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1. 发明授权

US06556876B1 Hybrid fuzzy closed-loop sub-micron critical dimension control in wafer manufacturing 有权
标题翻译：晶圆制造中混合模糊闭环亚微米临界尺寸控制
公开(公告)号：US06556876B1
公开(公告)日：2003-04-29
申请号：US09689008
申请日：2000-10-12
申请人： Hank Prosack , Patrick H. Ferland , Kenneth Swan
发明人： Hank Prosack , Patrick H. Ferland , Kenneth Swan
IPC分类号： G05B1918
CPC分类号： H01L22/20 , G05B19/41875 , G05B2219/34065 , G05B2219/42136 , G05B2219/45031 , Y02P80/30 , Y02P90/22
摘要： Variation in results of a semiconductor fabrication process is minimized by adjusting process parameters utilizing a fuzzy-controlled learning feedback system. The fuzzy-controlled learning system receives as inputs the results of the fabrication process and then converts these results into a fuzzy set defined by a membership function. An inference engine applies a fuzzy rule base to map an output fuzzy set from the input fuzzy set. The fuzzy output set is then converted to crisp outputs which automatically adjusts parameters of the fabrication process in order to minimize variation.
摘要翻译：通过使用模糊控制的学习反馈系统调整工艺参数来最小化半导体制造工艺的结果的变化。模糊控制学习系统作为输入接收制造过程的结果，然后将这些结果转换成由隶属函数定义的模糊集合。推理引擎应用模糊规则库来对来自输入模糊集的输出模糊集进行映射。然后将模糊输出集合转换为清晰的输出，自动调整制造过程的参数，以最小化变化。

2. 发明授权

US06397122B1 Apparatus and method therefor of maximizing the production run speed of a sheet fabrication machine 失效
公开(公告)号：US06397122B1
公开(公告)日：2002-05-28
申请号：US08612820
申请日：1996-03-11
申请人： Mikko Lindstrom , Jorma Taijonlathi
发明人： Mikko Lindstrom , Jorma Taijonlathi
IPC分类号： G05B19416
CPC分类号： G05B19/41875 , G05B2219/32018 , G05B2219/34065 , G05B2219/34327 , G05B2219/36101 , G05B2219/42134 , G05B2219/45131 , Y02P90/22 , Y02P90/86 , Y10S706/904
摘要： To maximize the production run speed of a sheet fabrication machine such as a turret punch press, and yet at the same time maintaining the requisite accuracy for each part produced from the production run, historical data pertaining to the various parameters for effecting the positioning moves of a worksheet are measured and collected using a reference machine or a prototype machine. For each positioning move to be effected, the CNC controller of the system retrieves the historical data from a database and, using that historical data, calculates the various parameters that affect the positioning move. By using fuzzy logic, the controller becomes, in a sense, self teaching, especially if updated historical data are provided to its database store to enhance the accuracy for later positioning moves. In addition to measuring and collecting historical data from reference or prototype machines, static process control (SPC) tests may be performed for different types of worksheets under different loads. The data collected from the SPC tests are stored and can be used as the historical data. Using historical data to calculate the next positioning move, i.e., by using the past to forecast or predict the future, the maximum allowable speed is obtained for each positioning move. At the same time moves that will produce parts that have dimensions that are within the predetermined required accuracy threshold are ensured.

3. 发明授权

US06999846B2 Apparatus and method for feedback-adjusting working condition for improving dimensional accuracy of processed workpieces 失效
公开(公告)号：US06999846B2
公开(公告)日：2006-02-14
申请号：US09819070
申请日：2001-01-08
申请人： Chisato Kato , Takahiro Kobayashi , Kazuo Kitao
发明人： Chisato Kato , Takahiro Kobayashi , Kazuo Kitao
IPC分类号： G06F19/00
CPC分类号： G05B19/401 , G05B2219/34065 , G05B2219/37345 , G05B2219/37525 , G05B2219/37536 , G05B2219/37574 , G05B2219/37577 , G05B2219/45156 , G05B2219/45161 , G05B2219/49277 , G05B2219/50008 , G05B2219/50063 , G05B2219/50307
摘要： A feedback compensating apparatus for adjusting the working condition of a working machine of a working system adapted to process working portions of successive workpieces under control of a machine controller, which determines the working condition from an extraneous signal. The apparatus is used with the controller and a measuring device for measuring the dimensions of the processed working portions of the workpieces, and includes a device for obtaining dimensional data based on outputs of the measuring device during and/or after a working operation of the machine on each workpiece. The dimensional data include a dimensional error of the processed working portions, and a variable indicative of a tendency of change in the dimensional error. The apparatus further includes a device for determining the extraneous signal based on the dimensional data, and applying the signal to the machine controller to adjust the working condition of the machine. Also disclosed is a method of processing workpieces using the apparatus.

