专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08957564B1 Microelectromechanical system megasonic transducer 有权
标题翻译：微机电系统兆声传感器
公开(公告)号：US08957564B1
公开(公告)日：2015-02-17
申请号：US13172514
申请日：2011-06-29
申请人： Toshio Hiroe , Zarem Harold , Alexander Payne , James Hunter
发明人： Toshio Hiroe , Zarem Harold , Alexander Payne , James Hunter
IPC分类号： H02N2/00 , B08B3/12
CPC分类号： B08B3/12 , B06B1/0292
摘要： Megasonic cleaning systems and methods of fabricating and using the same are provided. In one embodiment, the system comprises a plurality of Micro-Electromechanical System (MEMS) transducers, each transducer including a movable membrane with a membrane electrode coupled to a first potential disposed above and spaced apart from an upper surface of a die including a cavity electrode coupled to a second potential, the membrane including multiple layers including a polysilicon layer between a top silicon nitride layer and a bottom silicon nitride layer, and the membrane electrode includes the polysilicon layer; a chuck on which a target workpiece is positioned; and a fluid to couple sonic energy from the plurality of MEMS transducers to the target workpiece. Other embodiments are also provided.
摘要翻译：提供了超声波清洗系统及其制造和使用方法。在一个实施例中，系统包括多个微机电系统（MEMS）换能器，每个换能器包括具有耦合到第一电位的膜电极的可移动膜，所述膜电极设置在模具的上表面上方并与模具的上表面间隔开，所述模具的上表面包括腔电极耦合到第二电位，所述膜包括多层，包括顶部氮化硅层和底部氮化硅层之间的多晶硅层，并且所述膜电极包括所述多晶硅层; 目标工件所在的卡盘; 以及将来自多个MEMS换能器的声能耦合到目标工件的流体。还提供了其他实施例。

IPRDB

热门服务

关于我们

友情链接

联系方式