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1. 发明授权

US12117606B2 MEMs phased-array for LiDAR applications 有权
公开(公告)号：US12117606B2
公开(公告)日：2024-10-15
申请号：US17001477
申请日：2020-08-24
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Yuki Ashida , Stephen Hamann , Olav Solgaard , Alexander Payne , Lars Eng , James Hunter
IPC分类号： G02B26/08 , B81B3/00 , B81B7/00 , B81B7/02 , G01S7/481 , G02B5/18
CPC分类号： G02B26/0833 , B81B3/0083 , B81B7/0067 , B81B7/02 , G01S7/4817 , G02B5/1814 , B81B2201/047
摘要： An optical scanner including micro-electromechanical system phased-arrays suitable for use in a LiDAR system, and methods of operating the same are described. Generally, the scanner includes an optical transmitter having first phased-arrays to receive light from a light source, form a swath of illumination in a far field scene and to modulate phases of the light to sweep or steer the swath over the scene in two-dimensions (2D). An optical receiver in the scanner includes second phased-arrays to receive light from the far field scene and direct at least some of the light onto a detector. The second phased-arrays are configured to de-scan the received light by directing light reflected from the far field scene onto the detector while rejecting background light. In one embodiment the second phased-arrays direct light from a slice of the far field scene onto a 1D detector array.

2. 发明授权

US11933962B2 MEMS based spatial light modulators and applications 有权
公开(公告)号：US11933962B2
公开(公告)日：2024-03-19
申请号：US17591898
申请日：2022-02-03
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Stephen Hamann , Alexander Payne , Lars Eng , James Hunter , Tianbo Liu , Gregory Jacob
IPC分类号： G02B26/00 , G02B26/02 , G02B26/08 , G03F7/00
CPC分类号： G02B26/001 , G02B26/023 , G02B26/0808 , G02B26/0841 , G03F7/70191
摘要： Spatial light modulators (SLMs) and systems using same are described. Generally, the system includes a laser, a fixture holding a workpiece to be processed using the laser, illumination optics to illuminate the SLM with laser light, imaging optics to focus modulated light from the SLM onto the workpiece, and a controller to control the laser, the SLM, imaging optics and the fixture to scan the modulated light across a workpiece surface. The SLM includes an array of microelectromechanical system based diffractors, each including an electrostatically deflectable member coupled to a first light reflective surface and to bring light reflected from the first light reflective surface into interference with light reflected from a second light reflective surface in the SLM. The controller is operable to provide analog gray-scale control of an intensity of modulated light reflected from each diffractor by controlling an electrostatic force generated by a driver coupled thereto.

3. 发明公开

US20230251548A1 MIRROR-ENHANCED MEMS-BASED SPATIAL LIGHT MODULATOR 审中-公开
公开(公告)号：US20230251548A1
公开(公告)日：2023-08-10
申请号：US18164092
申请日：2023-02-03
申请人： Silicon Light Machines Corporation
发明人： Olav SOLGAARD , Stephen Sanborn HAMANN
IPC分类号： G02F1/29 , G01S7/481
CPC分类号： G02F1/292 , G01S7/4817 , G02F2203/12 , G02F2203/05
摘要： A micromechanical systems (MEMS)-based spatial light modulator (SLM) incorporates a mirror to increase the travel path of light. Light incoming to the MEMS-based SLM is incident on a modulation element of a phased-array. The modulation element reflects the light to a mirror, which reflects the light back to the modulation element. The modulation element reflects the light reflected off the mirror out of the MEMS-based SLM. A dispersive element allows the light to be steered by changing a wavelength of the light.

4. 发明申请

US20220252858A1 Reflective Two-Dimensional Spatial Light Modulators 有权
公开(公告)号：US20220252858A1
公开(公告)日：2022-08-11
申请号：US17591858
申请日：2022-02-03
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Alexander Payne , James Hunter , Tianbo Liu
IPC分类号： G02B26/00 , G02B26/08
摘要： A high-contrast two-dimensional Micro-Electromechanical System light modulator and methods of fabricating and operating the same in various applications is provided. Generally, the light modulator includes a single, deformable membrane suspended over a surface of a substrate by posts at corners thereof, the deformable membrane including an electrostatically deflectable patterned central portion (CP) and a number of flexures through which the CP is coupled to the posts. A membrane reflector is formed on a surface of the CP, and a substrate reflector over a surface of the substrate, and the substrate reflector exposed through void spaces between the posts, flexures and CP. The light modulator is operable so that when the membrane reflector is deformed into a non-planar surface by electrostatic deflection of the CP, and light reflected from the membrane reflector is brought into phase interference with light reflected from the substrate reflector.

