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    • 4. 发明授权
    • Fiber-optic beam delivery system for wafer edge processing
    • 用于晶片边缘处理的光纤束传送系统
    • US08415587B2
    • 2013-04-09
    • US13034202
    • 2011-02-24
    • Ronald P. Millman, Jr.Kenneth J. HarteVictoria M. ChaplickDavid J. Elliott
    • Ronald P. Millman, Jr.Kenneth J. HarteVictoria M. ChaplickDavid J. Elliott
    • B23K26/00
    • B23K37/0426B23K26/0619B23K26/0622B23K26/0676B23K26/0823B23K26/103B23K26/142B23K26/16B23K26/361B23K26/40B23K37/047B23K2101/40B23K2103/50
    • A method and apparatus for processing substrate edges is disclosed that overcomes the limitations of conventional edge processing methods and systems used in semiconductor manufacturing. The edge processing method and apparatus of this invention includes a laser and fiber-optic system to direct laser radiation onto a rotating substrate supported by a chuck. A laser beam is transmitted into a bundle of optical fibers, and the fibers accurately and precisely direct the beam to remove or transform organic or inorganic films, film stacks, residues, or particles, in atmosphere, from the top edge, top bevel, apex, bottom bevel, and bottom edge of the substrate in a single process step. Reaction by-products are removed by means of an exhaust tube enveloping the reaction site. This invention permits precise control of an edge exclusion width, resulting in an increase in the number of usable die on a wafer. Wafer edge processing with this invention replaces existing methods that use large volumes of purified water and hazardous chemicals including solvents, acids, alkalis, and proprietary strippers.
    • 公开了用于处理衬底边缘的方法和装置,其克服了半导体制造中使用的常规边缘处理方法和系统的限制。 本发明的边缘处理方法和装置包括激光和光纤系统,用于将激光辐射引导到由卡盘支撑的旋转基底上。 激光束被传送到一束光纤中,并且光纤精确地和精确地引导光束从大气中去除或转换有机或无机膜,膜堆,残余物或颗粒,从顶部边缘,顶部斜面,顶点 ,底部斜面和底部边缘,在单个工艺步骤中。 通过包围反应部位的排气管除去反应副产物。 本发明允许对边缘排除宽度的精确控制,导致晶片上可用的管芯数量的增加。 本发明的晶圆边缘处理取代了现有的使用大量净化水和危险化学品(包括溶剂,酸,碱和专有剥离剂)的方法。
    • 10. 发明申请
    • Water Heater or Steam Generator
    • 热水器或蒸汽发生器
    • US20080087234A1
    • 2008-04-17
    • US11571627
    • 2005-07-04
    • Mario MontanaroDavid NamanGustavo Beltrami
    • Mario MontanaroDavid NamanGustavo Beltrami
    • F24H9/02B23K26/20
    • F24H9/1818B23K26/103B23K26/28B23K2101/14Y10T29/49387
    • The water heater (2) or steam generator comprises a chamber (4) in two sections (5, 6) formed in particular by stamping. Inside this chamber a heating element (8) is arranged, which has a spiral-shaped main section (10) and two end sections (11, 12) passing through two circular openings of the chamber. The two end sections are welded to the chamber by a laser beam such that the weld obtained is continuous and ensures a good mechanical fixture of the heating element and an adequate tightness for the water heater or steam generator. For this purpose, a flange (18) is arranged at the periphery of each opening. Moreover, the two sections of the chamber have a widened edge (28) to allow them to be welded effectively.
    • 热水器(2)或蒸汽发生器包括在特别通过冲压形成的两个部分(5,6)中的腔室(4)。 在该室内设有加热元件(8),该加热元件(8)具有螺旋形的主要部分(10)和穿过该腔室的两个圆形开口的两个端部部分(11,12)。 两个端部通过激光束焊接到腔室,使得获得的焊接是连续的,并且确保加热元件的良好的机械夹具以及热水器或蒸汽发生器的足够的密封性。 为此,在每个开口的周边布置有凸缘(18)。 此外,腔室的两个部分具有加宽的边缘(28),以允许它们被有效地焊接。