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1. 发明授权

US09447839B2 Support module for lithography system 有权
标题翻译：光刻系统支持模块
公开(公告)号：US09447839B2
公开(公告)日：2016-09-20
申请号：US14344903
申请日：2012-09-17
申请人： Mapper Lithography IP B.V.
发明人： Alje Geert Dunning
IPC分类号： F16M13/00 , F16F15/073 , F16F3/02
CPC分类号： F16F15/073 , F16F3/023 , F16F3/026 , F16F2228/063
摘要： The invention relates to a support structure and support module, for instance for use in a lithography system, comprising a frame and a support for supporting a load, wherein said support is moveable relative to said frame, said support structure further comprising a force compensation spring assembly connecting said support to said frame for at least partially supporting said support and/or said load, wherein said force compensation spring assembly comprises a first spring having a negative stiffness characteristic over a predefined range of motion of said spring, and a second spring having a positive stiffness.
摘要翻译：本发明涉及支撑结构和支撑模块，例如用于光刻系统，其包括框架和用于支撑负载的支撑件，其中所述支撑件可相对于所述框架移动，所述支撑结构还包括力补偿弹簧将所述支撑件连接到所述框架上以至少部分地支撑所述支撑件和/或所述负载的组件，其中所述力补偿弹簧组件包括在所述弹簧的预定运动范围上具有负刚度特性的第一弹簧，以及具有正劲。

2. 发明申请

US20050014582A1 Continuously variable transmission or clutch with ortho-planar compliant mechanism 有权
标题翻译：连续可变传动装置或离合器具有平面兼容机构
公开(公告)号：US20050014582A1
公开(公告)日：2005-01-20
申请号：US10846937
申请日：2004-05-14
申请人： Michael Whiting , Larry Howell , Robert Todd , Spencer Magleby , Mark Anderson , Nathan Rasmussen
发明人： Michael Whiting , Larry Howell , Robert Todd , Spencer Magleby , Mark Anderson , Nathan Rasmussen
IPC分类号： F16F1/32 , F16F3/02 , F16F15/073 , F16H55/56 , F16H63/00
CPC分类号： F16F15/073 , F16F1/324 , F16F3/026 , F16F2236/027
摘要： A continuously variable transmission or clutch device (10) includes at least one pulley (18) rotatable on a pivot (28) and having a pair of adjustable sheaves (30, 34) including a movable sheave (30) movable along the pivot. An ortho-planar compliant mechanism (14) is capable of elastic deformation and operatively coupled to the movable sheave to bias the movable sheave towards or away from the other sheave. The ortho-planar compliant mechanism includes a substantially flat configuration and is deflectable therefrom as the movable sheave moves. The ortho-planar compliant mechanism can include a center platform (38) disposed on the pivot and a plurality of arms (42) extending from the platform to distal ends (46) coupled to the movable sheave.
摘要翻译：无级变速器或离合器装置（10）包括至少一个在枢轴（28）上可旋转的滑轮（18），并且具有一对可调节的滑轮（30,34），该滑轮包括可沿枢轴移动的可动滑轮（30）。正平面柔性机构（14）能够弹性变形并且可操作地联接到可动滑轮以将可动滑轮偏压或朝向另一个滑轮偏置。邻平面柔性机构包括基本平坦的构造，并且随着可动滑轮的移动而可偏转。邻平面柔性机构可以包括设置在枢轴上的中心平台（38）和从平台延伸到耦合到可动滑轮的远端（46）的多个臂（42）。

3. 发明申请

US20150014510A1 SUPPORT MODULE FOR LITHOGRAPHY SYSTEM 有权
标题翻译：算术系统支持模块
公开(公告)号：US20150014510A1
公开(公告)日：2015-01-15
申请号：US14344903
申请日：2012-09-17
申请人： Mapper Lithography IP B.V.
发明人： Alje Geert Dunning
IPC分类号： F16F15/073 , F16F3/02
CPC分类号： F16F15/073 , F16F3/023 , F16F3/026 , F16F2228/063
摘要： The invention relates to a support structure and support module, for instance for use in a lithography system, comprising a frame and a support for supporting a load, wherein said support is moveable relative to said frame, said support structure further comprising a force compensation spring assembly connecting said support to said frame for at least partially supporting said support and/or said load, wherein said force compensation spring assembly comprises a first spring having a negative stiffness characteristic over a predefined range of motion of said spring, and a second spring having a positive stiffness.
摘要翻译：本发明涉及支撑结构和支撑模块，例如用于光刻系统，其包括框架和用于支撑负载的支撑件，其中所述支撑件可相对于所述框架移动，所述支撑结构还包括力补偿弹簧将所述支撑件连接到所述框架上以至少部分地支撑所述支撑件和/或所述负载的组件，其中所述力补偿弹簧组件包括在所述弹簧的预定运动范围上具有负刚度特性的第一弹簧，以及具有正劲。

