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1. 发明授权

US08899393B2 Active vibration isolation system 有权
标题翻译：主动隔振系统
公开(公告)号：US08899393B2
公开(公告)日：2014-12-02
申请号：US13492225
申请日：2012-06-08
申请人： Emil Kraner , Antonio Lopes
发明人： Emil Kraner , Antonio Lopes
IPC分类号： F16F7/10
CPC分类号： F16F15/002 , F16F15/022 , G05B19/404 , G05B2219/41191 , G05B2219/49048 , G05B2219/49054
摘要： An active damping system for use in connection with a vibration isolation system includes an intermediate mass between a base and an isolated payload. The intermediate mass is supported by at least one support element which also supports at least substantially all of the static forces of the isolated payload. An actuator dampens and isolates dynamic forces acting on the intermediate mass from the isolated payload. The active damping system also includes a payload support element and a passive damping element, both of which are coupled at one end to the payload platform and at an opposite end to the intermediate mass. A sensor is affixed to the intermediate mass to generate a feedback signal to a processor coupled to the actuator.
摘要翻译：与振动隔离系统结合使用的主动阻尼系统包括在基座和隔离有效载荷之间的中间质量。中间质量块由至少一个支撑元件支撑，该至少一个支撑元件还支撑至少基本上所有隔离有效载荷的静力。执行器阻尼并隔离作用在中间质量块上的动力，从而隔离有效载荷。主动阻尼系统还包括有效负载支撑元件和被动阻尼元件，两者都在一端耦合到有效负载平台并且在与中间质量块相对的端部处。将传感器固定到中间质量块以产生到耦合到致动器的处理器的反馈信号。

2. 发明授权

US07215095B2 Driving apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：驱动装置，曝光装置和装置的制造方法
公开(公告)号：US07215095B2
公开(公告)日：2007-05-08
申请号：US11031021
申请日：2005-01-10
申请人： Hiroyuki Sekiguchi
发明人： Hiroyuki Sekiguchi
IPC分类号： G05B19/33
CPC分类号： G05B19/414 , G03B27/02 , G03F7/70725 , G03F7/70758 , G03F7/70766 , G03F7/709 , G05B19/404 , G05B2219/41191 , G05B2219/45028 , G05B2219/49257
摘要： A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, and a controller which controls the second actuator on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object so as to cancel, by the second actuator, the reaction force to be received by the reaction force counter when the object is driven by the first actuator.
摘要翻译：用于移动物体的驱动装置。该装置包括在X和Y方向上驱动物体的第一致动器，驱动反作用力计数器的第二致动器，其接收当第一致动器驱动物体时产生的反作用力;以及控制器，其基于物体的X方向和Y方向位置以及物体的X方向和Y方向加速度，以便由第二致动器抵消由反作用力计数器接收的反作用力第一执行器。

3. 发明申请

US20150084249A1 ACTIVE VIBRATION ISOLATION SYSTEM 有权
标题翻译：主动振动隔离系统
公开(公告)号：US20150084249A1
公开(公告)日：2015-03-26
申请号：US14551490
申请日：2014-11-24
申请人： Technical Manufacturing Corporation
发明人： Emil Kraner , Antonio Lopes
IPC分类号： F16F15/00 , F16F15/02
CPC分类号： F16F15/002 , F16F15/022 , G05B19/404 , G05B2219/41191 , G05B2219/49048 , G05B2219/49054
摘要： An active damping system for use in connection with a vibration isolation system includes an intermediate mass between a base and an isolated payload. The intermediate mass is supported by at least one support element which also supports at least substantially all of the static forces of the isolated payload. An actuator dampens and isolates dynamic forces acting on the intermediate mass from the isolated payload. The active damping system also includes a payload support element and a passive damping element, both of which are coupled at one end to the payload platform and at an opposite end to the intermediate mass. A sensor is affixed to the intermediate mass to generate a feedback signal to a processor coupled to the actuator.
摘要翻译：与振动隔离系统结合使用的主动阻尼系统包括在基座和隔离有效载荷之间的中间质量。中间质量块由至少一个支撑元件支撑，该至少一个支撑元件还支撑至少基本上所有隔离有效载荷的静力。执行器阻尼并隔离作用在中间质量块上的动力，从而隔离有效载荷。主动阻尼系统还包括有效负载支撑元件和被动阻尼元件，两者都在一端耦合到有效负载平台并且在与中间质量块相对的端部处。将传感器固定到中间质量块以产生到耦合到致动器的处理器的反馈信号。

