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    • 1. 发明申请
    • Dynamic consolidation of powders using a pulsed energy source
    • 使用脉冲能量源动态固结粉末
    • US20040265161A1
    • 2004-12-30
    • US10896947
    • 2004-07-23
    • F. Douglas WitherspoonDennis W. MasseyT. Arul MozhiDavid L. KruczynskiJohn M. Ryan
    • B22F001/00
    • B22F3/087B22F2998/00B22F2998/10B29C43/003B29C43/361B29C2043/3266B29C2043/3618B29C2043/3628B29C2043/3636B29C2791/008B30B1/002B30B11/001B30B11/02B30B15/0017B22F3/02
    • A gas operated part forming die apparatus has compact high tonnage presses which are operated by high pressure gas generated within chambers and controlled to operate high pressure pistons and dies for compressing particulate material into dense formed parts. Combustion chambers are filled with pressurized mixtures of combustible gases and diluents. Elongated chambers have insulating walls and spaced electrodes. Some contain liquid or particulate ablatable materials or ablatable liners. Others extend fuzes between the electrodes and are filled with pressurized gases. Gas is removed from the particulate material. Die cavities may be precompressed during filing of chambers with pressurized gas. Igniting the combustible gases or creating arcs between the electrodes produces rapidly expanding high pressure resultant gases for driving pistons and movable dies and rapidly compressing die cavities. Pressures in the chambers are contained, or pistons are restrained until releasing and driving the pistons. Large area pistons drive smaller movable dies.
    • 气体操作部件成形模具具有紧凑的高吨位压力机,其由在室内产生的高压气体操作并被控制以操作高压活塞和用于将颗粒材料压缩成致密成形部件的模具。 燃烧室充满可燃气体和稀释剂的加压混合物。 细长的室具有绝缘壁和隔开的电极。 一些含有液体或颗粒的可燃材料或可烧蚀的衬里。 其他的在电极之间延伸,并充满加压气体。 从颗粒材料中除去气体。 在用加压气体填充室的情况下,可以对模腔进行预压缩。 点燃可燃气体或在电极之间产生电弧产生快速膨胀的高压合成气体,用于驱动活塞和活动模具并快速压缩模腔。 容纳室中的压力,或者活塞被限制,直到释放和驱动活塞。 大面积活塞驱动较小的活动模具。
    • 6. 发明授权
    • Process for wafer bonding in a vacuum
    • 在真空中晶圆接合的工艺
    • US6008113A
    • 1999-12-28
    • US81696
    • 1998-05-19
    • M. Salleh IsmailJeffrey K. Wong
    • M. Salleh IsmailJeffrey K. Wong
    • B29C43/36B29C43/56B32B37/00H01L20060101H01L21/00H01L21/18H01L21/30H01L21/44H01L21/46
    • B29C43/3642B29C43/56B32B37/003H01L21/67092B29C2043/3266B29C2043/561B29C43/32B32B2309/68B32B2457/14H01L21/187
    • A jig for a fusion bonding process includes a sealable chamber having a first station for a first wafer and a second station for a second wafer. The wafers are initially separated from each other while a vacuum is created in the chamber. In one embodiment of the invention, movably mounted spacers separate the wafers while the vacuum is formed. The spacers are then moved to allow the wafers to come into contact and form an initial bond. In another embodiment, wafers in the first and second stations are tilted away from each other so that gravity keeps the wafers separated while the vacuum is formed. After the vacuum is formed, the chamber is rotated so that gravity pushes the two wafers together. In either embodiment, a mechanical pushing system or vibrational energy can apply force to induce or improve the initial bond. The initial bond seals cavities formed between the wafers. The jig can be transparent to infrared radiation or visible light to allow inspection of the initial bond and the sealing of the cavities. If the cavities are sealed, the wafers are removed from the chamber for annealing which strengthens the bond between the wafers. The cavities between the wafers inherit from the chamber a vacuum that helps to keep the wafers together during annealing.
    • 用于熔接工艺的夹具包括具有用于第一晶片的第一工位和第二晶片的第二工位的可密封室。 在室内产生真空时,晶片最初彼此分离。 在本发明的一个实施例中,可移动安装的间隔件在形成真空的同时分离晶片。 然后移动间隔物以允许晶片接触并形成初始粘结。 在另一个实施例中,第一和第二站中的晶片相互倾斜,使得重力在形成真空的同时使晶片分离。 在形成真空之后,旋转腔室,使得重力将两个晶片推到一起。 在任一实施例中,机械推动系统或振动能量可以施加力以诱导或改善初始粘结。 初始粘结密封在晶片之间形成的空腔。 夹具可以对红外辐射或可见光透明,以便检查初始粘合和空腔的密封。 如果空腔被密封,则晶片从用于退火的室中移除,这加强了晶片之间的结合。 晶片之间的空腔从腔室继承有真空,有助于在退火过程中将晶片保持在一起。