4. 发明申请

US20040021123A1 Compliant, ortho-planar, linear motion spring 失效
标题翻译：标准，正平面，直线运动弹簧
公开(公告)号：US20040021123A1
公开(公告)日：2004-02-05
申请号：US10258568
申请日：2003-06-30
发明人： Larry L Howell , Scott Thomson , Jason Alan Briscoe , John J Parise , Shae Lorenc , John B Larsen , Curtis R Huffmire , Nathan Burnside , Troy A Gomm
IPC分类号： F16K001/00
CPC分类号： F16F3/023 , F16F1/027 , F16F1/324 , F16F3/026 , F16F15/073 , F16F2236/027 , Y10S251/902
摘要： An ortho-planar spring has a platform (14) movably coupled to a base (10) and being movable linearly with respect to the base along at least a portion of an axial direction (22) perpendicular to both a base surface and a platform surface. A resilient and flexible connecting structure (18) is connected to and between the base and platform. The connecting structure is bendable to develop (i) an axial force along the axial direction to bias the platform in a stable position with respect to the base, and (ii) non-axial forces which substantially sum to zero to preserve the orientation of the platform with respect to the base. Thus, the spring is very compact and does not have rotation between the deflecting ends. The spring may be associated with a valve opening (213), and a button (214) for restricting flow through the valve opening, to bias the button at a position with respect to the valve opening.
摘要翻译：正平面弹簧具有可移动地联接到基座（10）并且可沿垂直于基部表面和平台表面的轴向方向（22）的至少一部分相对于基座线性移动的平台（14）。弹性和柔性的连接结构（18）连接到基座和平台之间。连接结构是可弯曲的，以形成（i）沿轴向方向的轴向力，以将平台偏置在相对于基座的稳定位置，以及（ii）非轴向力，其基本上总和为零以保持平台相对于基地。因此，弹簧非常紧凑，并且在偏转端之间不具有旋转。弹簧可以与阀开口（213）和用于限制通过阀开口的流动的按钮（214）相关联，以将按钮偏压在相对于阀开口的位置。

5. 发明授权

US5178357A Vibration isolation system 失效
标题翻译：隔振系统
公开(公告)号：US5178357A
公开(公告)日：1993-01-12
申请号：US708995
申请日：1991-05-31
申请人： David L. Platus
发明人： David L. Platus
IPC分类号： F16F3/02 , F16F15/00 , F16F15/02 , F16F15/04 , F16F15/06 , F16F15/073
CPC分类号： F16F15/073 , F16F15/02 , F16F15/04 , F16F15/06 , F16F3/026 , F16F2228/063
摘要： An improved vibration isolation system utilizes at least one pair of structures connected vertically in series with each other and with a base structure and preloaded vertically, with a payload platform disposed between and connected to the structures. Each structure has a negative-stiffness effect in response to vertical compressive load for reducing its horizontal stiffness. The system passively accommodates changes in payload weight or weight distribution by providing a prescribed change in horizontal-motion isolator stiffness with change in weight load. The invention also provides an improved means of retrofitting existing vibration-isolating suspension systems to reduce their stiffness and increase their damping.
摘要翻译：改进的隔振系统利用至少一对垂直相互连接的结构，并且具有基础结构并且垂直地预加载，其中有效载荷平台设置在结构之间并连接到结构。每个结构都具有响应垂直压缩载荷的负刚度效应，以降低其水平刚度。通过在重量负载变化中提供水平运动隔离器刚度的规定变化，系统被动地适应有效载荷重量或重量分布的变化。本发明还提供了改进现有隔振悬架系统的改进方法，以减小其刚性并增加其阻尼。

6. 发明授权

US09791014B1 Enhanced damping materials using negative stiffness inserts 有权
公开(公告)号：US09791014B1
公开(公告)日：2017-10-17
申请号：US13837957
申请日：2013-03-15
申请人： HRL Laboratories, LLC
发明人： Geoffrey P. McKnight , Chia-Ming Chang , Andrew C. Keefe , William Carter
IPC分类号： F16F3/02 , F16F7/00
CPC分类号： F16F7/00 , F16F3/026 , F16F2228/063
摘要： In one embodiment, a vibration control apparatus is provided having a pair of face sheets with a core material in between. The core material comprising a positive stiffness material. A stack comprising a positive stiffness structure in series with a negative stiffness structure is located between the pair of face sheets, in parallel with the core material. The stack may be embedded in the core material. Various embodiments may include multiple stacks in parallel with each other. In some embodiments, the stack may include multiple positive stiffness structures in series with multiple negative stiffness structures. The multiple positive stiffness structures and negative stiffness structures may be interleaved.

