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1. 发明申请

US20180122667A1 CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM 审中-公开
公开(公告)号：US20180122667A1
公开(公告)日：2018-05-03
申请号：US15727297
申请日：2017-10-06
申请人： Applied Materials, Inc.
发明人： Hassan G. Iravani , Boguslaw A. Swedek , Tzu-Yu Liu , Kun Xu , Shih-Haur Shen
IPC分类号： H01L21/67 , H01L21/304 , H01L21/66 , G01N27/90 , B24B49/10 , G01B7/06
CPC分类号： H01L21/67253 , B24B49/105 , G01B7/107 , G01N27/9006 , H01L21/304 , H01L22/14 , H01L22/26
摘要： An apparatus for chemical mechanical polishing includes a platen having a surface to support a polishing pad and an electromagnetic induction monitoring system to generate a magnetic field to monitor a substrate being polished by the polishing pad. The electromagnetic induction monitoring system includes a core positioned at least partially in the platen and a coil wound around a portion of the core. The core includes a back portion and a multiplicity of posts extending from the back portion in a first direction normal to the surface of the platen. The core and coil are configured such that the multiplicity of posts include a first plurality of posts to provide a first magnetic polarity and a second plurality of posts to provide an opposite second magnetic polarity, and the first plurality of posts and the second plurality of posts are arranged in an alternating pattern.

2. 发明申请

US20170133135A1 INSPECTION APPARATUS AND INSPECTION SYSTEM FOR INSPECTING ACCESS-RESTRICTED SPACES AND AREAS 有权
公开(公告)号：US20170133135A1
公开(公告)日：2017-05-11
申请号：US15348337
申请日：2016-11-10
申请人： Airbus Operations GmbH
发明人： Matthias HEGENBART , Peter LINDE , Detlev KONIGORSKI
IPC分类号： H01F7/02 , H01F6/04 , H01F7/20 , G01N27/90 , G01N21/88
CPC分类号： H01F7/0294 , G01N21/88 , G01N21/954 , G01N27/9006 , G01N27/902 , H01F6/00 , H01F6/04 , H01F7/0257 , H01F7/06 , H01F7/20 , H01F7/206 , H02N15/04
摘要： This relates to an inspection apparatus for inspecting a structural component to which access is restricted, comprising a movable unit including a superconductor and an inspection device, a drive unit including a magnetic field generator adapted to generate a magnetic field, wherein said movable unit and said drive unit are arranged with a predetermined gap therebetween for receiving said structural component and are coupled in a force-locking manner by means of the frozen magnetic flux, i.e., without a physical connection, between the magnetic field generator and the superconductor. Thus, spaces or areas to which access is restricted can be inspected without the need of physically connecting the drive unit and the movable unit.

3. 发明授权

US09068741B2 Inspection mode switching circuit 有权
标题翻译：检查模式切换电路
公开(公告)号：US09068741B2
公开(公告)日：2015-06-30
申请号：US13482251
申请日：2012-05-29
申请人： Thomas W. Nenno , Warren R. Junker , Richard M. Novotny , Conrad S. Wyffels
发明人： Thomas W. Nenno , Warren R. Junker , Richard M. Novotny , Conrad S. Wyffels
IPC分类号： G01N27/82 , F22B37/00 , G01N27/90
CPC分类号： F22B37/005 , G01N27/9006
摘要： An eddy current probe testing apparatus structured to operate concurrently in a driver pick-up mode and said impedance mode is provided. The eddy current probe has two coils. The eddy current probe testing apparatus also includes a signal producing device, an output device, and a switch assembly. The switch assembly is structured to switch how an input signal from the signal producing device is provided to the two coils. Thus, an inspection may be performed in two modes concurrently.
摘要翻译：一种涡流探针测试装置，其被构造成在驱动器拾取模式和所述阻抗模式下同时工作。涡流探头有两个线圈。涡流探针测试装置还包括信号产生装置，输出装置和开关组件。开关组件被构造成切换如何将来自信号产生装置的输入信号提供给两个线圈。因此，可以同时以两种模式执行检查。

