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1. 发明授权

US07091492B2 Imaging device comprising optically coupled fiber optic plate assembly 有权
标题翻译：成像装置包括光学耦合的光纤板组件
公开(公告)号：US07091492B2
公开(公告)日：2006-08-15
申请号：US11010639
申请日：2004-12-13
申请人： Daniel Moonen
发明人： Daniel Moonen
IPC分类号： H01J37/244 , H01J37/18
CPC分类号： H01J29/892 , H01J37/224 , H01J37/26 , H01J2237/057 , H01J2237/2445
摘要： A fiber optic plate assembly is provided for transferring optical signals to a detector or other optical element within an imaging device or imaging system. The fiber optic plate assembly comprises first and second fiber optic plates coupled via an optical coupling gel configured to permit separation of the two plates from each other to permit repair or replacement of one of the plates. Alternatively, the imaging device may comprise a single fiber optic plate coupled directly to an optical detector.
摘要翻译：提供了一种用于将光学信号传送到成像装置或成像系统内的检测器或其它光学元件的光纤板组件。光纤板组件包括通过光学耦合凝胶耦合的第一和第二光纤板，其配置成允许将两个板彼此分开以允许修复或更换其中一个板。或者，成像装置可以包括直接耦合到光学检测器的单个光纤板。

2. 发明授权

US07157720B2 Multi-mode charged particle beam device 有权
标题翻译：多模带电粒子束装置
公开(公告)号：US07157720B2
公开(公告)日：2007-01-02
申请号：US10878659
申请日：2004-06-28
申请人： Henry Shih-Ming Chao , Colin Geoffrey Trevor , Paul Edward Mooney , Bernd Kraus
发明人： Henry Shih-Ming Chao , Colin Geoffrey Trevor , Paul Edward Mooney , Bernd Kraus
IPC分类号： G01K1/08 , H01J3/14 , H01J3/26 , G01N23/00 , G21K7/00
CPC分类号： H01J37/261 , H01J37/222 , H01J49/44 , H01J2237/2443 , H01J2237/24435 , H01J2237/24455 , H01J2237/2446 , H01J2237/24465 , H01J2237/2447 , H01J2237/24485 , H01J2237/2522
摘要： A charged particle device is provided comprising a charged particle source configured to direct charged particles in the direction of a specimen under examination and an imaging device configured to convert charged particles to an image representing the specimen. The imaging device comprises a detector defining a pixel array. The detector is configured to generate electric charges for individual pixels of the pixel array such that the electric charges collectively define the image. The imaging device is configured such that a portion of the pixel array can be transitioned between a partially masked state and a substantially unmasked state.
摘要翻译：提供一种带电粒子装置，其包括被配置为沿被检查样本的方向引导带电粒子的带电粒子源和被配置为将带电粒子转换成代表该样本的图像的成像装置。成像装置包括限定像素阵列的检测器。检测器被配置为为像素阵列的各个像素产生电荷，使得电荷共同定义图像。成像装置被配置为使得像素阵列的一部分可以在部分屏蔽状态和基本上未屏蔽状态之间转变。

3. 发明授权

US06914244B2 Ion beam milling system and method for electron microscopy specimen preparation 有权
标题翻译：离子束研磨系统和电子显微镜样品制备方法
公开(公告)号：US06914244B2
公开(公告)日：2005-07-05
申请号：US10859845
申请日：2004-06-03
申请人： Reza Alani
发明人： Reza Alani
IPC分类号： G01N1/28 , G01N1/32 , H01J37/20 , H01J37/305 , H01L21/00
CPC分类号： G01N1/32 , H01J37/3053 , H01J2237/31745
摘要： An ion beam milling system and method for electron microscopy specimen preparation is provided and is useful for the preparation for analysis by either TEM or SEM of semiconductors, metals, alloys, ceramics, and other inorganic materials. In one embodiment, a system and process are provided for the preparation of specimens for analysis by transmission electron microscopy including a specimen processing chamber, at least two ion beam generators, and a specimen support or holder. An ion beam masking member is secured to a surface of the specimen and the specimen is milled. Preferably, the system also includes the ability to view the progress of the milling operation and may include an imaging device such as a light microscope which permits monitoring of the area of interest on a specimen as the specimen is milled.
摘要翻译：提供离子束研磨系统和电子显微镜样品制备方法，可用于半导体，金属，合金，陶瓷和其他无机材料的TEM或SEM分析准备。在一个实施例中，提供了一种系统和方法，用于制备用于通过透射电子显微镜进行分析的样品，所述透射电子显微镜包括样品处理室，至少两个离子束发生器和样品支架或支架。将离子束遮蔽部件固定在试样的表面，并将试样研磨。优选地，该系统还包括查看铣削操作的进展的能力，并且可以包括诸如光学显微镜的成像装置，其允许在样品被研磨时监测样品上的感兴趣区域。

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