4. 发明申请

US20050156552A1 Driving apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：驱动装置，曝光装置和装置的制造方法
公开(公告)号：US20050156552A1
公开(公告)日：2005-07-21
申请号：US11031021
申请日：2005-01-10
申请人： Hiroyuki Sekiguchi
发明人： Hiroyuki Sekiguchi
IPC分类号： H01L21/027 , G03F7/20 , H01L21/02 , B25J9/10 , G05B19/33
CPC分类号： G05B19/414 , G03B27/02 , G03F7/70725 , G03F7/70758 , G03F7/70766 , G03F7/709 , G05B19/404 , G05B2219/41191 , G05B2219/45028 , G05B2219/49257
摘要： This invention provides a technique that can cancel a reaction force accompanying drive of an object while moderating a limit for a driving pattern to drive the object in X and Y directions. A driving apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, and a controller which controls the second actuator on the basis of X- and Y-direction positions of the object to cancel, by the second actuator, the reaction force to be received by the reaction force counter when the object is driven by the first actuator.
摘要翻译：本发明提供一种技术，其可以缓和伴随着物体驱动的反作用力，同时缓和用于在X和Y方向上驱动物体的驱动图案的极限。驱动装置包括在X和Y方向上驱动物体的第一致动器，驱动反作用力计数器的第二致动器，其接收当第一致动器驱动物体时产生的反作用力;以及控制器，其控制第二致动器通过第二致动器，物体的X方向和Y方向位置的基础，当物体被第一致动器驱动时，由反力计数器接收的反作用力抵消。

5. 发明申请

US20180231100A1 MULTI-AXIS REACTION SYSTEM AND METHOD FOR VIBRATION CONTROL OF MECHANICAL SYSTEMS 审中-公开
公开(公告)号：US20180231100A1
公开(公告)日：2018-08-16
申请号：US15433325
申请日：2017-02-15
申请人： Amir KHAJEPOUR
发明人： Amir KHAJEPOUR , Mitchell Macleod RUSHTON , Hamed JAMSHIDIFAR
IPC分类号： F16F15/22 , F16F15/02 , G05B19/402
CPC分类号： F16F15/223 , B25J9/0078 , B25J19/002 , F16F15/02 , G05B19/402 , G05B2219/41191
摘要： The disclosure is directed at a method and apparatus for controlling unwanted vibrations in a mechanical system. The apparatus includes a set of different eccentric and/or concentric masses mounted to the mechanical system for generating forces to counteract the sensed unwanted vibrations. The apparatus further includes a set of motors that control movement of the set of masses.

6. 发明授权

US09353824B2 Active vibration isolation system 有权
标题翻译：主动隔振系统
公开(公告)号：US09353824B2
公开(公告)日：2016-05-31
申请号：US14551490
申请日：2014-11-24
申请人： Technical Manufacturing Corporation
发明人： Emil Kraner , Antonio Lopes
IPC分类号： F16F15/02 , F16F15/00 , G05B19/404
CPC分类号： F16F15/002 , F16F15/022 , G05B19/404 , G05B2219/41191 , G05B2219/49048 , G05B2219/49054
摘要： An active damping system for use in connection with a vibration isolation system includes an intermediate mass between a base and an isolated payload. The intermediate mass is supported by at least one support element which also supports at least substantially all of the static forces of the isolated payload. An actuator dampens and isolates dynamic forces acting on the intermediate mass from the isolated payload. The active damping system also includes a payload support element and a passive damping element, both of which are coupled at one end to the payload platform and at an opposite end to the intermediate mass. A sensor is affixed to the intermediate mass to generate a feedback signal to a processor coupled to the actuator.
摘要翻译：与振动隔离系统结合使用的主动阻尼系统包括在基座和隔离有效载荷之间的中间质量。中间质量块由至少一个支撑元件支撑，该至少一个支撑元件还支撑至少基本上所有隔离有效载荷的静力。执行器阻尼并隔离作用在中间质量块上的动力，从而隔离有效载荷。主动阻尼系统还包括有效负载支撑元件和被动阻尼元件，两者都在一端耦合到有效负载平台并且在与中间质量块相对的端部处。将传感器固定到中间质量块以产生到耦合到致动器的处理器的反馈信号。

7. 发明申请

US20130328253A1 ACTIVE VIBRATION ISOLATION SYSTEM 有权
公开(公告)号：US20130328253A1
公开(公告)日：2013-12-12
申请号：US13492225
申请日：2012-06-08
申请人： Emil Kraner , Antonio Lopes
发明人： Emil Kraner , Antonio Lopes
IPC分类号： F16F15/02
CPC分类号： F16F15/002 , F16F15/022 , G05B19/404 , G05B2219/41191 , G05B2219/49048 , G05B2219/49054
摘要： An active damping system for use in connection with a vibration isolation system includes an intermediate mass between a base and an isolated payload. The intermediate mass is supported by at least one support element which also supports at least substantially all of the static forces of the isolated payload. An actuator dampens and isolates dynamic forces acting on the intermediate mass from the isolated payload. The active damping system also includes a payload support element and a passive damping element, both of which are coupled at one end to the payload platform and at an opposite end to the intermediate mass. A sensor is affixed to the intermediate mass to generate a feedback signal to a processor coupled to the actuator.

