus for and method of controlling stepping motor
    • 步进电机的控制方法及控制方法
    • US5894209A
    • 1999-04-13
    • US64755
    • 1998-04-23
    • Keiichi TakagiKeiji OguraKoji Yanoguchi
    • Keiichi TakagiKeiji OguraKoji Yanoguchi
    • G05D3/10G05B19/40G11B7/085G11B21/08H02P8/00H02P8/14H02P8/22
    • G05B19/40G05B2219/41326G05B2219/42173
    • An apparatus for controlling a stepping motor used for moving a carriage having a pickup from a first position to a second position, the apparatus having: a calculating device for calculating a moving distance between the first position and the second position; a setting device for setting an acceleration area to accelerate the stepping motor and a deceleration area to decelerate the stepping motor, on the basis of the moving distance; and a driving device for driving the stepping motor by a one-two-phase excitation method until rotation velocity of the stepping motor increases to a predetermined velocity in the acceleration area, driving the stepping motor by a two-phase excitation method after rotation velocity of the stepping motor increases to the predetermined velocity in the acceleration area, driving the stepping motor by the two-phase excitation method until rotation velocity of the stepping motor decreases to the predetermined velocity in the deceleration area, and driving the stepping motor by the one-two-phase excitation method after rotation velocity of the stepping motor decreases to the predetermined velocity in the deceleration area.
    • 一种用于控制用于将具有拾取器的滑架从第一位置移动到第二位置的步进电机的装置,所述装置具有:计算装置,用于计算第一位置和第二位置之间的移动距离; 基于移动距离,设定用于加速步进电机的加速区域和用于使步进电机减速的减速区域的设定装置; 以及驱动装置,用于通过一二相激励方式驱动步进电机,直到步进电机的转速在加速区域中增加到预定速度,在步进电动机的旋转速度 步进电机在加速区域中增加到预定速度,通过两相励磁方式驱动步进电机,直到步进电机的转速在减速区域内减小到预定速度, 步进电动机的转速之后的二相励磁方式在减速区域中减小到规定的速度。
    • 2. 发明申请
    • POSITIONING DEVICE, LITHOGRAPHIC APPARATUS USING SAME, AND DEVICE MANUFACTURING METHOD
    • 定位装置,使用其的平台装置和装置制造方法
    • US20100309451A1
    • 2010-12-09
    • US12791432
    • 2010-06-01
    • Yoshinori Makita
    • Yoshinori Makita
    • G05B11/32H02P3/12G03B27/58
    • G03F7/70758G03F7/70725G05B2219/36585G05B2219/42173
    • The present invention provides a positioning device for positioning a table, including a base, a motor that drives the table in the driving area on the base, a position sensor that detects the position of the table, and a control unit that controls the motor. The control unit includes a first output unit that outputs electric current for controlling the position of the table based on the output of the position sensor; a second output unit that outputs electric current for imparting a thrust force, which is directed toward the center of the driving area, to the table; and a switch unit that switches from a state in which the motor is controlled depending on the output of the first output unit to a state in which the motor is controlled depending on the output of the second output unit, based on a stopping signal for stopping the table.
    • 本发明提供了一种定位装置,用于定位桌子,包括基座,驱动桌子在基座上的驱动区域中的马达,检测台的位置的位置传感器和控制马达的控制单元。 控制单元包括:第一输出单元,其基于位置传感器的输出输出用于控制台的位置的电流; 输出电流的第二输出单元,其将朝向驾驶区域的中心的推力赋予所述工作台; 以及开关单元,其基于所述第一输出单元的输出,根据所述第二输出单元的输出,根据所述第一输出单元的输出,将所述电动机控制的状态切换到所述电动机的控制状态,基于所述停止信号 桌子。
    • 7. 发明授权
    • Impact printer programmed servo system
    • 冲击式打印机编程伺服系统
    • US4353020A
    • 1982-10-05
    • US956735
    • 1978-11-01
    • John R. Veale
    • John R. Veale
    • G05D3/12G05B19/39G05B19/28
    • G05B19/39G05B2219/34236G05B2219/41105G05B2219/41248G05B2219/42114G05B2219/42171G05B2219/42173
    • A positioning control servo uses a digital feedback control system and an analog feedback control system, both simultaneously generating control signals to a servo summing node. The digital system derives negative feedback from velocity values which are raised to any programmed exponential value according to a linear velocity profile. The analog system feedback signals provide a non-linear velocity profile and fine position adjustment and dominates control at the servo end of travel. Interface control is provided from multiplexing a single digital feedback control system with a plurality of servo systems. The interface control selects a unique velocity profile in a digital system for each particular servo system. No switching is required between the digital and analog systems because both have continuous input to the servo summing node.
    • 定位控制伺服使用数字反馈控制系统和模拟反馈控制系统,同时向伺服求和节点产生控制信号。 数字系统根据速度曲线得出负值反馈,速度值根据线性速度分布提升到任何程度的指数值。 模拟系统反馈信号提供非线性速度分布和精细位置调整,并支配行程伺服端的控制。 通过将单个数字反馈控制系统与多个伺服系统进行多路复用来提供接口控制。 接口控制在每个特定伺服系统的数字系统中选择唯一的速度曲线。 在数字和模拟系统之间不需要切换,因为它们都具有到伺服求和节点的连续输入。
    • 8. 发明授权
    • Positioning device, lithographic apparatus using same, and device manufacturing method
    • 定位装置,使用其的光刻装置和装置制造方法
    • US08502958B2
    • 2013-08-06
    • US12791432
    • 2010-06-01
    • Yoshinori Makita
    • Yoshinori Makita
    • G03B27/58G03B27/42H02K41/02G03F7/20
    • G03F7/70758G03F7/70725G05B2219/36585G05B2219/42173
    • The present invention provides a positioning device for positioning a table, including a base, a motor that drives the table in the driving area on the base, a position sensor that detects the position of the table, and a control unit that controls the motor. The control unit includes a first output unit that outputs electric current for controlling the position of the table based on the output of the position sensor; a second output unit that outputs electric current for imparting a thrust force, which is directed toward the center of the driving area, to the table; and a switch unit that switches from a state in which the motor is controlled depending on the output of the first output unit to a state in which the motor is controlled depending on the output of the second output unit, based on a stopping signal for stopping the table.
    • 本发明提供了一种定位装置,用于定位桌子,包括基座,驱动桌子在基座上的驱动区域中的马达,检测台的位置的位置传感器和控制马达的控制单元。 控制单元包括:第一输出单元,其基于位置传感器的输出输出用于控制台的位置的电流; 输出电流的第二输出单元,其将朝向驾驶区域的中心的推力赋予所述工作台; 以及开关单元,其基于所述第一输出单元的输出,根据所述第二输出单元的输出,根据所述第一输出单元的输出,将所述电动机控制的状态切换到所述电动机的控制状态,基于所述停止信号 桌子。