4. 发明授权

US08816680B2 Eddy current array configuration with reduced length and thickness 有权
标题翻译：具有减小长度和厚度的涡流阵列配置
公开(公告)号：US08816680B2
公开(公告)日：2014-08-26
申请号：US13974422
申请日：2013-08-23
申请人： Olympus NDT Inc.
发明人： Benoit LePage
IPC分类号： G01N27/72 , G01R33/12
CPC分类号： G01N27/904 , G01N27/9006
摘要： The invention herein disclosed provides a 2D coil and a method of using the 2D wound EC sensor for reproducing the Eddy Current Testing (ECT) response of a prior art 3D orthogonal sensor. The resulting thin-film eddy current array of coils configured to be placed parallel and against the test surface, and a corresponding eddy current circuitry operable to excite and receive eddy current from the array of coils. The array of coils forming at least a first inspection channel and a second inspection channel. The eddy current circuitry is configured and operable in a way that the one of the first pair of driver coils is usable as one of the second pair of driver coils; and one of the first pair of receiver coils is useable as one the second pair of receiver coils.
摘要翻译：本文公开的本发明提供了2D线圈和使用2D缠绕EC传感器来再现现有技术3D正交传感器的涡流测试（ECT）响应的方法。所得到的薄膜涡流阵列被配置为平行放置并与测试表面平行放置，以及相应的涡流电路可操作以从线圈阵列激发和接收涡流。所述线圈阵列至少形成第一检查通道和第二检查通道。涡流电路被构造和操作，使得第一对驱动器线圈中的一个可用作第二对驱动器线圈之一; 并且第一对接收器线圈中的一个可用作第二对接收器线圈中的一个。

5. 发明申请

US20130193960A1 Eddy Current Flaw Detection System and Eddy Current Flaw Detection Method 有权
标题翻译：涡流探伤系统和涡流探伤方法
公开(公告)号：US20130193960A1
公开(公告)日：2013-08-01
申请号：US13748165
申请日：2013-01-23
申请人： Hitachi-GE Nuclear Energy, Ltd.
发明人： Akira NISHIMIZU , So KITAZAWA , Naoyuki KONO , Hisashi ENDO , Kenichi OTANI , Taiichiro YAMADA , Hirofumi OUCHI , Isao YOSHIDA , Yoshio NONAKA , Masafumi IMAI
IPC分类号： G01N27/90
CPC分类号： G01N27/9006 , G01N27/82 , G01N27/902
摘要： An eddy current flaw detection system includes an eddy current flaw detection probe having a substrate facing an inspection surface, and at least one exciting coil and at least two detecting coils provided on the substrate, a scanning device which scans the probe on the inspection surface, a scan control device which drives and controls the scanning device, an eddy current flaw detection device which acquires results of detection of a plurality of detection points corresponding to combinations of the exciting and detecting coils for each scan position of the probe, and a data processing/display device which processes data from the scan control device and the eddy current flaw detection device and thereby displays a result of flaw detection. The data processing/display device acquires three-dimensional coordinates of the detection points for each scan position of the probe and thereby creates three-dimensional flaw detection data.
摘要翻译：涡流探伤系统包括具有面向检查面的基板的涡流探伤探头，以及至少一个励磁线圈和设置在基板上的至少两个检测线圈，扫描装置，其在检查面上扫描探头，驱动和控制扫描装置的扫描控制装置，涡流探伤装置，其检测与探针的每个扫描位置的激励和检测线圈的组合对应的多个检测点的检测结果，以及数据处理 /显示装置，其处理来自扫描控制装置和涡流探伤装置的数据，从而显示缺陷检测的结果。数据处理/显示装置获取探针的每个扫描位置的检测点的三维坐标，从而创建三维缺陷检测数据。