4. 发明申请

US20020111700A1 Electronic circuit for controlling a movement by a fuzzy cellular architecture 有权
标题翻译：用于通过模糊蜂窝架构来控制移动的电子电路
公开(公告)号：US20020111700A1
公开(公告)日：2002-08-15
申请号：US09727302
申请日：2000-11-29
申请人： STMicroelectronics S.r.l
发明人： Paolo Arena , Marco Branciforte , Giovanni Di Bernardo , Luigi Occhipinti
IPC分类号： G06G007/00 , G05B013/02
CPC分类号： B25J9/161 , G05B2219/34065 , G06N7/04
摘要： A method of controlling the movements of a multi-actuator electromechanical system having a matrix of locally interconnected analog cells associated therewith is provided. Each cell represents a hardware implementation of a model of fuzzy inference rules. The model includes a fuzzy circuit architecture which may be implemented in an integrated circuit with VLSI CMOS technology that generates and controls a reaction diffusion mechanism typical of auto-waves using a fuzzy neural network. The fuzzy neural network defines the functional relationships that may duplicate simultaneous reaction diffusion equations. The duplication of the simultaneous reaction diffusion equations is provided using two sets of fuzzy rules processing, in a linguistic manner, the state variables of the cells. An oscillatory type dynamic is imposed on each cell where two dynamic processes having different kinetic characteristics coexist.
摘要翻译：提供了一种控制具有与其相关联的局部互连的模拟单元的矩阵的多致动器机电系统的运动的方法。每个单元代表模糊推理规则模型的硬件实现。该模型包括模糊电路架构，其可以在VLSI CMOS技术的集成电路中实现，该技术生成并控制使用模糊神经网络的自动波的典型反应扩散机制。模糊神经网络定义了可能重复同时反应扩散方程的功能关系。使用两组模糊规则，以语言方式处理单元的状态变量来提供同时反应扩散方程的重复。对具有不同动力特性的两个动态过程共存的每个单元施加振荡型动态。

5. 发明授权

US5598304A Fuzzy controller for an actuator and the controlling method thereof 失效
标题翻译：一种致动器的模糊控制器及其控制方法
公开(公告)号：US5598304A
公开(公告)日：1997-01-28
申请号：US382902
申请日：1995-02-02
申请人： Hyun-Taek Choi , Il hong Suh , Woo Sok Chang , Janghee Lee , Goonjin Kim
发明人： Hyun-Taek Choi , Il hong Suh , Woo Sok Chang , Janghee Lee , Goonjin Kim
IPC分类号： G05B19/416 , G11B7/085 , G11B21/08 , G11B5/596
CPC分类号： G05B19/416 , G11B21/085 , G11B7/08529 , G05B2219/34065 , G05B2219/43004 , G05B2219/43097 , Y10S706/90
摘要： A fuzzy controller controls a track seeking operation and a track following operation for an actuator in accordance with a position error between a present position value and a reference value. When the actuator is in track seeking operation, the actuator is accelerated or decelerated based on a velocity error value between an actual velocity value of the actuator and a target velocity value determined from a velocity profile according to the position error. In a deceleration control of the actuator, a fuzzy inference value generated based on the velocity error value and its differentiated velocity error value is used for a control of the actuator, thereby reducing an occurrence of overshooting at a target track.
摘要翻译：模糊控制器根据当前位置值和参考值之间的位置误差控制致动器的轨道寻找操作和跟踪跟踪操作。当致动器进行追踪操作时，基于执行器的实际速度值与根据位置误差从速度分布确定的目标速度值之间的速度误差值，致动器被加速或减速。在执行器的减速控制中，使用基于速度误差值及其微分速度误差值生成的模糊推理值进行致动器的控制，从而减少目标轨道上的过冲发生。