7. 发明授权

US06505718B2 Vibration damping apparatus using magnetic circuit 失效
标题翻译：使用磁路的减震装置
公开(公告)号：US06505718B2
公开(公告)日：2003-01-14
申请号：US09899623
申请日：2001-07-05
申请人： Etsunori Fujita , Hiroki Oshimo , Hiroki Honda
发明人： Etsunori Fujita , Hiroki Oshimo , Hiroki Honda
IPC分类号： F16F1503
CPC分类号： F16F3/026 , F16F6/005 , F16F15/03
摘要： A vibration damping apparatus using a magnetic circuit which is easier and less expensive to manufacture than conventional apparatus is provided. The apparatus comprises a moving member 30 placed to move relatively away from and close to magnets 20 and 21 and made of a magnetic material which generates attraction force between the moving member 30 and the magnets 20 and 21, metal springs 40 and 41 as elastic members urging the moving member 30 in a direction in which the moving member 30 approaches the magnets 20 and 21, and rubbers 60 and 61 as cushioning members mounted on predetermined positions to prevent the moving member 30 from coming in contact with the magnets 20 and 21. A negative spring constant is created by using an attracting magnetic circuit formed between the magnets 20 and 21 and the moving member 30, and to this, the elastic force of the metal springs 40 and 41 having a positive spring constant with the same value as the negative spring constant is added, whereby a total spring constant within a predetermined range of displacement can be set to substantially near zero by a very simple configuration.
摘要翻译：提供一种使用比常规装置更容易制造成本更低的磁路的减振装置。该装置包括移动构件30，该移动构件30被放置成相对远离并靠近磁体20和21移动并且由在移动构件30和磁体20和21之间产生吸引力的磁性材料制成，作为弹性构件的金属弹簧40和41 在移动构件30接近磁体20和21的方向上推动移动构件30，以及作为安装在预定位置上的缓冲构件的橡胶60和61，以防止移动构件30与磁体20和21接触。通过使用形成在磁体20和21与移动构件30之间的吸引磁路来产生负的弹簧常数，并且为此，具有与弹簧常数相同的正的弹簧常数的金属弹簧40和41的弹性力与添加负弹簧常数，由此可以通过非常简单的配置将预定位移范围内的总弹簧常数设置为基本接近零。

8. 发明授权

US5909780A Vehicle for underground mine shafts 失效
标题翻译：地下矿井车辆
公开(公告)号：US5909780A
公开(公告)日：1999-06-08
申请号：US793818
申请日：1997-02-18
申请人： John De Andrade
发明人： John De Andrade
IPC分类号： B60G11/20 , B60G17/02 , B62D1/16 , B62D11/18 , B62D55/00 , B62D55/108 , F16F3/02
CPC分类号： B60G11/20 , B60G17/025 , B62D1/16 , B62D11/183 , B62D55/00 , B62D55/1083 , F16F3/026 , B60G2200/132 , B60G2202/13 , B60G2204/12 , B60G2300/32
摘要： A vehicle for underground mine shafts includes a body having a cabin located in a front section of a vehicle with an entry to the cabin located at the front of the vehicle, a door at the entry, a sensor for sensing when the door is open and control circuitry which is connected to the sensor. The vehicle also includes vehicle brakes to activate the vehicle brakes when the sensor senses that the door is open, a pair of tracks on either side of the cabin, a driving means for driving the tracks, a steering means for steering the body, and a suspension system including a torsion bar suspension arrangement which permits torsion bars of the vehicle to be located just above the level of track wheels of the vehicle. The torsion bar suspension arrangement has a torsion bar receiving means for applying torsion to the torsion bars and the torsion adjusting means includes engagement means being capable of orientation at a predetermined angle with respect to a vertical axis for engaging the torsion bar receiving means and a member having a channel formed therein for receipt of the engagement means. The torsion adjusting means is arranged to urge the torsion bar receiving means to a predetermined orientation.
摘要翻译： PCT No.PCT / AU95 / 00511 Sec。 371日期1997年2月18日 102（e）1997年2月18日PCT PCT 1995年8月17日PCT公布。出版物WO96 / 05996 日期1996年2月29日一种地下矿井轴的车辆包括一个具有位于车辆前部的舱室的车身，进入位于车辆前部的舱室，入口处的门，用于感测何时门是打开的，并且连接到传感器的控制电路。车辆还包括车辆制动器，以在传感器感测到门打开时启动车辆制动器，车厢两侧的一对轨道，用于驱动轨道的驱动装置，用于转向车身的转向装置，以及悬架系统包括扭杆悬挂装置，其允许车辆的扭杆位于车辆的履带轮的高度的正上方。扭杆悬挂装置具有用于向扭杆施加扭力的扭力杆接收装置，并且扭力调节装置包括能够相对于垂直轴线以预定角度定向的接合装置，用于接合扭杆接收装置和构件其中形成有用于接收接合装置的通道。扭转调节装置被布置成将扭杆接收装置推动到预定取向。