8. 发明授权

US07795833B2 Driving apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：驱动装置，曝光装置和装置的制造方法
公开(公告)号：US07795833B2
公开(公告)日：2010-09-14
申请号：US12015673
申请日：2008-01-17
申请人： Hiroyuki Sekiguchi
发明人： Hiroyuki Sekiguchi
IPC分类号： G05B19/33
CPC分类号： G05B19/414 , G03B27/02 , G03F7/70725 , G03F7/70758 , G03F7/70766 , G03F7/709 , G05B19/404 , G05B2219/41191 , G05B2219/45028 , G05B2219/49257
摘要： A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter, which receives a reaction force generated when the first actuator drives the object, and a controller which calculates X- and Y-direction reaction forces and a moment reaction force on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object, which are to be received by the reaction force counter when the object is driven by the first actuator, and controls the second actuator so as to cancel the reaction forces and the moment reaction force.
摘要翻译：用于移动物体的驱动装置。该装置包括在X和Y方向上驱动物体的第一致动器，驱动反力计数器的第二致动器，其接收当第一致动器驱动物体时产生的反作用力;以及控制器，其计算X和Y轴，方向反作用力和基于物体的X方向和Y方向位置的力矩反作用力，以及物体的X方向和Y方向加速度，当物体被驱动时由反作用力计数器接收第一致动器，并且控制第二致动器以消除反作用力和力矩反作用力。

9. 发明申请

US20100030384A1 Vibration Isolation System With Design For Offloading Payload Forces Acting on Actuator 审中-公开
标题翻译：设计用于卸载执行机构上的有效载荷力的隔振系统
公开(公告)号：US20100030384A1
公开(公告)日：2010-02-04
申请号：US12181846
申请日：2008-07-29
申请人： Emil Kraner , Ulf Heide , Tony Lopes
发明人： Emil Kraner , Ulf Heide , Tony Lopes
IPC分类号： G05B21/00 , F16F7/10
CPC分类号： F16F15/02 , G05B19/404 , G05B2219/41191 , G05B2219/49048 , G05B2219/49054
摘要： An active damping system for use in connection with a vibration isolation system is provided. The active damping system having an actuator for placement on the ground, and an intermediate mass supported on the actuator for acting as a stability point to which dynamic forces can be dampened and isolated from the payload. The active damping system also includes a passive damping element and a support spring, both coupled at one end to a payload and at an opposite end to the intermediate mass. At least one offload spring can be situated between the intermediate mass and the ground for partially supporting any weight from the payload acting on the actuator. A sensor can also be affixed to the intermediate mass to generate a feedback signal to the actuator for subsequent acting on the intermediate mass to permit the intermediate mass to act as a stability point. A system and method for isolating dynamic forces using such an active damper is also provided.
摘要翻译：提供了一种与隔振系统结合使用的主动阻尼系统。主动阻尼系统具有用于放置在地面上的致动器，以及支撑在致动器上的中间质量块，用作稳定点，动力可以与有效载荷一起被阻尼和隔离。主动阻尼系统还包括被动阻尼元件和支撑弹簧，两者都在一端耦合到有效负载并且在与中间质量块相反的端部。至少一个卸载弹簧可以位于中间质量块和地面之间，用于部分地支撑来自作用在致动器上的有效载荷的任何重量。传感器还可以固定到中间质量块，以产生到致动器的反馈信号，以便随后作用在中间物质上，以允许中间物质作为稳定点。还提供了一种使用这种主动阻尼器隔离动力的系统和方法。

10. 发明授权

US07385370B2 Driving apparatus, exposure apparatus, and device manufacturing method 有权
标题翻译：驱动装置，曝光装置和装置的制造方法
公开(公告)号：US07385370B2
公开(公告)日：2008-06-10
申请号：US11690216
申请日：2007-03-23
申请人： Hiroyuki Sekiguchi
发明人： Hiroyuki Sekiguchi
IPC分类号： G05B19/33
CPC分类号： G05B19/414 , G03B27/02 , G03F7/70725 , G03F7/70758 , G03F7/70766 , G03F7/709 , G05B19/404 , G05B2219/41191 , G05B2219/45028 , G05B2219/49257
摘要： A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, and a controller which calculates X- and Y-direction reaction forces and a moment reaction force on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object, which are to be received by the reaction force counter when the object is driven by the first actuator, and controls the second actuator so as to cancel the reaction forces and the moment reaction force.
摘要翻译：用于移动物体的驱动装置。该装置包括在X和Y方向上驱动物体的第一致动器，驱动反作用力计数器的第二致动器，其接收当第一致动器驱动物体时产生的反作用力;以及控制器，其计算X和Y方向基于物体的X方向和Y方向位置的反作用力和力矩反作用力，并且当物体被驱动时被反作用力计数器接收的X方向和Y方向加速度第一致动器，并且控制第二致动器以消除反作用力和力矩反作用力。

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