6. 发明授权

US07876093B2 Eddy current inspection device, proximity probe and method for assembling an eddy current inspection device 有权
标题翻译：涡流检测装置，接近探头和组装涡流检测装置的方法
公开(公告)号：US07876093B2
公开(公告)日：2011-01-25
申请号：US11999706
申请日：2007-12-06
申请人： Christopher Charles McMillen , Andrew David Bell
发明人： Christopher Charles McMillen , Andrew David Bell
IPC分类号： G01B7/14
CPC分类号： G01N27/9006 , G01D11/245 , Y10T29/49
摘要： A method for assembling an eddy current inspection device includes at least partially positioning a first tip assembly within a cavity defined by a proximity probe case. The first tip assembly defines a bore therethrough. The first tip assembly is sealingly coupling to the proximity probe case. A second tip assembly is at least partially positioned within the cavity and sealingly coupled to the first tip assembly.
摘要翻译：一种用于组装涡流检查装置的方法包括至少部分地将第一末端组件定位在由接近探针壳体限定的空腔内。第一尖端组件限定穿过其中的孔。第一末端组件密封地连接到接近探头壳体。第二末端组件至少部分地定位在腔体内并且密封地联接到第一末端组件。

7. 发明申请

US20100321012A1 DRIVE COIL, MEASUREMENT PROBE COMPRISING THE DRIVE COIL AND METHODS UTILIZING THE MEASUREMENT PROBE 有权
标题翻译：驱动线圈，包含驱动线圈的测量探头和使用测量探头的方法
公开(公告)号：US20100321012A1
公开(公告)日：2010-12-23
申请号：US12870804
申请日：2010-08-28
申请人： Andrzej Michal May , Waseem Ibrahim Faidi , Changting Wang , Nilesh Tralshawala , Aparna Chakrapani Sheila-Vadde , Mandar Diwakar Godbole , Jamie Thomas Livingston , Steven Haines Olson , Howard Daniel Driver
发明人： Andrzej Michal May , Waseem Ibrahim Faidi , Changting Wang , Nilesh Tralshawala , Aparna Chakrapani Sheila-Vadde , Mandar Diwakar Godbole , Jamie Thomas Livingston , Steven Haines Olson , Howard Daniel Driver
IPC分类号： G01R33/12 , H01F27/28
CPC分类号： G01N27/9006 , B29C65/483 , B29C65/485 , B29C65/4855 , B29C65/4875 , B29C65/5021 , B29C65/5057 , B29C65/8253 , B29C65/8269 , B29C65/8284 , B29C66/1122 , B29C66/1162 , B29C66/43 , B29C66/71 , B29C66/721 , B29C70/025 , B29C70/882 , B29K2105/06 , B29K2105/203 , B29K2307/00 , B29K2309/08 , B29K2995/0008 , H01F1/083 , H01F1/37 , H01F5/00 , B29K2021/003 , B29K2023/06 , B29K2023/12 , B29K2025/06 , B29K2027/06 , B29K2031/04 , B29K2033/12 , B29K2033/20 , B29K2067/00 , B29K2067/003 , B29K2069/00 , B29K2071/00 , B29K2077/00 , B29K2081/06
摘要： The invention provides a drive coil and measurement probe comprising the drive coil. The measurement probes can be used, for example, in in-situ, non-destructive testing methods, also provided herein.
摘要翻译：本发明提供了包括驱动线圈的驱动线圈和测量探针。测量探针可以用于例如本文提供的原位，非破坏性测试方法。