9. 发明授权

US5390892A Vibration isolation system 失效
标题翻译：隔振系统
公开(公告)号：US5390892A
公开(公告)日：1995-02-21
申请号：US2633
申请日：1993-01-11
申请人： David L. Platus
发明人： David L. Platus
IPC分类号： F16F3/02 , F16F15/00 , F16F15/02 , F16F15/04 , F16F15/06 , F16F15/073 , F16M13/00
CPC分类号： F16F15/073 , F16F15/02 , F16F15/04 , F16F15/06 , F16F3/026 , F16F2228/063
摘要： An improved vibration isolation system utilizes at least one pair of structures connected vertically in series with each other and with a base structure and preloaded vertically, with a payload platform disposed between and connected to the structures. Each structure has a negative-stiffness effect in response to vertical compressive load for reducing its horizontal stiffness. The system passively accommodates changes in payload weight or weight distribution by providing a prescribed change in horizontal-motion isolator stiffness with change in weight load. The invention also provides an improved means of retrofitting existing vibration-isolating suspension systems to reduce their stiffness and increase their damping.
摘要翻译：改进的隔振系统利用至少一对垂直相互连接的结构，并且具有基础结构并且垂直地预加载，其中有效载荷平台设置在结构之间并连接到结构。每个结构都具有响应垂直压缩载荷的负刚度效应，以降低其水平刚度。通过在重量负载变化中提供水平运动隔离器刚度的规定变化，系统被动地适应有效载荷重量或重量分布的变化。本发明还提供了改进现有隔振悬架系统的改进方法，以减小其刚性并增加其阻尼。

10. 发明授权

US07338398B2 Continuously variable transmission or clutch with ortho-planar compliant mechanism 有权
标题翻译：连续可变传动装置或离合器具有平面兼容机构
公开(公告)号：US07338398B2
公开(公告)日：2008-03-04
申请号：US10846937
申请日：2004-05-14
申请人： Michael J. Whiting , Larry L. Howell , Robert H. Todd , Spencer P. Magleby , Mark C. Anderson , Nathan O. Rasmussen
发明人： Michael J. Whiting , Larry L. Howell , Robert H. Todd , Spencer P. Magleby , Mark C. Anderson , Nathan O. Rasmussen
IPC分类号： F16H55/56 , F16H55/36 , F16F1/34
CPC分类号： F16F15/073 , F16F1/324 , F16F3/026 , F16F2236/027
摘要： A continuously variable transmission or clutch device (10) includes at least one pulley (18) rotatable on a pivot (28) and having a pair of adjustable sheaves (30, 34) including a movable sheave (30) movable along the pivot. An ortho-planar compliant mechanism (14) is capable of elastic deformation and operatively coupled to the movable sheave to bias the movable sheave towards or away from the other sheave. The ortho-planar compliant mechanism includes a substantially flat configuration and is deflectable therefrom as the movable sheave moves. The ortho-planar compliant mechanism can include a center platform (38) disposed on the pivot and a plurality of arms (42) extending from the platform to distal ends (46) coupled to the movable sheave.
摘要翻译：无级变速器或离合器装置（10）包括至少一个在枢轴（28）上可旋转的滑轮（18），并且具有一对可调节的滑轮（30,34），该滑轮包括可沿枢轴移动的可动滑轮（30）。正平面柔性机构（14）能够弹性变形并且可操作地联接到可动滑轮以将可动滑轮偏压或朝向另一个滑轮偏置。邻平面柔性机构包括基本平坦的构造，并且随着可动滑轮的移动而可偏转。邻平面柔性机构可以包括设置在枢轴上的中心平台（38）和从平台延伸到耦合到可动滑轮的远端（46）的多个臂（42）。

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