5. 发明授权

US11333894B2 Anamorphic illumination optics for a MEMS spatial light modulator 有权
公开(公告)号：US11333894B2
公开(公告)日：2022-05-17
申请号：US16380898
申请日：2019-04-10
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Yoshimi Hashimoto
IPC分类号： G02B27/09 , H01S5/00 , G02B26/08 , G02B27/42 , B33Y30/00 , G03F7/00
摘要： A system including two dimensional, microelectromechanical system (MEMS) based spatial light modulators and anamorphic optics for improved contrast is provided. Generally, the system comprises an array of modulators having a plurality of pixels along a longitudinal axis, each pixel comprising a plurality of modulators along a transverse axis of the array. An illumination source including a laser and anamorphic optics for focuses light from the laser onto the array, and imaging optics focus modulated light from the array onto an image plane. The anamorphic optics are configured to provide a transverse numerical aperture (NA) along the transverse axis of the array that is smaller than a diffraction angle of the modulated light reflected from the array along a transverse axis of the image plane, and a longitudinal NA along the longitudinal axis of the array that is greater than the transverse NA. Other embodiments are also provided.

6. 发明授权

US11036030B2 MEMS posting for increased thermal dissipation 有权
公开(公告)号：US11036030B2
公开(公告)日：2021-06-15
申请号：US16430964
申请日：2019-06-04
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Sae Won Lee
IPC分类号： G02B26/08 , G02B7/18
摘要： A Micro-Electromechanical System (MEMS) device having improved thermal management, and methods of fabricating the same are described. Generally, the device includes a piston layer suspended over a surface of a substrate by posts at four corners thereof, the piston layer including an electrostatically deflectable piston and a number of flexures through which the piston is coupled to the posts. A faceplate including an aperture through which the piston is exposed is suspended over the piston layer. Thermal sinking structures project from the surface of the substrate and extend through void spaces between the posts, the flexures and the piston of the piston layer to provide thermal management of the piston layer. The thermal posts substantially fill the void spaces without contacting either the flexures or the piston, and without altering a deflection gap between the piston and the surface of the substrate. Other embodiments are also described.

7. 发明申请

US20210072532A1 Spatial Light Modulators for Phased-Array Applications 有权
公开(公告)号：US20210072532A1
公开(公告)日：2021-03-11
申请号：US16996346
申请日：2020-08-18
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Alexander Payne , James Hunter , Lars Eng
IPC分类号： G02B26/08 , G01S7/481 , G02B26/10
摘要： A capacitive micro-electromechanical system (MEMS) structure or device and methods of making and operating the same are described. Generally, the MEMS device provides a large stroke while maintaining good damping, enabling fast beam steering and large scan angles. In one embodiment, the capacitive MEMS device includes a bottom electrode formed over a substrate; an electrically permeable damping structure formed over the bottom electrode, the electrically permeable damping structure including a first air-gap and a dielectric layer suspended above and separated from the bottom electrode by the first air-gap; and a plurality of movable members suspended above the damping structure and separated therefrom by a second air-gap, each of the plurality of movable members including a top electrode and being configured to deflect towards the bottom electrode by electrostatic force. Other embodiments are also described.

8. 发明授权

US10574954B2 Compensation method for a scanning system with spatial light modulator 有权
公开(公告)号：US10574954B2
公开(公告)日：2020-02-25
申请号：US16209376
申请日：2018-12-04
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： Yoshimi Hashimoto
IPC分类号： H04N9/31 , G02B26/10 , G02B13/00 , G02B27/00 , G02B26/08
摘要： A multi-beam scanning system and methods of operating the same to compensate for distortion are provided. Generally, the method involves illuminating a spatial light modulator including SLM pixels arranged in parallel, each pixel including a multiple address pixels. Drive signals including image data are provided to the pixels to generate beams of modulated light reflected therefrom, which is scanned to a linear swath of a two-dimensional imaging plane using a collimate lens, a scan mirror moved about a first axis, and an imaging lens. The swath is scanned across the imaging plane in a direction orthogonal to a long axis of the swath by moving the scan mirror about a second axis. To compensate for distortion along the long axis of the swath compensated image data is provided to at least some of the address pixels generating beams of modulated light distal from an optical axis of the imaging lens.

