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    • 8. 发明申请
    • LAYOUT DESIGN FOR A HIGH POWER, GaN-BASED FET
    • 用于高功率GaN基FET的布局设计
    • US20110316045A1
    • 2011-12-29
    • US12821492
    • 2010-06-23
    • Linlin LIUMilan POPHRISTICBoris Peres
    • Linlin LIUMilan POPHRISTICBoris Peres
    • H01L29/772
    • H01L29/7786H01L29/0657H01L29/2003H01L29/41758H01L29/42316
    • A FET includes a substrate, a buffer layer disposed on the substrate, a channel layer disposed over the buffer layer and a barrier layer disposed over the channel layer. Source, gate and drain electrodes are located over the barrier layer and extend in a longitudinal direction thereon. A portion of the channel and barrier layers define a mesa extending in the longitudinal direction and the source and drain electrodes extend beyond an edge of the mesa. The gate electrodes extend along an edge sidewall of the mesa. A conductive source interconnect is disposed over the buffer layer and have a first end electrically connected to the source electrode. A first dielectric layer is disposed over the buffer layer and over the source interconnect. A gate via is formed in the first dielectric layer. A conductive gate node extends along the buffer layer and electrically connects the portion of the gate electrode extending along the sidewall of the mesa. A gate pad is disposed on the first dielectric layer adjacent the mesa. A conductive gate connect strip is located over the gate node and is in contact therewith. The gate strip is in electrical contact with the gate pad. A source via is formed in the first dielectric layer and a source pad is formed in the source via. The conductive source interconnect has a second end in electrical contact with the source pad.
    • FET包括衬底,设置在衬底上的缓冲层,设置在缓冲层上的沟道层和设置在沟道层上的阻挡层。 源极,栅极和漏极电极位于阻挡层的上方并沿其纵向方向延伸。 通道和阻挡层的一部分限定沿纵向方向延伸的台面,并且源电极和漏电极延伸超过台面的边缘。 栅电极沿台面的边缘侧壁延伸。 导电源互连设置在缓冲层之上并且具有电连接到源电极的第一端。 第一介电层设置在缓冲层之上并且在源互连上。 在第一电介质层中形成栅极通孔。 导电栅极节点沿着缓冲层延伸并且电连接沿着台面的侧壁延伸的栅电极的部分。 栅极焊盘设置在与台面相邻的第一电介质层上。 导电栅极连接条位于栅极节点上方并与其接触。 栅极条与栅极焊盘电接触。 源极通孔形成在第一电介质层中,并且在源极通孔中形成源极焊盘。 导电源互连具有与源极焊盘电接触的第二端。