6. 发明授权

US5206566A Access method of actuator and control apparatus therefor 失效
标题翻译：执行机构及其控制装置的操作方法
公开(公告)号：US5206566A
公开(公告)日：1993-04-27
申请号：US664565
申请日：1991-03-05
申请人： Shuichi Yoshida , Mitsuo Tokura , Noriaki Wakabayashi
发明人： Shuichi Yoshida , Mitsuo Tokura , Noriaki Wakabayashi
IPC分类号： G05B13/02 , G05B19/23 , G05D3/12 , G11B7/085 , G11B21/08
CPC分类号： G05B13/0275 , G05B19/232 , G11B21/083 , G11B7/08505 , G05B2219/34065 , Y10S706/90 , Y10S706/904
摘要： A method and apparatus for high speed, high precision control of an actuator. An initializing process sets control signals for moving the actuator a set of predetermined distances using fuzzy logic. Control of actuator movement is then performed using these predetermined set control signals and their corresponding distances. Movement of the actuator to target distance lying between the control signal distances are achieved by an interpolation operation using fuzzy logic.
摘要翻译：一种致动器高速，高精度控制的方法和装置。初始化过程使用模糊逻辑设置用于使致动器移动一组预定距离的控制信号。然后使用这些预定的设定控制信号及其对应的距离来执行致动器运动的控制。通过使用模糊逻辑的内插操作来实现致动器到控制信号距离之间的目标距离的移动。

7. 发明授权

US06728687B2 Electronic circuit for controlling a movement by a fuzzy cellular architecture 有权
标题翻译：用于通过模糊蜂窝架构来控制移动的电子电路
公开(公告)号：US06728687B2
公开(公告)日：2004-04-27
申请号：US09727302
申请日：2000-11-29
申请人： Paolo Arena , Marco Branciforte , Giovanni Di Bernardo , Luigi Occhipinti
发明人： Paolo Arena , Marco Branciforte , Giovanni Di Bernardo , Luigi Occhipinti
IPC分类号： G06G700
CPC分类号： B25J9/161 , G05B2219/34065 , G06N7/04
摘要： A method of controlling the movements of a multi-actuator electro-mechanical system having a matrix of locally interconnected analog cells associated therewith is provided. Each cell represents a hardware implementation of a model of fuzzy inference rules. The model includes a fuzzy circuit architecture which may be implemented in an integrated circuit with VLSI CMOS technology that generates and controls a reaction diffusion mechanism typical of auto-waves using a fuzzy neural network. The fuzzy neural network defines the functional relationships that may duplicate simultaneous reaction diffusion equations. The duplication of the simultaneous reaction diffusion equations is provided using two sets of fuzzy rules processing, in a linguistic manner, the state variables of the cells. An oscillatory type dynamic is imposed on each cell where two dynamic processes having different kinetic characteristics coexist.
摘要翻译：提供了一种控制具有与其相关联的局部互连的模拟单元的矩阵的多致动器机电系统的运动的方法。每个单元代表模糊推理规则模型的硬件实现。该模型包括模糊电路架构，其可以在VLSI CMOS技术的集成电路中实现，该技术生成并控制使用模糊神经网络的自动波的典型反应扩散机制。模糊神经网络定义了可能重复同时反应扩散方程的功能关系。使用两组模糊规则，以语言方式处理单元的状态变量来提供同时反应扩散方程的重复。对具有不同动力特性的两个动态过程共存的每个单元施加振荡型动态。

8. 发明授权

US5994865A Apparatus and method for control of an earth moving implement 失效
标题翻译：土方机械控制装置及方法
公开(公告)号：US5994865A
公开(公告)日：1999-11-30
申请号：US996045
申请日：1997-12-22
申请人： Stephen K. Phelps , Robert R. Sychra
发明人： Stephen K. Phelps , Robert R. Sychra
IPC分类号： G05B13/02 , G05B19/19 , G05B19/18
CPC分类号： G05B13/0275 , G05B19/19 , G05B2219/34065 , G05B2219/37269 , G05B2219/42051 , G05B2219/42134 , Y10S706/90
摘要： An earth moving or construction equipment implement control system is disclosed. The control system includes a fuzzy logic controller that is connected to an electro-hydraulic valve. An implement position sensing system senses the height of the implement. A set point is compared to the implement position to produce an implement position error signal which is an input to the fuzzy logic controller.
摘要翻译：公开了一种土方移动或施工设备实施控制系统。控制系统包括连接到电动液压阀的模糊逻辑控制器。工具位置检测系统感测器具的高度。将设定点与实施位置进行比较，以产生作为模糊逻辑控制器的输入的工具位置误差信号。