8. 发明申请

US20090302834A1 Resonant Linearly Polarized Body Current Sensor 有权
标题翻译：共振线性极化体电流传感器
公开(公告)号：US20090302834A1
公开(公告)日：2009-12-10
申请号：US12520809
申请日：2007-12-20
申请人： Rodolfo E. Diaz , Jeffrey W. Peebles , Richard Lebaron , Richard Ormeno
发明人： Rodolfo E. Diaz , Jeffrey W. Peebles , Richard Lebaron , Richard Ormeno
IPC分类号： G01R33/12 , G01R27/28
CPC分类号： G01N27/9006
摘要： A linearly polarized eddy current sensor including a source antenna and a parasitic antenna coupled to the source antenna, serves as a high sensitivity tool for the measurement of the surface impedance of sheet goods without requiring contact with the sample. Sheet goods can have an anisotropic, frequency-dependent surface impedance that is sensitive to minor changes in configuration of the sample. Because the electric field induced by the sensor is linearly polarized, measurement of directionally dependent sheet impedance can be achieved. The measurement is performed with the resonant device operating in resonance mode whereby the immediate proximity of the material to be measured causes damping and shifting of the coupled loop resonance. The resonant frequency of the sensor can be tuned by making changes to its geometry.
摘要翻译：包括源天线和耦合到源天线的寄生天线的线性偏振涡流传感器用作用于测量片材的表面阻抗的高灵敏度工具，而不需要与样品接触。片材商品可以具有各向异性，频率依赖的表面阻抗，对于样品配置的微小变化敏感。由于传感器感应的电场是线性极化的，因此可以实现方向依赖片材阻抗的测量。谐振装置以谐振模式工作进行测量，由此所要测量的材料的紧邻将导致耦合的环路谐振的阻尼和移位。可以通过改变传感器的几何形状来调节传感器的谐振频率。

9. 发明申请

US20080265879A1 DEVICE FOR INSPECTING A RECTILINEAR CAVITY WITH EDDY CURRENTS 有权
标题翻译：用EDDY电流检查一个整体的空间的设备
公开(公告)号：US20080265879A1
公开(公告)日：2008-10-30
申请号：US12102460
申请日：2008-04-14
申请人： Patrick Briffa , Patrick Cabanis , Patrick Gaisnon , Luc Ravize
发明人： Patrick Briffa , Patrick Cabanis , Patrick Gaisnon , Luc Ravize
IPC分类号： G01N27/82
CPC分类号： G01N27/9006 , F01D25/285 , F05D2260/80
摘要： Inspecting an open cavity by successive broaching movements of an eddy-current sensor. The inspection device comprises a probe body including the sensor installed laterally in the vicinity of the end of a rod and in line with a ramp, together with resilient bias means acting on the probe body.
摘要翻译：通过涡流传感器的连续拉削运动来检查开放的腔。检查装置包括探针主体，该探针主体包括横向安装在杆的端部附近并与斜坡一致的传感器，以及作用在探针主体上的弹性偏置装置。

10. 发明申请

US20070244659A1 METHOD OF ALIGNING PROBE FOR EDDY CURRENT INSPECTION 有权
标题翻译：用于EDDY电流检测的校准方法
公开(公告)号：US20070244659A1
公开(公告)日：2007-10-18
申请号：US11466503
申请日：2006-08-23
申请人： Ui Won Suh , Richard C. Knepfle
发明人： Ui Won Suh , Richard C. Knepfle
IPC分类号： G06F19/00
CPC分类号： G01N27/9006
摘要： A system and method using a touch probe device for eddy current inspection. The touch probe provides a simple approach for coming within close contact of the specimen while maintaining a normal angle and pressure at the right positions. The use of the touch probe further reduces the total time for the eddy current inspection. The touch probe aligns the probe to a specimen to be inspected, for the purpose of reducing measurement errors and increasing productivity.
摘要翻译：一种使用探针装置进行涡流检测的系统和方法。触摸探针提供了一个简单的方法来保持样品的紧密接触，同时保持正确的位置处的正常角度和压力。使用触摸探头进一步减少了涡流检测的总时间。探针将探头对准要检查的样品，以减少测量误差并提高生产率。

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