9. 发明授权

US08957564B1 Microelectromechanical system megasonic transducer 有权
标题翻译：微机电系统兆声传感器
公开(公告)号：US08957564B1
公开(公告)日：2015-02-17
申请号：US13172514
申请日：2011-06-29
申请人： Toshio Hiroe , Zarem Harold , Alexander Payne , James Hunter
发明人： Toshio Hiroe , Zarem Harold , Alexander Payne , James Hunter
IPC分类号： H02N2/00 , B08B3/12
CPC分类号： B08B3/12 , B06B1/0292
摘要： Megasonic cleaning systems and methods of fabricating and using the same are provided. In one embodiment, the system comprises a plurality of Micro-Electromechanical System (MEMS) transducers, each transducer including a movable membrane with a membrane electrode coupled to a first potential disposed above and spaced apart from an upper surface of a die including a cavity electrode coupled to a second potential, the membrane including multiple layers including a polysilicon layer between a top silicon nitride layer and a bottom silicon nitride layer, and the membrane electrode includes the polysilicon layer; a chuck on which a target workpiece is positioned; and a fluid to couple sonic energy from the plurality of MEMS transducers to the target workpiece. Other embodiments are also provided.
摘要翻译：提供了超声波清洗系统及其制造和使用方法。在一个实施例中，系统包括多个微机电系统（MEMS）换能器，每个换能器包括具有耦合到第一电位的膜电极的可移动膜，所述膜电极设置在模具的上表面上方并与模具的上表面间隔开，所述模具的上表面包括腔电极耦合到第二电位，所述膜包括多层，包括顶部氮化硅层和底部氮化硅层之间的多晶硅层，并且所述膜电极包括所述多晶硅层; 目标工件所在的卡盘; 以及将来自多个MEMS换能器的声能耦合到目标工件的流体。还提供了其他实施例。

10. 发明授权

US08639101B1 Apparatus and method for recording an image on photographic film 有权
标题翻译：在摄影胶片上记录图像的装置和方法
公开(公告)号：US08639101B1
公开(公告)日：2014-01-28
申请号：US13633376
申请日：2012-10-02
申请人： Silicon Light Machines Corporation
发明人： Gregory A. Myatt , Alexander P. Payne , Jahja I. Trisnadi , Harold A. Zarem
IPC分类号： G03B37/02
CPC分类号： G02B26/0808 , G03B21/2033 , G03B27/528 , G03B27/73 , G03B33/06 , H04N5/846
摘要： A film recorder including a linear diffractive spatial light modulator (LDSLM) and methods of using the same to record a digital image on a strip of photographic film are provided. In one embodiment, the recorder includes: an illuminator including at least one monochromatic light source generating a light beam; a spatial light modulator assembly including at least one linear diffractive spatial light modulator (LDSLM) to receive the light beam from the illuminator and modulate the light beam from the illuminator; a film transport for transporting a photographic film on an imaging plane; and imaging optics disposed in a light path between the LDSLM and the imaging plane to image the light beam simultaneously on a substantially linear portion of the photographic film to record an image on the photographic film. Other embodiments are also provided.
摘要翻译：提供了一种包括线性衍射空间光调制器（LDSLM）的胶卷记录器及其使用方法，用于在照相胶片条上记录数字图像。在一个实施例中，记录器包括：照明器，包括产生光束的至少一个单色光源; 空间光调制器组件，其包括至少一个线性衍射空间光调制器（LDSLM），以接收来自照明器的光束并调制来自照明器的光束; 用于在成像平面上传送照相胶片的胶片传送装置; 以及设置在LDSLM和成像平面之间的光路中的成像光学器件，以将光束同时成像在照相胶片的基本上线性的部分上，以在照相胶片上记录图像。还提供了其他实施例。

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