9. 发明授权

US5625561A Apparatus and method for feedback adjusting machine working condition for improving dimensional accuracy of processed workpieces 失效
标题翻译：反馈调整机工作条件的设备和方法，用于提高加工工件的尺寸精度
公开(公告)号：US5625561A
公开(公告)日：1997-04-29
申请号：US379950
申请日：1995-01-27
申请人： Chisato Kato , Yoshihiko Yamakawa
发明人： Chisato Kato , Yoshihiko Yamakawa
IPC分类号： B23Q15/04 , B23Q15/00 , G05B19/18 , G05B19/401 , G05B19/404 , G06F19/00 , G06G7/64 , G06G7/66
CPC分类号： G05B19/401 , G05B2219/34065 , G05B2219/37345 , G05B2219/37525 , G05B2219/37536 , G05B2219/37574 , G05B2219/37576 , G05B2219/37614 , G05B2219/37615 , G05B2219/45156 , G05B2219/45161 , G05B2219/49168 , G05B2219/49277 , G05B2219/50008 , G05B2219/50307
摘要： An apparatus for feedback adjusting the working condition of a working machine on the basis of measured dimensions of processed workpieces, including a determining device for determining automatic and manual compensating values, and an applying device for applying the automatic and manual compensating values (Ui, U') to a machine controller for adjusting the machine working condition. The determining device determines the automatic compensating value on the basis of first or second estimated dimensional values of the workpieces obtained in an automatic compensating cycle. Each first estimated dimensional value is a sum of an actually measured dimension (X) of the workpiece and a last compensating value (U'), while each second estimated dimensional value is a sum of the actually measured dimension, the last compensating value and a previous compensating value (Ui-2, Ui-1) preceding the last compensating value. Also disclosed is a method of feedback adjusting the machine working condition.
摘要翻译：一种用于基于经处理的工件的测量尺寸反馈调整工作机器的工作状态的装置，包括用于确定自动和手动补偿值的确定装置，以及用于施加自动和手动补偿值（Ui，U '）到机器控制器，用于调整机器工作状态。确定装置基于在自动补偿周期中获得的工件的第一或第二估计尺寸值来确定自动补偿值。每个第一估计尺寸值是工件的实际测量尺寸（X）和最后补偿值（U'）的和，而每个第二估计尺寸值是实际测量尺寸，最后补偿值和先前的补偿值（Ui-2，Ui-1）。还公开了一种反馈调整机器工作状态的方法。

10. 发明授权

US5532932A Numerical control unit 失效
标题翻译：数控单元
公开(公告)号：US5532932A
公开(公告)日：1996-07-02
申请号：US405025
申请日：1995-03-16
申请人： Tomomitsu Niwa
发明人： Tomomitsu Niwa
IPC分类号： G05B13/02 , G05B19/18 , G05B19/401 , G05B19/4103 , G05B19/4155 , G05B19/416 , G06N7/04 , G06F15/18
CPC分类号： G05B19/4163 , G05B19/401 , G05B19/4103 , G05B19/416 , G06N7/04 , G05B2219/34065 , G05B2219/34077 , G05B2219/34078 , G05B2219/34079 , G05B2219/35286 , G05B2219/35569 , G05B2219/36214 , G05B2219/43009 , G05B2219/43129 , G05B2219/43137 , G05B2219/43141 , G05B2219/43151 , G05B2219/43152 , G05B2219/49121 , G05B2219/49143 , G05B2219/50054 , G05B2219/50109 , Y10S706/90
摘要： A numerical control unit for changing a cutting condition of a machine tool during machining of a workpiece. The numerical control unit includes a knowledge storage section for storing at least two rules for changing the cutting condition. At least one of the rules defines a rate at which movement of the machine tool is decelerated based on the position of the machine tool with respect to a corner of the workpiece. Other rules may define the rate at which movement of the machine tool is decelerated based on the shape of the corner of the workpiece being machined. Also, the other rules could be established based on the material of the tool or workpiece. The knowledge storage section further includes a rule description part and assessment functions. The numerical control unit further includes an inferring section for inferring the optimum value of the cutting condition on the basis of at least the rule or rules which define the rate at which movement of the machine tool is decelerated based on the position of the machine tool with respect to the corner of the workpiece. The numerical control unit then causes a workpiece to be machined in accordance with the cutting condition inferred by the inferring section.
摘要翻译：一种用于在加工工件期间改变机床的切割状态的数字控制单元。数字控制单元包括用于存储用于改变切割条件的至少两个规则的知识存储部。至少一个规则定义了机床的运动基于机床相对于工件的拐角的位置而减速的速率。其他规则可以基于被加工工件的角部的形状来限定机床的运动减速的速率。此外，可以基于工具或工件的材料建立其他规则。知识存储部分还包括规则描述部分和评估功能。数学控制单元还包括推断部分，用于基于至少限定基于机床的位置来减速机床的速度的规则或规则来推断切割条件的最佳值，相对于工件的角落。然后，数字控制单元根据推断部分推断的切割条件使工件被加工。

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